High intensity combustion and low intensity combustion are carried out together, to stabilize flames and to hold down the emission of carbon monoxide. An air-fuel mixture outlet member (back plate) that includes a single or a plurality of outlet(s) (air-fuel mixture outlet(s)) out of which an air-fuel mixture (GA) flows is included, and a metal fiber knitting body (metal knit) that covers the air-fuel mixture outlet member is included. Therefore, the air-fuel mixture, which is made to flow out of the outlet(s), passes through the metal fiber knitting body (metal knit) and is combusted, a flame of low intensity is generated together with a flame of high intensity by combustion of the air-fuel mixture, and the flame of low intensity holds the flame of high intensity.

A surface burner for gas combustion has a burner surface which is fabricated by intertwining or interweaving an elongated flexible element across a distinct burner frame. This fabrication method can be best referred to as braiding, but also plaiting, lacing or another comparable method.

A cylindrical gas premix burner comprises a cylindrical burner deck onto which the flames are stabilized when the burner is in use; a mixing chamber inside the cylindrical burner deck; an inlet device mounted perpendicularly to the axial direction of the cylindrical burner deck for the supply of premix gas into the mixing chamber; and an end cap closing off the mixing chamber at the side opposite to the side where the inlet device is provided. The inlet device comprises a perforated metal plate. The perforations in the perforated metal plate are provided for the supply of premix gas into the mixing chamber. The perforated metal plate is dome shaped; such that perforations in the perforated metal plate are located at different height levels from the base of the cylindrical burner deck.

Methods and devices for gas mixture combustion on a surface of a permeable matrix are provided which produce or result in surface stabilized combustion (SSC) with increasing amounts of radiation energy emitted by the matrix surface and decreasing concentrations of pollutant components in the combustion products. The gas mixture is fed to a burner that includes a permeable matrix material having a first thermal conductivity and configured to preheat the combustible gas mixture as it travels through the matrix. The burner includes a plurality of thermal elements having a thermal conductivity higher than and disposed in thermal transfer communication with the matrix base material. The permeable matrix base material forms a combustion surface with at least a portion of the thermal elements exposed above the combustion surface. The gas mixture is combusted at or near exit pores and channels formed at the permeable matrix material combustion surface.

A burner has: a combustion plate part through which air-fuel mixture is ejected; and a flame rod which lies opposite to a portion of the combustion plate part. The combustion plate part is constituted by: a burner frame in a shape of a picture frame; a metal-fiber knit which covers an opening enclosed by the burner frame; and a distribution plate which has formed therein a multiplicity of distribution holes and which sandwiches the metal-fiber knit between the burner frame and the distribution plate so that the air-fuel mixture is ejected from the opening through the distribution holes and the metal-fiber knit. Flame holes for ejecting the air-fuel mixture are formed in a portion of the burner frame, and the flame rod is disposed so as to lie opposite to that portion of the burner frame which has formed therein the flame holes.

A burner has: a combustion plate part for ejecting air-fuel mixture; and a flame rod which lies opposite to a portion of the combustion plate part which has a picture-frame-like burner frame; a metal-fiber knit which covers an opening enclosed by the burner frame; and a distribution plate which has formed therein distribution holes and which sandwiches the metal-fiber knit between the burner frame and the distribution plate through the distribution holes and the metal-fiber knit. The flame rod has: a rod base part which lies opposite to a portion of opening peripheral part of the burner frame which is positioned on the same surface level as the opening; and a rod main body part which lies opposite to a portion of the metal-fiber knit. The distance between the rod base part and the opening peripheral part is made smaller than the distance between the rod main body part and the metal-fiber knit.

The present disclosure generally relates to systems and methods for the combustive abatement of waste gas formed during the manufacture of semiconductor wafers. In particular, the systems described herein are capable of combusting air-polluting perfluorocarbons, including those having high greenhouse gas indexes such as hexafluoroethane (C.sub.2F.sub.6) and tetrafluoromethane (CF.sub.4), as well as particulate-forming silicon dioxide precursors, such as silane (SiH.sub.4) and tetraethoxysilane (Si(OC.sub.2H.sub.5).sub.4, abbreviated TEOS), with greater efficiency and lower energy usage than prior abatement systems. More particularly, and in one preferred embodiment, the present disclosure is directed to a waste gas abatement system that utilizes a combination of non-combustible and combustible gases (or gas mixtures) for thermal combustion, which are directed through multiple permeable interior surfaces of a reaction chamber, efficiently combusting waste gas and preventing undesirable accumulation of solid particulate matter on the chamber surfaces.

A superadiabatic burner has a flame holder formed from a porous medium, a fuel inlet coupled to the flame holder, a fuel outlet coupled to the flame holder, a preheater comprising an inlet and an outlet coupled to the fuel inlet, and a radiating rod coupled to the porous medium. The porous medium comprises a first porous section and a second porous section. Methods of using the burner allow preheated air or other mixtures to be provided to the fuel inlet as part of a fuel air mixture for the burner.

High intensity combustion and low intensity combustion are carried out together, to stabilize flames and to hold down the emission of carbon monoxide. An air-fuel mixture outlet member (back plate) that includes a single or a plurality of outlet(s) (air-fuel mixture outlet(s)) out of which an air-fuel mixture (GA) flows is include, and a metal fiber knitting body (metal knit) that covers the air-fuel mixture outlet member is included. Therefor, the air-fuel mixture, which is made to flow out of the outlet(s), passes through the metal fiber knitting body (metal knit) and is combusted, a flame of low intensity (flame) is generated together with a flame of high intensity (flame) by combustion of the air-fuel mixture, and the flame of low intensity holds the flame of high intensity.

A burner includes a base and a combustion tray, wherein the base has an inlet pipe and two horn-shaped tubes. The horn-shaped tubes are connected to opposite sides of the inlet pipe, wherein each of the horn-shaped tubes respectively has a first section. A length of the first sections is no less than an inner diameter of the inlet pipe at where the horn-shaped tubes are connected to. The combustion tray is engaged with the base, and communicates with the horn-shaped tubes. Whereby, gas and air could be fully mixed while flowing through each of the first sections. The symmetrical horn-shaped tubes could direct the airflow to the combustion tray, where the airflow could be outputted from flame vents of the combustion tray, whereby to generate more even flame, and to enhance the heating efficiency.