Provided is a vacuum pump in which no finish processing has to be carried out after shaping of a cylindrical rotor even in use of a cylindrical rotor obtained by shaping a fiber-reinforced plastic material into a cylindrical shape. The vacuum pump has a turbo-molecular pump section and a thread groove pump section. The upper end section of a cylindrical rotor, which is obtained by shaping a fiber-reinforced plastic material into a cylindrical shape, of the thread groove pump section, is joined to the lower end section of a rotor of the turbo-molecular pump section. A joining portion of the rotor of the turbo-molecular pump section and the cylindrical rotor of the thread groove pump section is disposed upstream of an exhaust passage. As a result, finish processing does not have to be carried out after shaping of the cylindrical rotor. If finish processing is performed after shaping of the cylindrical rotor a resin may be coated onto a rugged portion of the cylindrical rotor, or fibers may be helically wound at a winding angle not greater than 45 degrees.

To provide a stator member that facilitates thermal radiation from a surface thereof and thermal conduction to an adjacent member, and a vacuum pump that contains the stator member. For the purpose of enhancing heat dissipation of a rotor portion, surface treatment removal processing is performed on a predetermined section of a thread groove spacer in order to efficiently release heat of the thread groove spacer toward a base and a stator blade spacer. More specifically, the surface treatment removal processing removes the surface treatment of the base and a section where the stator blade spacer comes into contact with the thread groove spacer. This surface treatment removal processing is executed simultaneously with finishing processing.

A rotor support configured to rotatably mount a rotor shaft in a vacuum pump is disclosed. The rotor support comprises: a rolling bearing for rotatably supporting the shaft; an insert and at least one resilient damping member, the insert and the at least one resilient damping member surrounding the rolling bearing. The insert comprises inner and outer annular portions connected by a plurality of flexible members, the plurality of flexible members being configured to flex in a radial plane and resist movement in an axial plane, thereby absorbing radial movement of the shaft. The at least one resilient damping member is formed of an elastomeric material configured to flex in both a radial and axial direction.

Provided is a vacuum pump suitable for preventing the backflow of a particle from the vacuum pump toward a vacuum chamber. The vacuum pump includes a turbomolecular pump portion exhausting gas molecules by a rotor blade and a stator blade, and a thread groove pump portion provided downstream of the turbomolecular pump portion and exhausting the gas molecules by a thread groove flow path formed by a cylindrical rotary component (cylindrical portion) and a cylindrical stator component (thread groove pump portion stator) provided on an outer periphery of the cylindrical rotary component, wherein a bounce back prevention means for preventing a particle from bouncing from the thread groove pump portion back toward the turbomolecular pump portion is provided downstream of the turbomolecular pump portion.

A vacuum pump in which a spark is not generated even when a rotor component and a stator component are brought into contact, and an explosive reaction in a vacuum container can be prevented, and a protection portion provided in the vacuum pump are provided. On head part sides of a thread ridge to a thread ridge of a threaded spacer with a narrow clearance of a gas channel therebetween, a protection portion 1a to a protection portion made of non-metal are formed in a peripheral state. A protection portion is similarly formed in the peripheral state also on an inner peripheral surface side of a stator blade spacer opposed to a distal end of a rotor blade with a narrow clearance of the gas channel. The protection portion is formed of non-metal with a sufficient thickness so that metal materials of base materials are not brought into contact with each other even when a rotor blade and a stationary portion are brought into contact with each other.

At timing t0, a brake gas (raw material gas) starts to be supplied to an ion beam generator, and the brake gas is fed into a turbo molecular pump. After timing t1, a vent valve is opened intermittently to feed atmospheric air into the turbo molecular pump. The brake gas may be different from the raw material gas. The brake gas is supplied using a gas supply system.

A vacuum pump comprises: a rotor; a stator; a first heating section configured to heat the stator cylindrical portion to a temperature for reducing product accumulation; an exhaust pipe provided at a housing storing the rotor and the stator to discharge gas discharged by the rotor and the stator to an outside of the housing; a second heating section configured to heat the exhaust pipe to a temperature for reducing product accumulation; and a gas passage container arranged in the housing, having an inlet port into which gas discharged through a gap between the rotor cylindrical portion and the stator cylindrical portion flows and an outlet port from which inflow gas flows to the exhaust pipe, and heated to a temperature for reducing product accumulation. A gas-inflow-side end portion of the exhaust pipe is inserted into the outlet port of the gas passage container through a clearance.

A vacuum pump comprises: a cylindrical rotor; multiple heat insulating pins; and a stator having a cylindrical portion arranged with a predetermined gap in an outer peripheral side of the rotor and a fixing portion to be fixed to a pump base through the multiple heat insulating pins. The heat insulating pins have a lower thermal conductivity than those of the stator and the pump base, and support the fixing portion.

An estimation device for estimating a process gas condition in a system for pumping gas from a vacuum chamber into which the gas is injected to perform a treatment process by a vacuum pump attached to the vacuum chamber through a vacuum valve, comprises: a computer having a processor and a memory, wherein the computer estimates a first process gas condition including an injected gas type and a gas flow rate based on correlation data between a valve body opening degree of the vacuum valve and an effective exhaust speed of the system regarding a predetermined gas type and a chamber pressure of the vacuum chamber.

A power supply integrated vacuum pump comprises: a pump housing in which a pump rotor is arranged; a power supply housing fixed to an outer surface of the pump housing; a connector configured to connect a pump-housing-side line and a power-supply-housing-side line; and a spacer fixed to the outer surface of the pump housing and having a connector fixing surface to which the connector is fixed.