An MMS has a first layer which has a first opening for letting pass a fluid. Additionally, a second layer which is arranged opposite the first layer is provided, and having a second layer for letting pass the fluid. Together with the first layer, it forms at least part of a layer stack with layers stacked in a stacking direction perpendicular to a substrate plane of the MEMS. A cavity arranged between the first layer and the second layer is arranged and has an element which is moveable along a direction in parallel to the substrate plane, which has at least a first and a second positioning, wherein, in the first positioning, flow-through of the fluid is inhibited and, in the second positioning, flow-through of the fluid through the cavity along the stacking direction is possible.

A valve for use in connection with microfluidic devices includes a safety feature such that flow is controlled even in the case of a loss of power, thus having applications in critical applications such as the precise delivery of drugs over time. The valve may be used in connection with multiple tubes delivering drugs, and may be used with a pump, such as an electrochemical pump, to provide the force to move the fluids containing drugs for delivery. In certain applications, more than one medicine may be delivered and metered independently using a single pump with multiple reservoirs and valves.

An actuation unit for a multi valve device, the multi valve device comprising a fluidic unit comprising at least one fluid channel and a plurality of valves, wherein the valves selectively block or open the fluid channel. The actuation unit comprises a housing and at least one actuator module. The housing is configured to receive a plurality of actuator modules. The at least one actuator module is received within the housing. The actuator module comprises at least one actuator made of a smart material and at least one valve actuation member. The actuator is configured to move at least one valve actuation member such that at least one of the valves selectively blocks or opens the fluid channel. The actuation unit is connectable to the fluidic unit. Further, a multi valve device and a fluid handling device are proposed.

A particle manipulation system uses a MEMS-based, microfabricated particle manipulation device which may be used to separate a target particle from non-target material in a sample stream. In order to improve the sorter speed, accuracy or yield, the particle manipulation system may also include a microfluidic structure which focuses the target particles in a particular portion of the sample inlet channel. The particle manipulation device may have two separate sort output channels, wherein the sort channel used depends on the characteristics of the sort pulse delivered to the micromechanical particle manipulation device. Because of the improved focusing and pulse details, a droplet may be formed which contains a single particle, which may also be barcoded with an identifiable signature bead.

A method for bistably actuating an actuator includes applying positive pressure in an actuator fluid supply that is fluidly connected to an actuator chamber by means of an actuator fluid supply connection, wherein a working positive pressure is generated in the actuator chamber, whereby an actuator element fluidly connected to the actuator chamber is brought from a resting position to an actuation position, pressure-tight sealing of the actuator fluid supply connection, so that the working positive pressure in the actuator chamber is maintained and the actuator element remains in the actuation position.

A microfluidic valve system includes a substrate, a valve seat a compliant membrane and a mechanically actuable displacement element. The substrate includes first and second channels embedded within it and includes a first layer of material and a second layer of material. The valve seat is in fluid communication with the first and second channels. Portions of the second layer of material form sidewalls of the second channel and the valve seat. The mechanically actuable displacement element applies a mechanical force to the compliant membrane to bring the compliant membrane into sealable contact with the valve seat, thereby closing the valve system.

A substantially leak-free, sealable microvalve that can be repeatedly opened and sealed is presented. The resealable microvalve includes a block with a through via and a sealing plate. The gap between the block and the sealing plate is sealed by a sealing material. The sealing material can be melted when heat is applied and can be solidified when heat is absent. To close the resealable microvalve, heat is applied by flowing a current through a resistive heater and an actuator brings the block and the sealing plate into a contacting position. By removing the heat, the sealing material is solidified and creates a sealed state. To open the resealable microvalve, heat is applied to the sealing material. When the sealing material melts, the actuator moves the block and the sealing plate into a spaced apart position.

A microvalve includes a base body, a deflectable membrane, and an actuating element supported by the base body and contacting the deflectable membrane. The base body has a cavity, at least one first opening, and at least one second opening. Each of the at least one first opening and the at least one second opening extend into the cavity. The deflectable membrane separates the cavity into a first chamber and a second chamber. The deflectable membrane has at least one through-hole extending between the first chamber and the second chamber. The actuating element is operable to deflect the membrane to move between at least two positions.