A vacuum pump lubricant supply system has a lubricant reservoir and a wicking element. The body portion has opposed major surfaces and a finger. The lubricant reservoir has a major surface engaging one of the opposed major surfaces of the body portion so that lubricant can migrate through the engaging major surfaces into the body portion. The finger projects from the body portion to engage a lubricant transfer device provided on a rotor shaft so that lubricant can wick from the body portion to the lubricant transfer device via the finger. The body portion has an edge provided with a cut-out so that the major surface of the body portion that engages the major surface of the lubricant container has a total surface area that is less than the total surface area of the major surface of the lubricant container.

A gas pump and processes for preparing the gas pump are presented. The gas pump includes a bottom Holweck stage with internal heaters for cleaning deposits resulting from exhausting gases from a semiconductor manufacturing chamber. One example gas pump includes a turbomolecular stage on a top section of the gas pump and a Holweck stage below the turbomolecular stage. The Holweck stage comprises a rotor element, a stator element with an opening in the center, and one or more heaters. The opening has a substantially cylindrical shape and an inside surface with a plurality of grooves separated by threads. Each heater is situated on a surface of one of the plurality of grooves. The heaters may be turned on to clean the deposits accumulated on the gas pump during the processing of a substrate.

A vacuum pump suitable for prolonging the life of a heating means used as a measure to prevent product deposition in the vacuum pump, and a heating device for the vacuum pump. A vacuum pump that exhausts gas by rotation of a rotating body has an exhaust flow path for exhausting the gas, and a heating means for heating the exhaust flow path, wherein the heating means has a plurality of resistance heating elements connected in parallel to a pair of wiring lines. The heating means has a current measuring means for measuring a sum of values of currents flowing through the plurality of resistance heating elements, a determination means for determining failure conditions of the plurality of resistance heating elements on the basis of a measured value obtained by the current measuring means, and an output means for outputting the failure conditions determined by the determination means.

A vacuum pump comprises: a pump housing; a motor configured to rotate in the pump housing; a rotor configured to be rotatably driven by the motor; a stator provided between the rotor and the pump housing; and a heat insulating member provided between the stator and the pump housing. The heat insulating member has a cylindrical main body and a processing gripping target portion provided on at least one of inner and outer peripheral surfaces of the main body.

In a vacuum pump, a portion of a lower end portion of a rotating cylindrical body is cut in an axial direction thereof to form an imbalance correction portion (removal portion). Preferably, the removal portion is formed so as to minimize an axial width of the rotating cylindrical body and set a circumferential width of the rotating cylindrical body to a value of not less than a thickness (width in a radial direction) of the rotating cylindrical body. Additionally, a corner formed in the removal portion is formed to have a large. With this configuration, in the rotating cylindrical body, the removal portion is formed to have a shape in which a removal width (depth) in the axial direction of the rotating cylindrical body is small and a removal width in the circumferential direction thereof is large.

A vacuum pump comprises: a rotor; a stator; a first heating section configured to heat the stator cylindrical portion to a temperature for reducing product accumulation; an exhaust pipe provided at a housing storing the rotor and the stator to discharge gas discharged by the rotor and the stator to an outside of the housing; a second heating section configured to heat the exhaust pipe to a temperature for reducing product accumulation; and a gas passage container arranged in the housing, having an inlet port into which gas discharged through a gap between the rotor cylindrical portion and the stator cylindrical portion flows and an outlet port from which inflow gas flows to the exhaust pipe, and heated to a temperature for reducing product accumulation. A gas-inflow-side end portion of the exhaust pipe is inserted into the outlet port of the gas passage container through a clearance.

A vacuum pump which can prevent lowering of an exhaust performance of the vacuum pump, even if a linked-type thread groove spacer is fastened by a fixing bolt, is provided. The linked-type thread groove spacer according to an embodiment of the present invention includes a structure for linking a Siegbahn pump portion and a thread-groove pump portion. When this linked-type thread groove spacer is to be fastened, a countersunk hole is provided in advance in an exhaust channel portion, and the linked-type thread groove spacer is fastened to a base by a fixing bolt. As a result, a head part of the fixing bolt does not protrude to the exhaust channel, and the head part of the fixing bolt does not make resistance against an exhaust gas. Thus, lowering of the exhaust performance of the vacuum pump can be suppressed.

A deposited material sensor is arranged, in a flow path of a gas from an inlet port to an outlet port, on an upstream side or a downstream side of a predetermined flow path position where a cause of disruption to operation of the vacuum pump is to occur. In addition, the deposited material sensor detects a presence or absence of deposited material at the arrangement position of the deposited material sensor, and the arrangement position of the deposited material sensor is a position where a thickness of the deposited material at the predetermined flow path position assumes a predetermined thickness that corresponds to a maintenance time of maintenance for suppressing the cause when a detection state of the deposited material sensor changes from deposited material absent to deposited material present.

Provided is a vacuum pump for preventing solidification of gas in a thread groove portion, and a heat insulating spacer used in the vacuum pump. The vacuum pump includes a heat insulating spacer that is interposed between a casing and an outer circumferential stator having a thread groove portion, supports the outer circumferential stator coaxially with a rotor in a rotor radial direction, with keeping a gap between the casing and the outer circumferential stator, and has lower thermal conductivity than the casing and the outer circumferential stator.

A drag pump for pumping fluid from an inlet to an outlet includes a stator and a rotor. One of the stator or rotor includes a disc having a plurality of channels each of the channels extending from an inlet portion of the disc at or close to an inlet edge towards an outlet portion at or close to an outlet edge. The plurality of channels each has walls for guiding fluid flow from the inlet edge to the outlet edge in response to relative motion between the stator and the rotor. The disc further includes a plurality of protrusions extending from the channels, each of the protrusions being arranged to divide a channel at the inlet or the outlet end of the channel, into sub-channels that extend for a portion of a length of the channel and do not extend for a whole length of the channel.