A MEMS pump includes a basis structure, a membrane structure opposing the basis structure and being deflectable parallel to a surface normal of the basis structure and includes a pump chamber between the basis structure and the membrane structure wherein a volume of the pump chamber is based on a position of the membrane structure with respect to the basis structure. The MEMS pump includes a passage for letting a fluid pass into the pump chamber or exit the pump chamber, wherein the passage is arranged in-plane with respect to the pump chamber. The MEMS pump includes a valve structure coupled to the passage for connecting, in a first state, the passage to a first outer volume and for connecting, in a second state, the passage to a second outer volume.

Provided is a micro-valve having a laminate structure capable of improving sealing performance when a foreign substance is mixed. The micro-valve 10 has a laminate structure and includes a base layer 20 and a diaphragm layer 30. The base layer is formed with an inlet port 23 for introducing a gas into the micro-valve and an outlet port for allowing the gas to flow outside. The diaphragm layer is arranged to face the base layer. The diaphragm layer switches the flowing and blocking of the gas from the inlet port to the outlet port by elastic deformation thereof. The diaphragm layer has a configuration in which a plurality of deformation regions 33 and a plurality of rigid body regions 34 are alternately formed, the deformation region being elastically deformable in accordance with an inflow of a pneumatic fluid into the micro-valve. The diaphragm layer closes at least one of the inlet port and the outlet port by elastic deformation of at least a part of the plurality of deformation regions.

A micro pump having noise-reduced pressure-releasing structure includes a convergence plate, a valve sheet, a chamber plate, and a micro pump. The convergence plate has a convergence outlet and a discharge outlet. The valve sheet has a valve hole and a discharge recessed portion. The chamber plate has a recessed hole, a fluid determine hole, fluid through holes, and a receiving trough. The micro pump is in the receiving trough. During operation of the micro pump, the fluid is firstly transmitted to the fluid through hole and the fluid determine hole to push the valve sheet, and the fluid determine hole pushes the discharge recessed portion to block the discharge outlet. Then, since the pressure of the fluid at the fluid through hole pushes the valve sheet, the fluid flows through the valve hole so as to be discharged out from the convergence outlet.

A micro pump is disclosed and includes a fluid-converging plate, a valve membrane, a fluid-outlet plate and a pump core module. The fluid-converging plate includes an inner recess, a protruding portion and a fluid-converging aperture. The protruding portion is disposed at a center of the inner recess. The valve membrane includes a valve aperture. The protruding portion of the fluid-converging plate abuts against the valve aperture. A fluid-converging chamber is formed between the valve membrane and the fluid-converging plate. The fluid-outlet plate in a ring shape includes a fluid-outlet channel. The valve aperture is in fluid communication with the fluid-outlet channel. When the fluid is inhaled into the pump core module, the fluid flows to the fluid-converging chamber through the fluid-converging aperture and then pushes out the valve membrane to flow into the fluid-outlet channel of the fluid-outlet plate through the valve aperture. Thereby the fluid transportation is achieved.

A valve includes a first plate having a first vent hole; a second plate defining a valve chamber, which communicates with the first vent hole, between the second plate and the first plate, the second plate having a second vent hole that communicates with the valve chamber and that does not face the first vent hole; and a movable plate having a third vent hole that faces the second vent hole and disposed in the valve chamber such that the movable plate is movable between the first plate and the second plate. The second plate has an auxiliary hole that does not face the third vent hole in the movable plate, the auxiliary hole being surrounded by an edge portion that forms a first corner portion having a substantially convex rounded shape in front view of a principal surface of the second plate at a side facing the valve chamber.

A gas transportation device is provided and includes a first flow guiding unit and a second flow guiding unit, each of which includes an inlet and an outlet. While the first flow guiding unit and the second flow guiding unit are actuated, gas is inhaled through the respective inlets and discharged out through the respective outlets. A gas-collection chamber is disposed between the first flow guiding unit and the second flow guiding unit and includes a discharging opening. The gas is inhaled through the inlets of the first flow guiding unit and the second flow guiding unit, and transported to the gas-collection chamber through the outlets thereof. The gas in the gas-collection chamber is discharged out through the outlets of the first flow guiding unit and the second flow guiding unit, to achieve an adjustment of gas transportation amount.

A micro detecting device includes a controller and a mobile device. The controller has a first wireless communication module. The mobile vehicle includes a vehicle body; a processor, accommodated in the vehicle body; a second wireless communication module, accommodated in the vehicle body and electrically connected to the processor; a power actuator, disposed on the vehicle body and electrically connected to the processor for driving the vehicle body; a recording unit, disposed on the vehicle body and electrically connected to the processor and the second wireless communication module, and the recording unit is configured to generate a recorded signal; and a fluid detecting unit, disposed on the vehicle body and electrically connected to the processor and the second wireless communication module, and the fluid detecting unit is configured to generate a detection signal.

A microfabricated valve with no moving parts. In one embodiment, the valve includes a reservoir of a liquid that is in fluid communication with an outlet channel having a throat that is less than 100 microns wide. Preferably, the channel is an elongated slit. The configuration of channel is adapted and configured such that surface tension of the liquid prevents flow out of the channel. A heater increases the temperature of the meniscus of the fluid, until a portion of the fluid is ejected from the channel. The ejection of the fluid creates both a thrusting effect and a cooling effect.

A manufacturing method of micro channel structure is disclosed and includes steps of: providing a substrate; depositing and etching to form a first insulation layer; depositing and etching to form a supporting layer; depositing and etching to form a valve layer; depositing and etching to form a second insulation layer; depositing and etching to form a vibration layer, a lower electrode layer and a piezoelectric actuating layer; providing a photoresist layer and depositing and etching to form a plurality of bonding pads; depositing and etching to from a mask layer; etching to form a first chamber; and etching to form a second chamber.

A miniature fluid control device for transporting gas is disclosed, which includes a gas inlet plate, a resonance plate, a piezoelectric actuator and a gas collecting plate stacked on each other. The gas inlet plate includes at least one inlet, at least one convergence channel and a circular cavity which forms a convergence chamber. The resonance plate has a central aperture. The piezoelectric actuator includes a suspension plate, an outer frame and a piezoelectric plate, wherein the suspension plate has a cylindrical bulge aligned with the circular cavity. The ratio of a second diameter of the cylindrical bulge to a first diameter of the circular cavity is set in a specified range to optimize the gas pressure of the transported gas, thus assuring efficiency of gas transmission of the miniature fluid control device.