A thermal management system for a test-and-measurement probe that includes a thermally insulated shroud and a fluid inlet conduit. The shroud is configured to enclose a first portion of a probe head of the probe within an interior cavity of the shroud, while permitting a second portion of the probe head to extend out of the shroud. The shroud further includes a fluid outlet passageway configured to permit a heat-transfer fluid to pass from a probe-head end of the interior cavity, through the interior cavity of the shroud, and out of the shroud through an access portion of the shroud. The fluid inlet conduit enters the shroud through the access portion of the shroud, extends through the interior cavity of the shroud, and is configured to introduce the heat-transfer fluid to the probe-head end of the interior cavity.

The present invention provides systems, methods, and articles for temperature conditioning a surface. An article is formed from a first layer having a plurality of openings and a second layer having a corresponding plurality of openings. At least one interior chamber constructed and configured to retain a fluid without leaking is defined between an interior surface of the first layer and an interior surface of the second layer. At least one flexible fluid supply line delivers the fluid to the at least one interior chamber. At least one flexible fluid return line removes the fluid from the at least one interior chamber. At least one control unit that is operable to selectively cool or heat the fluid is attached to the at least one flexible fluid supply line and the at least one flexible fluid return line.

A temperature control system is used for controlling a temperature of a control target. The system includes: a first circulation circuit through which a first heat transfer medium circulates; a second circulation circuit that is independent of the first circulation circuit and through which a second heat transfer medium circulates; and a third circulation circuit that is independent of the first circulation circuit and the second circulation circuit and through which a third heat transfer medium circulates. The third heat transfer medium has a usable temperature range wider than usable temperature ranges of the first heat transfer medium and the second heat transfer medium.

The present invention provides systems, methods, and articles for temperature conditioning a surface. An article is formed from a first layer having a plurality of openings and a second layer having a corresponding plurality of openings. At least one interior chamber constructed and configured to retain a fluid without leaking is defined between an interior surface of the first layer and an interior surface of the second layer. At least one flexible fluid supply line delivers the fluid to the at least one interior chamber. At least one flexible fluid return line removes the fluid from the at least one interior chamber. At least one control unit that is operable to selectively cool or heat the fluid is attached to the at least one flexible fluid supply line and the at least one flexible fluid return line.

Methods and systems for controlling temperatures in plasma processing chamber via pulsed application of heating power and pulsed application of cooling power. In an embodiment, fluid levels in each of a hot and cold reservoir coupled to the temperature controlled component are maintained in part by a coupling each of the reservoirs to a common secondary reservoir. Heat transfer fluid is pumped from the secondary reservoir to either the hot or cold reservoir in response to a low level sensed in the reservoir. In an embodiment, both the hot and cold reservoirs are contained in a same platform as the secondary reservoir with the hot and cold reservoirs disposed above the secondary reservoir to permit the secondary reservoir to catch gravity driven overflow from either the hot or cold reservoir.

A heating device includes a base body that has a placement surface for placing a wafer thereon and a back surface that is on an opposite side of the placement surface; a heating resistor that is embedded in the base body; a cylindrical supporting body that has one end surface and the other end surface, the one end surface being connected to the back surface of the base body, the other end surface being on an opposite side of the one end surface; and a supporting-body channel that includes a portion extending in a direction from the other end surface to the one end surface of the cylindrical supporting body, and that is formed within a peripheral wall of the cylindrical supporting body. The supporting-body channel includes an opening portion that opens inwardly from an outer peripheral surface of the cylindrical supporting body.

A method of induction welding a first thermoplastic composite (TPC) to a second thermoplastic composite (TPC) includes inductively heating a weld interface area between the first TPC and the second TPC, and cooling a surface of the first TPC opposite the weld interface area while inductively heating the weld interface area.

A water cooling system includes a temperature control device which is connected with a first heat exchanger. A second heat exchanger includes a water temperature control path and a constant temperature water path. The water of the first heat exchanger is controlled by the temperature control device and flows to the water temperature control path. The water in the constant temperature water path tows through the second heat exchanger to proceed heat exchange with the water in the water temperature control path, and then flows to the target equipment. The temperature difference of the water flowing to the target equipment is smaller than that of conventional water cooling system.

A water cooling system includes a temperature control device which is connected with a first heat exchanger. A second heat exchanger includes a water temperature control path and a constant temperature water path. The water of the first heat exchanger is controlled by the temperature control device and flows to the water temperature control path. The water in the constant temperature water path tows through the second heat exchanger to proceed heat exchange with the water in the water temperature control path, and then flows to the target equipment. The temperature difference of the water flowing to the target equipment is smaller than that of conventional water cooling system.

An apparatus for exchanging heat with a fluid includes a heat exchanger having first and second opposing surfaces and a plurality of flow passages permitting axial fluid flow between the surfaces. A manifold having an interface surface is in thermal contact with the first surface and includes a thermally conductive body for conducting heat in an axial direction between the interface surface and a heat transmitting surface. A plurality of feed passages extend through the thermally conductive body in a transverse direction, the passages having an inlet for receiving or discharging fluid. A plurality of distribution passages have ends in fluid communication with at least one of the feed passages and openings distributed over the interface surface. The distribution passages are configured to cause a change in fluid flow direction between a transversely directed flow in the feed passages and an axially directed flow at the openings.