An integrated sensor system for use in a furnace system including a furnace having at least one burner and two or more zones each differently affected by at least one furnace parameter regulating energy input into the furnace, including a first temperature sensor positioned to measure a first temperature in the furnace system, a second temperature sensor positioned to measure a second temperature in the furnace system; and a controller programmed to receive the first and second measured temperatures, and to adjust operation of a furnace system parameter based on a relationship between the first and second temperatures, thereby differentially regulating energy input into at least two of the zones of the furnace; wherein the relationship between the first and second temperatures is a function of one or more of a difference between the two temperatures, a ratio of the two temperatures, and a weighted average of the two temperatures.

An induction furnace for carrying out a heat treatment of a dental replacement part. The induction furnace includes an induction coil, a radiant heater, an insulation layer and a furnace chamber. The induction furnace has a cooling system with a liquid cooling system in order to control an internal temperature of the furnace chamber.

Automatically generating a compensation factor for adjusting an operating parameter such that a measured carbon potential, dew point, or other controlled parameter matches the controller's set point value by inputting the measured parameter directly to the controller.

A method includes firing a first burner into a furnace process chamber in a first initial condition, firing a second burner into the process chamber in a second initial condition, and measuring temperature at each of an array of locations in the process chamber. The first burner is adjusted to a first adjusted condition while the second burner is being fired at the second initial condition, and a resulting first temperature change is measured at each of the locations. The second burner is adjusted to a second adjusted condition while the first burner is being fired at the first initial condition, and a resulting second temperature change is measured at each of the locations. The measured first and second temperature changes are recorded as reference data for adjusting burner conditions to adjust temperatures at each of the locations. The method can thus be used to improve temperature uniformity throughout the array of locations.

Automatically generating a compensation factor for adjusting an operating parameter such that a measured carbon potential, dew point, or other controlled parameter matches the controller's set point value by inputting the measured parameter directly to the controller.

A directional fluid heat control system for a high temperature kiln with a process zone. The system includes two rigid, coaxially aligned tubes positioned in the kiln. One tube rotates inside the other. One tube has a series of longitudinal openings, while the other has a series of helically arranged openings. Rotating one tube selectively aligns an opening from that tube with an opening in the other. Further rotation aligns different such pairs of openings with different longitudinal orientations in the kiln. The aligned openings release pressurized fluid from the inner tube into desired locations in the kiln's process zone.

A method for temperature control includes: acquiring the present temperature of a reaction window in a process chamber of a semiconductor machine; comparing the present temperature with the preset temperature to acquire a comparison result; and adjusting the exhaust amount of an exhaust passage of the process chamber based on the comparison result to control the temperature of the reaction window.

A method includes firing a first burner into a furnace process chamber in a first initial condition, firing a second burner into the process chamber in a second initial condition, and measuring temperature at each of an array of locations in the process chamber. The first burner is adjusted to a first adjusted condition while the second burner is being fired at the second initial condition, and a resulting first temperature change is measured at each of the locations. The second burner is adjusted to a second adjusted condition while the first burner is being fired at the first initial condition, and a resulting second temperature change is measured at each of the locations. The measured first and second temperature changes are recorded as reference data for adjusting burner conditions to adjust temperatures at each of the locations. The method can thus be used to improve temperature uniformity throughout the array of locations.

A method includes firing a first burner into a furnace process chamber in a first initial condition, firing a second burner into the process chamber in a second initial condition, and measuring temperature at each of an array of locations in the process chamber. The first burner is adjusted to a first adjusted condition while the second burner is being fired at the second initial condition, and a resulting first temperature change is measured at each of the locations. The second burner is adjusted to a second adjusted condition while the first burner is being fired at the first initial condition, and a resulting second temperature change is measured at each of the locations. The measured first and second temperature changes are recorded as reference data for adjusting burner conditions to adjust temperatures at each of the locations. The method can thus be used to improve temperature uniformity throughout the array of locations.

A processing equipment and a control method thereof are provided. The processing equipment includes a furnace body, a temperature sensor, and a heater unit. A furnace cavity of the furnace body divided into main heating zones and auxiliary heating zones. The heater unit includes main heating elements located in the main heating zones and auxiliary heating elements located in the auxiliary heating zones. The control method includes obtaining an actual temperature detected by the temperature sensor; determining a first heating power according to a first temperature difference and a first preset adjustment rule; determining a second heating power according to the first heating power and a preset adjustment parameter; adjusting an actual working power of the main heating elements to the first heating power, adjusting an actual working power of the auxiliary heating elements to the second heating power.