The diaphragm valve comprises a body with a flow path, a stem, a diaphragm, a diaphragm depressor attached to the lower end of the stem, and a connecting member which connects the diaphragm and the diaphragm depressor. Further, the connecting member has a rod-shaped part to be connected to the diaphragm depressor and a flange part which is radially protruding in a circular shape at the lower end of the connecting member and having at least one notch on the outer peripheral edge. Furthermore, the rod-shaped part has a radially concaved constriction part above the flange part, and the flange part and the constriction part are embedded in the central part of the diaphragm.

A valve having a streamlined fluid flow space is disclosed. The valve includes a main body and an opening-closing member, a fluid flow space through which fluid flows is formed inside the main body, the opening-closing member opens or closes flow of the fluid. Here, the fluid flow space has a streamlined shape from an inlet in a direction from the inlet to the opening-closing member or from an outlet in a direction from the outlet to the opening-closing member.

A gas supply system includes: a first flow channel connecting a first gas source and a chamber; a second flow channel connecting a second gas source and the first flow channel; a control valve, provided in the second flow channel, configured to control a flow rate of the second gas; an orifice provided downstream of the control valve and at a terminus of the second flow channel; a switching valve, provided at a connection point between the first flow channel and the terminus of the second flow channel, configured to control a supply timing of the second gas; an exhaust mechanism, connected to a flow channel between the control valve and the orifice in the second flow channel, configured to exhaust the second gas; and a controller configured to bring the control valve, the switching valve and the exhaust mechanism into operation.

A diaphragmatic elbow damper joining two angularly oriented channels and configured to seal the channels in the absence of fluid flow overcoming gravity and atmospheric pressure.

A fluid control valve includes a cover portion having a first channel and a body portion having a second channel. Inner surfaces of the cover and the body portion define a chamber that includes an inlet and an outlet in communication with the chamber. The fluid control valve also includes a diaphragm disposed between the cover portion and the body portion. The diaphragm has a flexible member that is disposed within the chamber for controlling communication between the inlet and the outlet and a lip member circumscribing the flexible member. When the cover portion and the body portion are joined, the first channel and the second channel define a cavity that circumscribes the chamber and the cavity is configured such that each channel receives a portion of the lip member and pinches the lip member to seal the fluid control valve and hold the diaphragm.

A fluid control valve includes a cover portion and a body portion. Inner surfaces of the cover and the body portion define a chamber that includes an inlet and an outlet in communication with the chamber. The fluid control valve also includes a diaphragm disposed between the cover portion and the body portion. The diaphragm has a flexible member that is disposed within the chamber for controlling communication between the inlet and the outlet. The upper surface of the flexible member has a substantially smooth wall portion. The flexible member has an inverted position in which the upper surface conforms to at least a portion of the inner surface of the cover portion to define a passageway that permits communication between the inlet and the outlet. The diaphragm is configured such that the diaphragm exclusively biases the flexible member from the first position to the second position so that the flexible member conforms to and seals against the elongated seat member when the flexible member is in the second position.

A diaphragm member includes a film-shaped diaphragm made of PFA and a valve body which is laser welded to a central hole portion of the diaphragm.

A fluid control valve includes a cover portion and a body portion. Inner surfaces of the cover and the body portion define a chamber that includes an inlet and an outlet in communication with the chamber. The fluid control valve also includes a diaphragm disposed between the cover portion and the body portion. The diaphragm has a flexible member that is disposed within the chamber for controlling communication between the inlet and the outlet. The upper surface of the flexible member has a substantially smooth wall portion. The flexible member has an inverted position in which the upper surface conforms to at least a portion of the inner surface of the cover portion to define a passageway that permits communication between the inlet and the outlet. The diaphragm is configured such that the lower surface of the flexible member and a seat member on the body portion have corresponding radius of curvatures such that the flexible member conforms to and seals against the seat member when the flexible member is not in the inverted position.

A diaphragm valve includes a valve body that defines a flow path through which fluid flows and an opening that opens to the outside in a middle of flow path; a flexible partition member that covers the opening and separates the flow path from the outside, and changes a cross-sectional area of the flow path; and a flexible support member disposed on a rear surface side opposite to a flow path side of the flexible partition member. A housing is fixed to the valve body via peripheral portions of the flexible partition member and the flexible support member. A humidity sensor that detects a state of an atmosphere or a change thereof in a space defined by the flexible support member and an inner surface of the housing. The diaphragm valve is capable of preventing fluid in a diaphragm valve from leaking to the outside due to breakage of a diaphragm.

A fluid control valve includes a cover portion and a body portion. Inner surfaces of the cover and the body portion define a chamber that includes an inlet and an outlet in communication with the chamber. The cover portion includes a central section and an inversion inhibitor circumscribing the central section. The inversion inhibitor projects into the chamber toward a central axis of the chamber. The fluid control valve also includes a diaphragm disposed between the cover portion and the body portion. The diaphragm has a flexible member that is disposed within the chamber for controlling communication between the inlet and the outlet. The inversion inhibitor prevents the flexible member from reaching its natural-inverted position and creates a force within the flexible member that urges the flexible member to a seated position. In the partially inverted position, the upper surface of the flexible member conforms to at least a portion of the inner surface of the cover portion to define a passageway that permits communication between the inlet and the outlet.