A vacuum pumping arrangement comprising multiple pumping stages for evacuating a process chamber and a method of cleaning the vacuum pumping arrangement is discussed. The vacuum pumping arrangement comprises: at least one turbomolecular pumping stage; at least one further pumping stage downstream of the turbomolecular pumping stage; and at least one inlet for admitting radicals into the vacuum pumping arrangement, the at least one inlet being located downstream of the turbomolecular stage and upstream of at least one of the at least one further pumping stage.

A vacuum pump comprises: a rotor cylindrical portion; a motor configured to rotate the rotor cylindrical portion; a stator cylindrical portion, the rotor cylindrical portion and the stator cylindrical portion together forming a screw groove pump; a base housing the rotor cylindrical portion and the stator cylindrical portion; a heater configured to heat the base or the stator cylindrical portion; a cooling device attached to the base; and a cover member arranged at an outer peripheral side of the stator cylindrical portion and an outer peripheral side of the base, covering the base through an air insulating layer, and contacting the cooling device.

A thread groove pump portion, which is an exhaust element, is structured such that a Siegbahn structure is attached onto a cylindrical thread, and such that respective parts are connected to each other at this attachment section. A flow channel of the Siegbahn portion and a flow channel of the cylindrical thread (the thread groove pump portion) are connected to each other so as to substantially form a right angle when viewed from an axis direction of the vacuum pump, thus, the flow channel of the Siegbahn portion and the flow channel of the thread groove pump portion are connected to each other. the length of a compression flow channel of the thread groove pump portion can be increased in a radial direction due to the connected Siegbahn portion.

To provide a vacuum pump suited for removal of a product deposited in a flow path of the vacuum pump, and a stator component, discharge port, and control means that are used in the vacuum pump. A vacuum pump includes a flow path through which a gas is transferred from an inlet port toward an outlet port and removing means that removes a product deposited on an inner wall surface of the flow path. The removing means has injection holes with one ends opened at the inner wall surface of the flow path and injects the removing gas into the flow path through the injection holes.

A vacuum pump system comprises: a vacuum pump including a suction port, an exhaust port, and a pressure detection section configured to detect a gas pressure in a gas flow path through which gas sucked through the suction port flows to the exhaust port; and an arithmetic device configured to perform arithmetic processing for a state of a deposition substance in the gas flow path based on the gas pressure detected by the pressure detection section.

A vacuum pump comprises: a rotor provided with multiple stages of rotor blades; a base including a ball bearing configured to rotatably support the rotor; an outer cylinder covering the rotor and connected to the base; and a control device including an electronic circuit having a heat generation element. The control device is provided in contact with the outer cylinder.

A vacuum pump comprises: a pump device configured to rotate a rotor about a rotation axis supported by a ball bearing, thereby discharging gas sucked through a pump suction port from a pump exhaust port; and a control device attached to a side surface along a direction of the rotation axis of the pump device, including an electronic circuit having a heat generation element and a housing configured to house the electronic circuit, and configured to control operation of the pump device. The heat generation element directly contacts an outer plate of the housing not contacting the pump device, and does not contact an outer plate of the housing contacting the pump device.

A vacuum pump includes a plurality of exhaust stages provided between an inlet port and an exhaust port so as to function as means for exhausting gas molecules, and a number of blades provided between the inlet port and an uppermost exhaust stage of the plurality of exhaust stages so as to rotate together with a rotary blade that constitutes the uppermost exhaust stage as a particle transport stage for transporting particles in an exhaust direction of the gas molecules, the number being smaller than the number of rotary blades that constitutes the uppermost exhaust stage.

A drag pump for pumping gas and a set of vacuum pumps including the drag pump are disclosed. The drag pump comprises: a rotor configured to rotate within a stator component and to drive a gas to be pumped from a gas inlet to a gas outlet; magnetic bearings for rotatably mounting the rotor within the pump; wherein at least a portion of the rotor and stator component configured to contact the gas to be pumped are configured for operation at temperatures above 130 C.

The invention provides a stator-side member which is arranged in a vacuum pump and which, without the provision of a heat insulation material, prevents the deposition of products at the lower side of a threaded groove pump unit, with this lower side being an area of high pressure where the deposition of products (deposits) occurs easily, and also provides a vacuum pump equipped with this stator-side member. A threaded groove spacer configured to have a coefficient of thermal conductivity lower than a predetermined value is arranged in a vacuum pump equipped with a threaded groove pump unit. (1) The threaded groove spacer is manufactured from a material having a coefficient of thermal conductivity lower than that of a member which opposes or comes into contact with the threaded groove spacer. Specifically, this material has a coefficient of thermal conductivity lower than that of aluminum or aluminum alloy, and is preferably any one of stainless steel, fiber-reinforced plastic, polyetherimide, and polyetheretherketone. (2) The threaded groove spacer is constituted by at least two or more parts.