A vacuum pump comprises an inlet flange for connecting to a vacuum chamber, where the inlet flange comprises a plurality of apertures for receiving a plurality of protruding fixing elements extending from the vacuum chamber. The protruding fixing elements comprise an enlarged retaining portion at an end remote from the vacuum chamber and a fastener receiving portion having at least one radial dimension that is smaller than a corresponding dimension of the enlarged retaining portion. A fastening mechanism is provided that comprises a plurality of slots each extending from a same side of a plurality of apertures. The fastening mechanism is configured to be rotatable between a mounting position in which the apertures are aligned with the protruding fixing elements and a sealing position in which the slots are aligned with the protruding fixing elements.

Provided are a vacuum pump and an adapter used in the vacuum pump that are capable of responding to various changes in specifications at low cost. A turbo-molecular pump includes a base, a stator blade that is provided above the base in an axial direction of a rotor, a rotor blade that is integrally attached to the rotor, a housing that is formed in a cylindrical shape, and accommodates the stator blade and is integrally attached to the base, and an adapter that is replaceable depending on a type of the stator blade, the rotor blade, or the housing, and that is detachably mounted on the base and is configured to support the stator blade in the axial direction.

A vacuum pump capable of removing side reaction products without overhaul is provided. The vacuum pump includes A motor for rotating a rotor, a heater capable of raising a temperature, a base spacer for holding the heater, a controller capable of controlling the heater by switching an operation mode between a normal operation mode and a cleaning operation mode, and a storage portion storing information on a set temperature relating to the heater, the storage portion stores at least first temperature information for the normal operation mode, or more specifically, set temperature information capable of using the pump without nonconformity, second temperature information for the cleaning operation mode, or more specifically, set temperature information capable of re-gasifying side reaction products generated during the normal operation mode, and the temperature represented by the second temperature information is higher than the temperature represented by the first temperature information.

A vacuum pump and an accessory unit of the vacuum pump for which there is no need of adjustment with respect to an operation schedule on an apparatus side, and for which version upgrade of built-in software and a change in setting data can be performed easily, are provided. In a built-in software and the like storage-portion of an optional device, new-version software and modules for updating software currently stored in a magnetic-bearing control portion, a motor driving/control portion, and a protection-function processing portion are stored. Moreover, new parameters for updating parameters currently stored in setting parameter are also stored. An application program or a parameter read out of the built-in software and the like storage-portion is sent by a user-interface processing portion to a built-in software update processing portion, and various programs and data are updated by this built-in software update processing portion.

A turbo-molecular pump comprises multiple stages of rotor blades and multiple stages of stator blades. When m is a positive real number equal to or less than a total number of stages of the rotor blades and greater than one and K is a natural number which is not a multiple of m in a case where m is a natural number and is a natural number in a case where m is not the natural number, the multiple stages of the rotor blades include a rotor blade at an inter-blade angle α1, and a rotor blade of which reference position is phase-shifted from a reference position of the rotor blade at the inter-blade angle α1 by an angle α1.Math.K/m.

An analysis device of a vacuum pump discharging gas from a vacuum container in which a process for a target object is performed, comprises: an information generation section configured to generate information on a load on the vacuum pump due to an accumulated substance based on an integrated value of a physical quantity regarding rotary drive of a rotor of the vacuum pump in at least part of a period of the process.

A vacuum pump includes a plurality of exhaust stages provided between an inlet port and an exhaust port so as to function as means for exhausting gas molecules, and a number of blades provided between the inlet port and an uppermost exhaust stage of the plurality of exhaust stages so as to rotate together with a rotary blade that constitutes the uppermost exhaust stage as a particle transport stage for transporting particles in an exhaust direction of the gas molecules, the number being smaller than the number of rotary blades that constitutes the uppermost exhaust stage.

An axial flow vacuum pump for evacuating a chamber in a semiconductor manufacturing process comprises a rotor having a plurality of rotor blades and a stator having a plurality of stator blades, wherein the rotor blades and stator blades have a curved shape.

A vacuum pump and a controller are provided with which state information of the vacuum pump is collected in a timely manner. In a controller, control portions control operating states of internal devices (such as a motor, a heater, and a cooling valve) located in a vacuum pump main body. An information collection portion collects the state information of the vacuum pump main body, and a recording processing portion records, in the non-volatile memory, the state information collected by the information collection portion. Also, the information collection portion collects the state information of the vacuum pump main body at a point in time at which a control portion switches the operating state of an internal device.

A vacuum pump which can decompose depositions by radicals and effectively exhaust them is provided. The vacuum pump including a casing, a stator disposed on an inner side of the casing, and a shaft rotatably supported with respect to the stator and also including a cylindrical rotor rotatably enclosed together with the shaft in the casing, in which an electrode portion, which is a part of a radical generating device that generates radicals, is disposed in the casing.