A control plate for effecting superior shut-off in a proportional control valve comprises a moveable disk-shaped element that has a flat surface, generally perpendicular to the valve axis of symmetry when closed, and translates toward or away from an orifice surrounded by a narrow lip or orifice ridge. Enhanced leak tightness in the valve shut-off condition is achieved by selectively incorporating into the control plate materials that are softer than the material comprising the orifice ridge.

A solenoid valve has a valve drive which includes an electromagnet, an actuator coupled to a diaphragm mounted for movement between an open position and a closed position by the valve drive, a fluid housing having a valve seat, wherein a fluid channel extends in the fluid housing from a first fluid connection to the valve seat and, proceeding from the valve seat, to a second fluid connection, and the diaphragm which cooperates with the valve seat. A support ring surrounds the actuator and rests against the diaphragm. An entrainment geometry is provided between the support ring and the actuator.

A pneumatic valve features a fluid supply port, a fluid outlet port, and a fluid drainage opening. The valve includes a valve chamber with fluid supply, outlet, and trigger openings, and an actuator chamber connected to the trigger opening. An actuator with an SMA wire, actuating and resetting elements, and a printed circuit board is housed within the valve. A sealing element on the actuating element controls the trigger opening, while a membrane divides the valve chamber into two regions and facilitates plunger movement. The plunger connected to the membrane closes the fluid outlet opening in the unactuated state and opens it in the actuated state. The membrane includes a passage opening for fluid flow between the regions, with a smaller cross-section than the trigger opening, facilitating controlled fluid flow within the valve.