A cryopump includes: a first-stage target temperature selection unit which includes a normal target temperature for a normal mode of maintaining each of a first stage cryopanel and a second stage cryopanel at an extremely low temperature region, and a cool-down target temperature lower than the normal target temperature, for a cool-down mode of cooling each of the first stage cryopanel and the second stage cryopanel from room temperature to the extremely low temperature region, and selects the normal target temperature as a first-stage target temperature in a case where a current operation mode is the normal mode, and at least temporarily selects the cool-down target temperature as the first-stage target temperature in a case where the current operation mode is the cool-down mode; and a first-stage temperature control unit which controls a first-stage cryopanel temperature according to the selected first-stage target temperature.

A method of regenerating a cryopump includes a first discharging process that includes alternately evacuating a cryopump housing and supplying a purge gas in a first pressure range, and a second discharging process that includes evacuating the cryopump housing to a low pressure region below the first pressure range. The second discharging process includes making a determination at least once in the low pressure range as to whether the second discharging process should be terminated, and supplying the purge gas to the cryopump housing prior to a first-time determination as to whether the second discharging process should be terminated.

There is provided a cryopump including a cryocooler, a cryopanel that is cooled by the cryocooler, a cryopump container that includes a container body, which accommodates the cryopanel, and a cryocooler accommodating tube of which one end is coupled to the container body and the other end is fixed to the cryocooler and into which the cryocooler is inserted, a vent valve for exhausting a fluid from the cryopump container, a first exhaust passage that includes a first exhaust port provided in the container body, is disposed outside the cryopump container, and connects the first exhaust port to the vent valve, and a second exhaust passage that includes a second exhaust port provided in the cryocooler accommodating tube, connects the second exhaust port to the vent valve, and merges with the first exhaust passage between the first exhaust port and the vent valve.

A cryopump includes at least one cryopanel including a photocatalyst layer on a surface thereof, and an excitation light source that is disposed so as to irradiate the photocatalyst layer with excitation light that activates the photocatalyst layer.

A cryopump with a pump inlet; a two stage refrigerator; a first stage array arranged thermally coupled to a first stage of the two stage refrigerator; and a cryopanel structure coupled to a second stage of the two stage refrigerator. Surfaces of the cryopanel structure have portions that are coated portion with an adsorbent material and other portions that are not coated with the adsorbent material.

A method for regenerating a cryopump that includes a cooler including a first stage part and a second stage part, and configured to cool the first stage part and the second stage part with a high pressure refrigerant; a cryopanel including a first panel which is cooled by the first stage part and a second panel which is cooled by the second stage part; a cryopump vessel configured to surround the cryopanel and including a radiation shield that surrounds the first stage part; a first heater provided in the first panel; and a second heater provided in the second panel, the method comprising a temperature increasing process of increasing temperatures of the radiation shield and the first panel by turning on the first heater, a roughing process of controlling a roughing valve configured to regulate vacuum within the cryopump vessel in a state where the cryopump vessel is kept at a pressure at which solid state ice can sublimate into gas state vapor, a purging process of supplying a purge gas into the cryopump vessel, and a cool-down process of lowering the temperatures of the first panel and the second panel.

A cryopump comprising:a pump inlet, a two stage refrigerator; a first stage array thermally coupled to a first stage of said two stage refrigerator; and a cryopanel structure coupled to a second stage of said two stage refrigerator is disclosed. The cryopanel structure comprises at least three flat panels. The first stage array is mounted between the pump inlet and the cryopanel structure, and comprises a plurality of slats, the plurality of slats each being mounted such that a side of each of the plurality of slats closest to the cryopanel structure is substantially aligned and offset longitudinally with respect to a corresponding one of said at least three flat panels.

A cryopump has a cryogenic refrigerator with cold and colder stages that cool a radiation shield, a primary cryopumping array and a frontal array. The frontal array is coupled to the cold stage and is spaced from and wrapped around the frontally facing envelope of the primary cryopumping array. The frontal array may be recessed from the frontal opening and closer to the primary cryopumping array than to the frontal opening.

A GM cryocooler includes a first cold head including a first displacer that is reciprocable in an axial direction, a first drive piston that drives the first displacer in the axial direction, and a first drive chamber that houses the first drive piston; a second cold head including a second displacer that is reciprocable in the axial direction, and a second cylinder that houses the second displacer; a first intake valve that is connected to both the first drive chamber and the second cylinder so as to supply working gas in parallel to the first drive chamber and the second cylinder; and a first exhaust valve that is connected to both the first drive chamber and the second cylinder so as to collect the working gas in parallel from the first drive chamber and the second cylinder.

A cryopump includes a cryocooler; a cryopanel cooled by the cryocooler; a cryopump container supporting the cryocooler and accommodating the cryopanel; a temperature sensor that measures a temperature of the cryopanel and outputs a measured temperature signal indicating the temperature; a pressure sensor that measures an internal pressure of the cryopump container and outputs a measured pressure signal indicating the internal pressure; a pressure rise rate comparator that compares a pressure rise rate of the cryopump container with a first pressure rise rate threshold; and a cryocooler controller that controls the cryocooler to lower the temperature of the cryopanel. The pressure rise rate comparator compares the pressure rise rate of the cryopump container with a second pressure rise rate threshold. The second pressure region is lower than the first pressure region. The second pressure rise rate threshold is smaller than the first pressure rise rate threshold.