A water jacket includes a housing configured to be disposed on or adjacent to an outer periphery of a heat generating portion, and a coolant channel provided inside the housing. The coolant channel includes a plurality of main tubular channel portions that extend linearly and are configured to be arranged along and in proximity to the outer periphery of the heat generating portion, an inflow-side manifold portion that collectively connects upstream end portions of the main tubular channel portions and is configured to allow inflow of coolant, and an outflow-side manifold portion that collectively connects downstream end portions of the main tubular channel portions and is configured to allow outflow of the coolant. Each of the main tubular channel portions includes therein a vortex generation part that is disposed in proximity to the upstream end portion and configured to generate a vortex flow.

A water jacket includes a housing configured to be disposed on or adjacent to an outer periphery of a heat generating portion, and a coolant channel provided inside the housing. The coolant channel includes a plurality of main tubular channel portions that extend linearly and are configured to be arranged along and in proximity to the outer periphery of the heat generating portion, an inflow-side manifold portion that collectively connects upstream end portions of the main tubular channel portions and is configured to allow inflow of coolant, and an outflow-side manifold portion that collectively connects downstream end portions of the main tubular channel portions and is configured to allow outflow of the coolant. Each of the main tubular channel portions includes therein a vortex generation part that is disposed in proximity to the upstream end portion and configured to generate a vortex flow.

A fluid manifold includes an inlet comprising an opening into an interior of the fluid manifold, an outlet end that is positioned opposite the inlet and that is in fluid communication with the inlet, a shroud extending between the inlet and the outlet end and surrounding a flow path of the fluid manifold, and a first flow distributor positioned within the interior of the fluid manifold. The first flow distributor includes a hollow body including a first surface at a downstream side of the first flow distributor and a second surface at an upstream side of the first flow distributor, a central cavity defined by the second surface of the hollow body, and openings extending from the first surface to the second surface such that a fluid can pass from the central cavity through the openings. The first flow distributor and the fluid manifold are integrally formed.

The invention relates to a cooler or cooler body which in particular is adapted for cooling electronic structural units or assemblies.

The invention relates to a cooler or cooler body which in particular is adapted for cooling electronic structural units or assemblies.

A thermal transfer device has a body and a fluid conduit defined in the body. The body has a thermal transfer surface configured to be placed in contact with a target component. The fluid conduit is configured for conveying fluid through the body and is thermally coupled to the thermal transfer surface.

A thermal transfer device has a body and a fluid conduit defined in the body. The body has a thermal transfer surface configured to be placed in contact with a target component. The fluid conduit is configured for conveying fluid through the body and is thermally coupled to the thermal transfer surface.

A temperature control device for a chemical liquid used in a semiconductor manufacturing process. The device includes: a first heat sink having a cooling water flow path formed therein; a plurality of thermoelectric modules coming into contact with both side surfaces of the first heat sink, respectively; and a second heat sink coming into contact with the thermoelectric modules. The second heat sink includes first and second heat sink blocks, a chemical liquid inlet tube and a chemical liquid outlet tube connected to the first and second heat sink blocks, and a plurality of chemical liquid flow path tubes inserted into the insides of the first and second heat sink blocks in such a manner as to communicate with one another and with the chemical liquid inlet tube and the chemical liquid outlet tube, respectively, to flow the chemical liquid therealong.

The invention relates to a counter flow enthalpy exchanger (1) having a parallelogram-shaped central part (11), whose ends in the flow direction through the exchanger it is joined by end parts (12, 13), which become narrower in the direction from the central part (11), whereby in order to separate the flow of the heat-transfer medium in the direction from the inner space to the outer space are arranged contour identical and with respect to the flowing medium sealed vapour-permeable lamellae (10) with shaping means for generating turbulent flow, whereby every two adjacent lamellae (10) form one interplate flow channel in the central part (11) one interplate flow channel. The lamella (10) is made as a one-piece self-supporting moulding common to the central part (11) and the end parts (12, 13), whereby it does not have a reinforcing support grid. Two adjacent lamellae (10) form one interplate flow channel in the end part (12, 13), in the walls of which are formed straight protrusions (121, 131) situated in the direction of the heat-transfer medium flow between the central part (11) and corresponding inlet or outlet of this medium.

The invention relates to a counter flow enthalpy exchanger (1) having a parallelogram-shaped central part (11), whose ends in the flow direction through the exchanger it is joined by end parts (12, 13), which become narrower in the direction from the central part (11), whereby in order to separate the flow of the heat-transfer medium in the direction from the inner space to the outer space are arranged contour identical and with respect to the flowing medium sealed vapour-permeable lamellae (10) with shaping means for generating turbulent flow, whereby every two adjacent lamellae (10) form one interplate flow channel in the central part (11) one interplate flow channel. The lamella (10) is made as a one-piece self-supporting moulding common to the central part (11) and the end parts (12, 13), whereby it does not have a reinforcing support grid. Two adjacent lamellae (10) form one interplate flow channel in the end part (12, 13), in the walls of which are formed straight protrusions (121, 131) situated in the direction of the heat-transfer medium flow between the central part (11) and corresponding inlet or outlet of this medium.