A furnace for thermal treatment, in particular for carbonization and/or graphitization, of material, in particular fibers, in particular fibers of oxidized polyacrylonitrile PAN. During the thermal treatment, a pyrolysis gas is released from the material. The furnace includes a housing, a process space, which is located in the interior of the housing and is delimited by a process space housing and through which the material can be fed, a heating system for heating a process space atmosphere prevailing in the process space, and an extraction system for suctioning process space atmosphere laden with pyrolysis gas from the process space. The extraction system has at least one suction device having a suction channel, which is delimited by a channel wall and which is connected to the process space by means of a suction opening. The suction opening is arranged in a region of the process space in which, during operation of the furnace a temperature prevails at which no or only moderate chemical reactions occur between the pyrolysis gas and the process space housing and/or the channel wall.

The present invention relates to a furnace device for heating a plate, in particular a metal plate, by convection. The furnace device has a housing, in which a temperature control region for temperature-controlling a component part and an adjustment region are formed, wherein the adjustment region has a temperature control device for adjusting a temperature of a temperature control fluid. Further, the furnace device has a positioning device for positioning the plate in the temperature control region in a predetermined orientation, and a ventilator, which is arranged in the housing and which is adapted to circulate the temperature control fluid in the housing between the temperature control region and the adjustment region such that the temperature control fluid is flowable in a flow direction along a surface of the plate.

Disclosed is a pumping system with reduced contamination. A vacuum pump system includes a mechanical vacuum pump mechanism within a hermetic pump that hermetically isolates the pump mechanism from ambient air. A pump inlet is hermetically sealed to the hermetic pump housing. A pump outlet is hermetically sealed at one end to the hermetic pump housing and at the other end to an inlet of a Peclet seal tube. The vacuum pump system produces a vacuum in a vacuum processing chamber. A sweep gas source injects a sweep gas into at least one of (i) the hermetic pump housing and (ii) the inlet of the Peclet seal tube. The sweep gas and a process gas flow through the Peclet seal tube to substantially isolate against the backflow of the ambient air through the Peclet seal tube.

Disclosed is a pumping system with reduced contamination. A vacuum pump system includes a mechanical vacuum pump mechanism within a hermetic pump that hermetically isolates the pump mechanism from ambient air. A pump inlet is hermetically sealed to the hermetic pump housing. A pump outlet is hermetically sealed at one end to the hermetic pump housing and at the other end to an inlet of a Peclet seal tube. The vacuum pump system produces a vacuum in a vacuum processing chamber. A sweep gas source injects a sweep gas into at least one of (i) the hermetic pump housing and (ii) the inlet of the Peclet seal tube. The sweep gas and a process gas flow through the Peclet seal tube to substantially isolate against the backflow of the ambient air through the Peclet seal tube.

A furnace for removing a molybdenum-alloy refractory metal core through sublimation comprising a retort furnace having an interior; a sublimation fixture insertable within the interior of the retort furnace, the sublimation fixture configured to receive at least one turbine blade having the molybdenum-alloy refractory metal core; a flow passage thermally coupled to the retort furnace configured to heat a fluid flowing through the flow passage and deliver the fluid to the molybdenum-alloy refractory metal core causing sublimation of the molybdenum-alloy refractory metal core.

A bake system may include a chamber having an internal space, a stage disposed in the internal space of the chamber and on which a target substrate is disposed, a gas ejection structure providing a process gas in the chamber, an exhaust structure, an atmosphere analyzer monitoring moisture and oxygen in the chamber, and a gas supplier controlling a flow rate of the process gas based on information provided from the atmosphere analyzer. The exhaust structure may include a suction part disposed in the internal space, and an exhaust part connected to the suction part and is disposed outside the chamber.

A brazing furnace (1) includes a preheating chamber (2) and a brazing chamber (3). The preheating chamber (2) includes: a vacuum pump (21) for reducing the pressure inside the preheating chamber (2) while a material to be processed (100) is housed therein; a preheating apparatus (22), which preheats the material to be processed (100) in a reduced-pressure atmosphere; and a gas introducing apparatus (23), which introduces inert gas into the preheating chamber (2) to restore the pressure inside the preheating chamber (2) after the preheating. The brazing chamber (3) includes: a gas-replacing apparatus (31), which introduces inert gas into the brazing chamber (3); and a main heating apparatus (32), which heats the material to be processed (100) to a brazing temperature while it is housed in the brazing chamber (3).

Method and means for suppressing discoloration during thermal treatment of a product of a magnesium containing aluminium alloy, the alloy contains in wt. % Mg: 0.45-12.0, with a preferred range of 0.45-6.0 wt %. The product, being either an extrusion billet, a sheet ingot, a cast product, or a forged product is heated to a temperature T where it is prone to surface discoloration and oxidation, wherein during the thermal treatment it is exposed to a suppressing atmosphere comprising 0.5-5.0% CO.sub.2 gas with a preference for 0.5-1.5% CO.sub.2 gas.

A process gas preparation device for an industrial furnace system is disclosed. The gas preparation device includes a preparation reactor having a catalyst. A gas feed line and a gas return line are connected between the industrial furnace and the preparation reactor to form a closed loop. A compressor is situated upstream from the preparation reactor in the feed line. The preparation reactor is also connected with supply lines for hydrocarbon gas and air to be supplied to the preparation reactor. The process gas preparation device also includes a control device with which process gas preparation and return can be regulated and controlled. The gas feed line also has a shut-off valve. The control device can check the functional state of the catalyst by measuring the pressure differential across the catalyst and can initiate a burn-out process therein to clear clogging of the catalyst.

A process gas preparation device for an industrial furnace system is disclosed. The gas preparation device includes a preparation reactor having a catalyst. A gas feed line and a gas return line are connected between the industrial furnace and the preparation reactor to form a closed loop. A compressor is situated upstream from the preparation reactor in the feed line. The preparation reactor is also connected with supply lines for hydrocarbon gas and air to be supplied to the preparation reactor. The process gas preparation device also includes a control device with which process gas preparation and return can be regulated and controlled. The gas feed line also has a shut-off valve. The control device can check the functional state of the catalyst by measuring the pressure differential across the catalyst and can initiate a burn-out process therein to clear clogging of the catalyst.