A MEMS pump includes a basis structure, a membrane structure opposing the basis structure and being deflectable parallel to a surface normal of the basis structure and includes a pump chamber between the basis structure and the membrane structure wherein a volume of the pump chamber is based on a position of the membrane structure with respect to the basis structure. The MEMS pump includes a passage for letting a fluid pass into the pump chamber or exit the pump chamber, wherein the passage is arranged in-plane with respect to the pump chamber. The MEMS pump includes a valve structure coupled to the passage for connecting, in a first state, the passage to a first outer volume and for connecting, in a second state, the passage to a second outer volume.

The invention relates to a cartridge of a fluidic device. The fluidic device includes a fluidic chip, a body having a first surface and an opposite, second surface, one or more channels formed in the body in fluidic communications with input ports and output ports for transferring one or more fluids between the input ports and the output ports, and a fluidic chip registration means formed on the first surface for aligning the fluidic chip with a support structure; and an actuator configured to engage with the one or more channels at the second surface of the body for selectively and individually transferring the one or more fluids through the one or more channels from at least one of the input ports to at least one of the output ports at desired flowrates.

The present invention relates to microfluidic check valves, as well as fluidic cartridges including such check valves. In particular examples, the check valve includes a pre-stressed spring formed from a planar substrate. Various characteristics of the valves, such as size, profile, opening pressure, etc., can be tuned to provide desired performance when employed within a fluidic cartridge.

A valve includes a first plate, a second plate, a spacer disposed between the first plate and the second plate, and a flap movably disposed between the first plate and the second plate. The first plate includes a plurality of first apertures extending through said first plate and the second plate includes a plurality of second apertures extending through said second plate. The second apertures are substantially offset from the first apertures. The spacer forms a cavity between the first plate and the second plate and is in fluid communication with the first apertures and the second apertures. The flap has apertures substantially offset from the first apertures and substantially aligned with the second apertures, and the flap is operable to be motivated between said first and second plates in response to a change in direction of the differential pressure of the fluid across the valve.

A fluid control device (111) includes a valve section (12) and a blower section (13). The valve section (12) allows fluid to flow in one direction. The valve section (12) has the shape of a cylindrical container with a valve chamber (40) provided therein. The valve section (12) includes a top plate (21), a side-wall plate (22), a bottom plate (23), and a film (24). A plurality of ejection holes (41) and a plurality of auxiliary holes (49) arranged in a predetermined pattern are formed in a central region of the top plate (21). A plurality of communication holes (43) arranged in a predetermined pattern are formed in a central region of the bottom plate (23). A plurality of film holes (42) arranged in a predetermined pattern are formed in a central region of the film (24).

The invention relates to a cartridge of a fluidic device. The fluidic device includes a fluidic chip, a body having a first surface and an opposite, second surface, one or more channels formed in the body in fluidic communications with input ports and output ports for transferring one or more fluids between the input ports and the output ports, and a fluidic chip registration means formed on the first surface for aligning the fluidic chip with a support structure; and an actuator configured to engage with the one or more channels at the second surface of the body for selectively and individually transferring the one or more fluids through the one or more channels from at least one of the input ports to at least one of the output ports at desired flowrates.

A manufacturing method of miniature fluid actuator is disclosed and includes the following steps. A flow-channel main body manufactured by a CMOS process is provided, and an actuating unit is formed by a deposition process, a photolithography process and an etching process. Then, at least one flow channel is formed by etching, and a vibration layer and a central through hole are formed by a photolithography process and an etching process. After that, an orifice layer is provided to form at least one outflow opening by an etching process, and then a chamber is formed by rolling a dry film material on the orifice layer. Finally, the orifice layer and the flow-channel main body are flip-chip aligned and hot-pressed, and then the miniature fluid actuator is obtained by a flip-chip alignment process and a hot pressing process.

A microfabricated valve with no moving parts. In one embodiment, the valve includes a reservoir of a liquid that is in fluid communication with an outlet channel having a throat that is less than 100 microns wide. Preferably, the channel is an elongated slit. The configuration of channel is adapted and configured such that surface tension of the liquid prevents flow out of the channel. A heater increases the temperature of the meniscus of the fluid, until a portion of the fluid is ejected from the channel. The ejection of the fluid creates both a thrusting effect and a cooling effect.

A fluidic device comprises a first channel conduit, a valve apparatus, and an additional element adjacent to the first channel conduit. The first channel conduit transports fluid from a first fluid entrance to a fluid exit. In one embodiment, the additional element is a pump chamber that receives fluid from a second fluid entrance and pumps fluid into the first channel conduit in accordance with fluid pressure. Alternatively, the additional elements include a second channel conduit and a neck of the first channel conduit. The first channel conduit and the second channel conduit share a common wall. Fluid pressure in the first channel conduit controls a valve apparatus. The value apparatus controls a rate of fluid flow in the first channel conduit by deforming the common wall to change a cross-sectional area of the neck, which changes a rate of fluid flow in the second channel conduit.

Methods and systems are provided for a microfluidic cartridge including a high performance actuator useful for analyte detection, labeling and analysis. Microfluidic processing systems are to carry out chemical or biochemical reactions, or sequences of reactions, with small volumes (typically between 1 microliter and 10 milliliters) of reactants and products. A microfluidic processing system can comprise a network of tubes interfaced with discrete components such as valves and sensors, or an integrated device made of plastic, glass, metal, or other materials, or a combination of materials, with components such as valves and sensors built into the device and connected by flow passageways formed in the material.