A burner for use with an igniter for firing a flame into a heat-exchanger includes a body having a sidewall that defines an interior chamber. A first opening in the body receives a pre-mixed mixture of air and fuel. A second opening in the body is in fluid communication with the first opening. A distributor connected to the body closes the second opening. The distributor includes a first portion and at least one curved second, portion provided on the first portion. Each second portion includes a plurality of first perforations in fluid communication with the first opening in the body. The first perforations of one second portion are positioned adjacent to the igniter such that ignition of the pre-mix mixture flowing through the first perforations results in a flame through the second portion.

The present disclosure generally relates to systems and methods for the combustive abatement of waste gas formed during the manufacture of semiconductor wafers. In particular, the systems described herein are capable of combusting air-polluting perfluorocarbons, including those having high greenhouse gas indexes such as hexafluoroethane (C.sub.2F.sub.6) and tetrafluoromethane (CF.sub.4), as well as particulate-forming silicon dioxide precursors, such as silane (SiH.sub.4) and tetraethoxysilane (Si(OC.sub.2H.sub.5).sub.4, abbreviated TEOS), with greater efficiency and lower energy usage than prior abatement systems. More particularly, and in one preferred embodiment, the present disclosure is directed to a waste gas abatement system that utilizes a combination of non-combustible and combustible gases (or gas mixtures) for thermal combustion, which are directed through multiple permeable interior surfaces of a reaction chamber, efficiently combusting waste gas and preventing undesirable accumulation of solid particulate matter on the chamber surfaces.

A totally aerated combustion burner is provided with a combustion plate part through which air-fuel mixture is ejected. The combustion plate part includes: a porous body made of metal fibers; and a distribution plate stacked on a back surface of the porous body, the distribution plate having formed therein a multitude of distribution holes, thereby enabling reduction in cost. The porous body is formed by nonwoven fabric made by laminating metal fibers in the form of felt. A front surface of the nonwoven fabric is covered by a meshed sheet made of metal. Preferably, the meshed sheet is made by knitting a wire member into the form of a mesh, the wire member being formed by bundling together a plurality of metal fibers. The mesh size of the meshed sheet shall preferably be below a flame-out distance of the air-fuel mixture to be ejected out of the combustion plate part.

A burner has: a combustion plate part through which air-fuel mixture is ejected; and a flame rod which lies opposite to a portion of the combustion plate part. The combustion plate part is constituted by: a burner frame in a shape of a picture frame; a metal-fiber knit which covers an opening enclosed by the burner frame; and a distribution plate which has formed therein a multiplicity of distribution holes and which sandwiches the metal-fiber knit between the burner frame and the distribution plate so that the air-fuel mixture is ejected from the opening through the distribution holes and the metal-fiber knit. Flame holes for ejecting the air-fuel mixture are formed in a portion of the burner frame, and the flame rod is disposed so as to lie opposite to that portion of the burner frame which has formed therein the flame holes.

A burner has: a combustion plate part for ejecting air-fuel mixture; and a flame rod which lies opposite to a portion of the combustion plate part which has a picture-frame-like burner frame; a metal-fiber knit which covers an opening enclosed by the burner frame; and a distribution plate which has formed therein distribution holes and which sandwiches the metal-fiber knit between the burner frame and the distribution plate through the distribution holes and the metal-fiber knit. The flame rod has: a rod base part which lies opposite to a portion of opening peripheral part of the burner frame which is positioned on the same surface level as the opening; and a rod main body part which lies opposite to a portion of the metal-fiber knit. The distance between the rod base part and the opening peripheral part is made smaller than the distance between the rod main body part and the metal-fiber knit.

A premix gas burner comprises a metal plate structure, a burner deck and a shaped distributor plate. The metal plate structure is provided for mounting the premix gas burner in a heating appliance. The burner deck comprises a woven wire mesh on the outer surface of which premix gas is combusted after the premix gas has flown through the woven wire mesh. The shaped distributor plate comprises perforations. When the burner is in use the premix gas flows through the perforations of the shaped distributor plate before the premix gas flows through the woven wire mesh. One or more than one slot or notch shaped opening is provided in the shaped distributor plate. The woven wire mesh comprises a circumferential edge comprising at least one tab. The tab or tabs is/are inserted through a slot or notch shaped opening in the shaped distributor plate.

The present disclosure generally relates to systems and methods for the combustive abatement of waste gas formed during the manufacture of semiconductor wafers. In particular, the systems described herein are capable of combusting air-polluting perfluorocarbons, including those having high greenhouse gas indexes such as hexafluoroethane (C.sub.2F.sub.6) and tetrafluoromethane (CF.sub.4), as well as particulate-forming silicon dioxide precursors, such as silane (SiH.sub.4) and tetraethoxysilane (Si(OC.sub.2H.sub.5).sub.4, abbreviated TEOS), with greater efficiency and lower energy usage than prior abatement systems. More particularly, and in one preferred embodiment, the present disclosure is directed to a waste gas abatement system that utilizes a combination of non-combustible and combustible gases (or gas mixtures) for thermal combustion, which are directed through multiple permeable interior surfaces of a reaction chamber, efficiently combusting waste gas and preventing undesirable accumulation of solid particulate matter on the chamber surfaces.

An infrared radiator for the heat treatment of a material web has an incandescent body with a flow-receiving surface that is subjected to a flow of a gas-air mixture supplied to the infrared radiator and heated by combustion of the gas-air mixture. The incandescent body is manufactured as a sheet material formed of a multiplicity of threads and connecting elements that at least indirectly connect the threads to one another. The connecting elements at least partially engage around the threads and thus connect them at least indirectly to one another. The connecting elements are configured in such a way that they may be detached from the connection with the threads, preferably by hand, while breaking up the sheet material.

Provided is a surface combustion burner which solves the passage blocking in a combustion part caused by dust, and enables stable combustion for a long term. The surface combustion burner comprises: a nozzle configured to discharge fuel gas and air for combustion; and a laminate, provided on a tip of the nozzle, in which a plurality of mesh plates is laminated, wherein the laminate includes a portion having an offset arrangement between at least any adjacent ones of the mesh plates.

A burner includes a base and a combustion tray, wherein the base has an inlet pipe and two horn-shaped tubes. The horn-shaped tubes are connected to opposite sides of the inlet pipe, wherein each of the horn-shaped tubes respectively has a first section. A length of the first sections is no less than an inner diameter of the inlet pipe at where the horn-shaped tubes are connected to. The combustion tray is engaged with the base, and communicates with the horn-shaped tubes. Whereby, gas and air could be fully mixed while flowing through each of the first sections. The symmetrical horn-shaped tubes could direct the airflow to the combustion tray, where the airflow could be outputted from flame vents of the combustion tray, whereby to generate more even flame, and to enhance the heating efficiency.