Systems and methods for thermally processing composite components are provided. In one exemplary aspect, a system includes a thermal system, a mover device, and a control system. The system also includes a plurality of vessels in which one or more components may be placed. The vessels are similarly shaped and configured. A vessel containing the one or more components therein may be mounted into a chamber defined by the thermal system during thermal processing. The thermal system and vessels include features that allow components to be thermally processed, e.g., compacted, burnt-out, and densified via a melt-infiltration process, a polymer impregnation and pyrolyzing process, or a chemical vapor infiltration process. utilizing the same thermal system and common vessel design. The control system may control the thermal system and mover device to automate thermal processing of the composite components.

An apparatus for processing a substrate includes a reaction tube, a side cover, a heater, a first gas supplier, a second gas supplier and a controller. The reaction tube is configured to receive a substrate boat in which a plurality of the substrate is received to process the substrate. The side cover is configured to receive the reaction tube. The heater lines the interior of the side cover. The first gas supplier is provided to an upper portion of the side cover to supply a cooling gas at a first supplying rate to a space between the side cover and the reaction tube. The second gas supplier is provided to a lower portion of the side cover to supply the cooling gas at a second supplying rate different from the first supplying rate to the space between the side cover and the reaction tube. The controller controls the reaction tube.

An apparatus for processing a substrate includes a reaction tube, a side cover, a heater, a first gas supplier, a second gas supplier and a controller. The reaction tube is configured to receive a substrate boat in which a plurality of the substrate is received to process the substrate. The side cover is configured to receive the reaction tube. The heater lines the interior of the side cover. The first gas supplier is provided to an upper portion of the side cover to supply a cooling gas at a first supplying rate to a space between the side cover and the reaction tube. The second gas supplier is provided to a lower portion of the side cover to supply the cooling gas at a second supplying rate different from the first supplying rate to the space between the side cover and the reaction tube. The controller controls the reaction tube.

A furnace may include an outer wall defining a chamber, the chamber including an internal cavity configured to receive one or more parts, at least one heater positioned within the chamber, the at least one heater being configured to generate temperatures of at least about 800 degrees Celsius within the internal cavity, and a vacuum pump configured to apply a vacuum to at least a portion of the chamber. The furnace may also include at least one layer of inner insulation and at least one layer of outer insulation disposed outward of the inner insulation with respect to the chamber, the at least one layer of outer insulation being sealed with respect to the at least one layer of inner insulation.

A furnace may include an outer wall defining a chamber, the chamber including an internal cavity configured to receive one or more parts, at least one heater positioned within the chamber, the at least one heater being configured to generate temperatures of at least about 800 degrees Celsius within the internal cavity, and a vacuum pump configured to apply a vacuum to at least a portion of the chamber. The furnace may also include at least one layer of inner insulation and at least one layer of outer insulation disposed outward of the inner insulation with respect to the chamber, the at least one layer of outer insulation being sealed with respect to the at least one layer of inner insulation.

A thermal process system includes a retort assembly and a heating assembly. The retort assembly includes a retort chamber defining a longitudinal axis, and is configured to substantially contain one or more gases in the retort chamber during a thermal process house substrate material within the retort chamber. The heating assembly includes a plurality of heating elements adjacent to the retort chamber that is configured to selectively generate two or more heating zones at different axial positions along the longitudinal axis within a heating region.

A thermal process system includes a retort assembly and a heating assembly. The retort assembly includes a retort chamber defining a longitudinal axis, and is configured to substantially contain one or more gases in the retort chamber during a thermal process house substrate material within the retort chamber. The heating assembly includes a plurality of heating elements adjacent to the retort chamber that is configured to selectively generate two or more heating zones at different axial positions along the longitudinal axis within a heating region.

A sintering furnace can include an outer shell defining an internal volume a reactive agent inlet configured to introduce a reactive agent into the internal volume; an insulation chamber within the outer shell; and a retort configured to retain an object. A method of operating a sintering furnace can include sintering a part precursor within a retort arranged within a chamber, wherein the chamber defines an intermediate volume between the retort and the chamber, wherein a sintering byproduct is oxidized within the intermediate volume.

A sintering furnace can include an outer shell defining an internal volume a reactive agent inlet configured to introduce a reactive agent into the internal volume; an insulation chamber within the outer shell; and a retort configured to retain an object. A method of operating a sintering furnace can include sintering a part precursor within a retort arranged within a chamber, wherein the chamber defines an intermediate volume between the retort and the chamber, wherein a sintering byproduct is oxidized within the intermediate volume.