Not only a cylindrical weight is inserted with a clearance around an outside of a first axis part or a second axis part that extends opposite to the first axis part and is movable freely in an axial direction but also an annular seat surface on which the cylindrical weight is able to be seated by self-weight is provided with a governor valve. A projecting part(s) is provided with only a part in circumferential direction of one of the annular seat surface and a lower end surface of the cylindrical weight. The cylindrical weight is made sure to be supported on the annular seat surface in an inclined state from an upright posture by contact of the projecting part(s) with the other of the annular seat surface and the lower end surface of the cylindrical weight.

Not only a cylindrical weight is inserted with a clearance around an outside of a first axis part or a second axis part that extends opposite to the first axis part and is movable freely in an axial direction but also an annular seat surface on which the cylindrical weight is able to be seated by self-weight is provided with a governor valve. A projecting part(s) is provided with only a part in circumferential direction of one of the annular seat surface and a lower end surface of the cylindrical weight. The cylindrical weight is made sure to be supported on the annular seat surface in an inclined state from an upright posture by contact of the projecting part(s) with the other of the annular seat surface and the lower end surface of the cylindrical weight.

A control valve body has a flow passage including an inlet, an outlet, a first portion, and a second portion, the first portion having a first axis centered through the inlet, a first bend, and a second axis, the second portion having a third axis centered through the outlet, a second bend, and a fourth axis, the fourth axis perpendicular to the second axis. The first portion is to an upstream side of a junction of the first portion and the second portion, and the second portion is to a downstream side of the junction. The second axis is centered through the junction. An opening to the second portion has a fifth axis aligned with the second axis.

A control valve body has a flow passage including an inlet, an outlet, a first portion, and a second portion, the first portion having a first axis centered through the inlet, a first bend, and a second axis, the second portion having a third axis centered through the outlet, a second bend, and a fourth axis, the fourth axis perpendicular to the second axis. The first portion is to an upstream side of a junction of the first portion and the second portion, and the second portion is to a downstream side of the junction. The second axis is centered through the junction. An opening to the second portion has a fifth axis aligned with the second axis.

An apparatus for controlling flow through a flow body comprising an intake opening and an output opening in the flow body, a cavity with a first cross-sectional shape and an opening, a diaphragm or a bellows, wherein the diaphragm or the bellows seals the opening of the cavity and the diaphragm or the bellows includes a hole, a plunger with the cross-sectional shape corresponding to the cavity, wherein the plunger is longitudinally movable within the cavity and a plunger portion forms an orifice with cavity portion, and a rod coupled with the plunger for facilitating the longitudinal movement of the plunger, wherein the rod comprises a rod cross section that corresponds to the hole in the diaphragm or the bellows.

A valve (1) for fluids, preferably for gases, comprising an inlet passage (2); an outlet passage (3); a shutter (4) interposed between the inlet passage (2) and the outlet passage (3) and movable between an open position and a closed position; actuating means (5) operatively active on the shutter (4); and a first stabilisation membrane (6) interposed between the shutter (4) and a fixed portion (7) of the valve (1). The first stabilisation membrane (6) exposes an active wall (8) to the fluid, which has an outer surface (9) shaped in such a way that the pressure of the fluid acting on the active wall (8) is lower than the pressure of the fluid acting on the rear surface (10) of the shutter (4), preventing the fluid from opening the shutter (4), when the shutter (4) is in the closed position and when the valve (1) is in a back pressure condition.

A valve (1) for fluids, preferably for gases, comprising an inlet passage (2); an outlet passage (3); a shutter (4) interposed between the inlet passage (2) and the outlet passage (3) and movable between an open position and a closed position; actuating means (5) operatively active on the shutter (4); and a first stabilisation membrane (6) interposed between the shutter (4) and a fixed portion (7) of the valve (1). The first stabilisation membrane (6) exposes an active wall (8) to the fluid, which has an outer surface (9) shaped in such a way that the pressure of the fluid acting on the active wall (8) is lower than the pressure of the fluid acting on the rear surface (10) of the shutter (4), preventing the fluid from opening the shutter (4), when the shutter (4) is in the closed position and when the valve (1) is in a back pressure condition.

A system and method for a high flow valve includes a seal rod, an armature configured to be connected to and move the seal rod, a valve seal configured to be connected to the seal rod, an exhaust seal seat and a diaphragm. The valve seal is configured to be positioned on the exhaust seal seat and exert an exhaust seal pressure force. The diaphragm is configured to exert a diaphragm force opposite the exhaust seat pressure force to balance the exhaust seal pressure force.

The disclosed computer-implemented method may include a fluidic device comprising a chamber, an inlet port coupled to the chamber and configured to convey fluid to the chamber, and an outlet port coupled to the chamber and configured to convey the fluid from the chamber. The fluidic device may also have a restricting region that (1) is dimensioned to restrict a flow of the fluid through the outlet port when the pressure in the chamber is below a threshold level and (2) is configured to move in a manner that allows a flow rate of the fluid through the outlet port to increase when pressure in the chamber reaches the threshold level.

Apparatuses for controlling fluid flow are important components for delivering process fluids for semiconductor fabrication. These apparatuses for controlling fluid flow frequently rely on valves which can provide flows at different rates and in a minimally turbulent manner. In one embodiment, a valve assembly is disclosed, the valve assembly having a valve body, a closure member, a seat, and a radial flow guide. The radial flow guide has a plurality of flow passages. The closure member has a needle, the needle having a plurality of grooves therein. The resulting valve assembly enables improved control of fluid and reduces turbulence in the resultant flow.