A valve comprises: a housing defining a chamber; a fluid outlet defined by a fluid outlet wall; and a first fluid outlet orifice and a second fluid outlet orifice comprising a rigid seat. The valve comprises a movable gate, that is flexible and/or compressible and impermeable. The moveable gate is more flexible than the rigid seat, has a planar surface, and is configured to slidably move in a first axis. The movable gate is configured to be positioned so that it is located between a fluid inlet orifice and the second fluid outlet orifice when the valve is in a closed position, wherein fluid pressure within the chamber causes the movable gate to seal the second fluid outlet orifice via the rigid seat, and not the fluid inlet orifice. The valve may employ gate shapes that generate and/or exploit Bernoulli effect forces when fluid passes though the valve.

A method is provided for transferring a wafer from a transfer chamber to a process chamber via a transfer valve in a semiconductor processing system. The method includes securing an outlet of the transfer chamber to an inlet of a valve body of the transfer valve and securing an outlet of the valve body of the transfer valve to an inlet of the process chamber. The transfer valve includes a rotatable sealing body disposed within an interior cavity of the valve body. The method also includes operating the transfer valve to achieve an open position and translating the wafer from the transfer chamber through the main channel of the transfer valve to the process chamber.

A method is provided for transferring a wafer from a transfer chamber to a process chamber via a transfer valve in a semiconductor processing system. The method includes securing an outlet of the transfer chamber to an inlet of a valve body of the transfer valve and securing an outlet of the valve body of the transfer valve to an inlet of the process chamber. The transfer valve includes a rotatable sealing body disposed within an interior cavity of the valve body. The method also includes operating the transfer valve to achieve an open position and translating the wafer from the transfer chamber through the main channel of the transfer valve to the process chamber.