Disclosed are techniques such as roll to roll processing to produce membrane valves in microelectromechanical systems that are integrated with micro-pumps that include a pump body having compartmentalized pump chambers. One application of this technology is as a valve assembly for a gas concentrator that includes a first micro pump for feeding an input gas stream, a second micro pump to supplying a vacuum and at least one sieve bed having a zeolite. The gas concentrator uses the valve assembly for controlling entry of gas from the first micro pump into the sieve bed and the second micro pump to vent.

A microfluidic valve, includes arranging a substrate of a mechanically inert material to one or more physicochemical properties over time, configuring a structural portion of the valve; additive layer manufacturing to print, a succession of one or more filaments of a material with mechanical response to one or more of said physicochemical properties over time, preferably LCP, configuring a functional portion of the valve; and arranging the succession of filaments on the substrate, configuring a fluid flow rate through the valve using the application of an anti-adhesion treatment on one or more interfaces of said filaments and the substrate.

A fluid pump for pumping a fluid from an inlet toward an outlet comprises a pump body, a pump diaphragm, and a valve seat. The pump body has a first opening and a second opening. The pump diaphragm is attached to the pump body and forms a pump chamber between the pump body and the pump diaphragm. The pump chamber is fluidly connected to the inlet by the first opening and to the outlet by the second opening. The valve seat is disposed inside the pump chamber and around the second opening. The valve seat protrudes with an undeformed height from the second opening into the pump chamber in a direction toward the pump diaphragm. The valve seat has an elastic body and a gasket with a sealing surface. The pump diaphragm is deflectable and is adapted to open and close a fluidic pathway of the outlet by moving into and out of contact with the valve seat.

The micropump including a pump chamber which can be fluidly filled or emptied both by means of a passage opening and an inlet, the pump chamber being covered with a disk-shaped actuator so that the volume of the pump chamber can be changed by deflecting the actuator, the passage opening being arranged in a side of the pumping chamber opposite the actuator, and the inlet has a smaller or similar flow resistance compared to the through opening. An entrance to the passage opening can be closed by means of the deflected actuator, so that a valve is formed in the basic state, or closed by means of the undeflected actuator, so that a valve is formed in the basic state. The micropump can have a second pump chamber with an actuator and inlet, the passage opening of which is connected to that of the first pump chamber.

A miniature fluid transportation device is provided and includes a convergence component, a valve component, an outlet plate and a plurality of fluid transportation actuation components. The plurality of fluid transportation actuation components are disposed on the convergence component so as to transport the fluid to the convergence component. The convergence component guides the fluid transported by the fluid transportation actuation components to the outlet plate through the valve component. The outlet plate guides the fluid from different transportation actuation components back to the convergence component by a separation guiding block. The fluid is converged in a convergence central slot of the convergence component and is discharged out through a collection channel of the outlet plate. Consequently, the problem of interference owing to the convergence of the fluid transported by different fluid transportation actuation components can be avoided.

A fluid pump for pumping a fluid between a fluid inlet and a fluid outlet has a chamber with an inlet and an outlet. At least one flow restricting element is disposed at a flow line portion and is configured to resonate along a continuum of states between a first end state and a second end state to thereby affect fluid flow profile through said inlet or said outlet. While resonating the element transitions through a range of states differing in the flow they permit. A driver is configured to modulate conditions in the chamber or on the at least one flow restricting element at a characteristic frequency profile, thereby inducing the at least one flow restricting element to resonate between the first and second states at about said characteristic frequency profile.

The disclosed computer-implemented method may include a fluidic device comprising a chamber, an inlet port coupled to the chamber and configured to convey fluid to the chamber, and an outlet port coupled to the chamber and configured to convey the fluid from the chamber. The fluidic device may also have a restricting region that (1) is dimensioned to restrict a flow of the fluid through the outlet port when the pressure in the chamber is below a threshold level and (2) is configured to move in a manner that allows a flow rate of the fluid through the outlet port to increase when pressure in the chamber reaches the threshold level.

A method for manufacturing at least one micromechanical device includes: providing a first and a separate second substrate, each having two surfaces spaced parallel to each other with a predetermined thickness; patterning a first trench structure into one of the two surfaces of the first substrate, and a second trench structure into one of the two surfaces of the second substrate; arranging the patterned surfaces of the two substrates with respect to each other such that a substrate stack with an upper and a lower surface is defined and the first and/or second trench structure forms at least one cavity therein; thinning the substrate stack from its upper and/or lower surface; exposing the at least one cavity by patterning a recess into the upper and/or lower surface of the substrate stack, wherein exposing the at least one cavity is performed after arranging the two substrates into the substrate stack.

Further embodiments relate to a valve manufactured by means of the method and to a micromechanical pump.

The valve plate (1) with free micro-balls allows a fluid (2) to flow from an upstream volume (3) to a downstream volume (4) and not in the reverse direction, and comprises a circulation plate (5) crossed through by a circulation orifice (6) terminated by a micro-ball seat (7), a permeable guide plate (9) parallel to said plate (5) being crossed through by a guide cylindrical orifice (10) which houses a micro-ball (8) which rests on said seat (7) so as to close said orifice (6) or rests on a permeable micro-ball stop abutment (11), a spacer (12) being interposed between said plate (9) and said plate (5), a discharge passageway (13) crossing through said plate (9) to allow the fluid (2) to flow when the micro-ball (8) does not rest on said seat (7).

A miniature fluid transportation device is provided and includes a convergence component, a valve component, an outlet plate and a plurality of fluid transportation actuation components. The plurality of fluid transportation actuation components are disposed on the convergence component so as to transport the fluid to the convergence component. The convergence component guides the fluid transported by the fluid transportation actuation components to the outlet plate through the valve component. The outlet plate guides the fluid from different transportation actuation components back to the convergence component by a separation guiding block. The fluid is converged in a convergence central slot of the convergence component and is discharged out through a collection channel of the outlet plate. Consequently, the problem of interference owing to the convergence of the fluid transported by different fluid transportation actuation components can be avoided.