The present invention is a system and method of storing various quantities of cryogenic material with lower cost than systems found in prior art. Novel feature of the system is the ability to use minimum amounts of different types of energy to maintain various quantities of cryogenic material. An additional novel feature is the use of common components and materials.

The invention relates to a container for holding and storing liquids and viscous materials, in particular cryogenic fluids, comprising a jacket (12), which defines the interior (14) of the container (10) having a chamber (16), said container (10) being constituted of at least two container structures (20, 20, 20) and each of said at least two container structures (20, 20, 20) being formed as one piece from a blank (32) and having a dome portion (22), a branching portion (24), which is contiguous to the dome portion (22), and two cylinder portions (26, 28; 26, 28), which are contiguous to the branching portion (24), and the mutually facing container structures (20, 20; 20, 20) which are adjacent to each other being joined together.

A pressure regulator device for use within a pressure-regulated fluid storage and dispensing vessel primarily in low flow, low delivery pressure applications. Regulator stiction challenges have been solved with an improved poppet assembly using different poppet element configurations as well as an improved bellows structure in the pressure-sensing assembly that provides more flexibility during contraction and expansion of the diaphragm elements.

A processing apparatus includes: a processing container configured to accommodate a substrate; a storage tank connected to the processing container via a gas supply pipe; a pressure sensor configured to detect a pressure in the storage tank; a valve provided in the gas supply pipe between the processing container and the storage tank; and a controller configured to control an opening degree of the valve based on the pressure in the storage tank detected by the pressure sensor.

A processing apparatus includes: a processing container configured to accommodate a substrate; a storage tank connected to the processing container via a gas supply pipe; a pressure sensor configured to detect a pressure in the storage tank; a valve provided in the gas supply pipe between the processing container and the storage tank; and a controller configured to control an opening degree of the valve based on the pressure in the storage tank detected by the pressure sensor. The controller is further configured to control the opening degree of the valve to make a drop amount of the pressure become equal to a set discharge pressure, the drop amount being calculated by subtracting the detection value of the pressure sensor in a state where the valve is opened, from the detection value of the pressure sensor before the valve is opened.

Disclosed is a paired compress gas energy power system and power method. The paired compress gas energy power system includes: a paired compress gas energy storage device having a high pressure air container and a low pressure air container, the high pressure air container is filled with a high pressure gas, the low pressure air container is filled with a low pressure gas; a paired compress gas energy engine, respectively connected to the low pressure air container and the high pressure air container; and a power device connected to the rotary shaft of the paired compress gas energy engine, the power device is driven by the paired compress gas energy engine. The invention converts the paired compress gas energy into the mechanical torque energy through the paired compress gas energy engine to drive the power device to work, or to drive the generator to generate electric energy

Disclosed is a paired air pressure energy production system and a production method thereof. The paired air pressure energy production system includes a paired air pressure energy storage device, a pneumatic compressor and a power device, The paired air pressure energy storage device includes a high pressure air container and a low pressure air container, the high pressure air container is filled with first gas, and the low pressure air container is filled with second gas; and the power device is connected with a rotating shaft of the pneumatic compressor and used for driving the rotating shaft of the pneumatic compressor to rotate. According to the invention energy in a natural environment is collected by the power device, and is converted into mechanism energy, so as to achieve the aim of producing paired air pressure energy.

The invention discloses a paired air pressure energy storage device, an inspection method and a balance detection mechanism thereof. The paired air pressure energy storage device includes an inner body and an outer body sleeved outside the inner body. The inner body is filled with a first gas. A cavity formed between the outer body and the inner body is filled with a second gas. There is a gas energy pressure difference between the first gas and the second gas. The gas energy pressure difference is relative pressure gas energy. The invention can store two gases with different pressure intensities, has a simple structure, is convenient for transportation, and is favorable for effective energy storage and long-term storage of gases.

A low-cost getter material comprising palladium and manganese oxide and methods of making the same. A tank including said getter material, and a method of removing hydrogen gas.

A safety vacuum supply gas cylinder includes a cylinder body, a pipeline structure, first and second check valves (respectively having first and second check valve opening pressures P.sub.c1, P.sub.c2, wherein P.sub.c1 is greater than an atmospheric pressure P.sub.0). The cylinder body has an opening and an internal space configured to store a gas, wherein the gas forms an internal pressure P.sub.2 smaller than P.sub.0. The pipeline structure, communicated with the opening, has first and second pipelines where the first and second check valves are respectively arranged. An external filling gas enters the cylinder body when a pressure of the external filling gas is greater than P.sub.c1 and P.sub.2. The gas flows out when P.sub.2 is greater than P.sub.c2 and an external environmental pressure.