A gas pump and processes for preparing the gas pump are presented. The gas pump includes a bottom Holweck stage with internal heaters for cleaning deposits resulting from exhausting gases from a semiconductor manufacturing chamber. One example gas pump includes a turbomolecular stage on a top section of the gas pump and a Holweck stage below the turbomolecular stage. The Holweck stage comprises a rotor element, a stator element with an opening in the center, and one or more heaters. The opening has a substantially cylindrical shape and an inside surface with a plurality of grooves separated by threads. Each heater is situated on a surface of one of the plurality of grooves. The heaters may be turned on to clean the deposits accumulated on the gas pump during the processing of a substrate.

A vacuum pump comprises: a rotor provided with multiple stages of rotor blades; a base including a ball bearing configured to rotatably support the rotor; an outer cylinder covering the rotor and connected to the base; and a control device including an electronic circuit having a heat generation element. The control device is provided in contact with the outer cylinder.

An object is to reduce an adhesion amount of a product in a vacuum pump as a whole and effectively prevent occurrence of a trouble in a vacuum pump electric system due to a magnetic flux leak. A vacuum pump includes a rotor enclosed in a pump case, a rotating shaft fixed to the rotor, a supporting means that rotatably supports the rotating shaft, a driving means that rotates the rotating shaft, and thread-groove-exhaust-portion stators that form thread grove exhaust passages between the thread-groove-exhaust-portion stator and an outer circumferential side of or an inner circumferential side of the rotor. A heating portion is provided below the thread-groove-exhaust-portion stators. The heating portion includes a yoke, a coil, and a heating plate. The heating portion heats the yoke and the heating plate with electromagnetic induction heating by feeding an alternating current to the coil.

An improved vacuum pump mechanism is described in which an intersecting solid or perforated element is arranged to intersect a channel member. Relative movement of the intersecting solid or perforated element and channel member causes gas molecules to be urged from inlet to an outlet of the pump. Gas molecules are constrained within the channel member and interaction of the gas molecules with the flat and smooth surfaces of the intersecting solid or perforated member influence momentum of the gas molecules so that they are directed towards the outlet. In one embodiment, the channel member is formed as a helix and the intersecting solid or perforated elements are disk-shaped. An alternative embodiment is provided having the channel member configured as a spiral and the perforated elements as cylindrical skirts. The pump provides significant improvements in pump capacity, reduced power consumption and size of pump.

A vacuum pump reduces a stress without reducing the rotation speed of a rotating cylindrical body. In an outlet port-side lower portion of a rotor cylindrical portion included in the vacuum pump, a smaller diameter portion having an outer diameter smaller than that of an inlet port-side portion of the rotor cylindrical portion is provided. A lowermost end portion (outlet port-side end portion) of the rotor cylindrical portion is designed longer than a thread groove exhaust element to provide an extending portion. In the extending portion, a smaller diameter portion having an outer diameter smaller than that of the inlet port-side portion of the rotor cylindrical portion which is opposed to the thread groove exhaust element is provided.

A vacuum pump comprises: a pump device configured to rotate a rotor about a rotation axis supported by a ball bearing, thereby discharging gas sucked through a pump suction port from a pump exhaust port; and a control device attached to a side surface along a direction of the rotation axis of the pump device, including an electronic circuit having a heat generation element and a housing configured to house the electronic circuit, and configured to control operation of the pump device. The heat generation element directly contacts an outer plate of the housing not contacting the pump device, and does not contact an outer plate of the housing contacting the pump device.

A vacuum pump comprises a cylindrical rotor; a cylindrical stator which discharges gas in cooperation with the rotor; and a tubular base to which the stator is fixed. The stator has no fitting structure with respect to the base and is fixed to the base in a concentric state. A pin hole is formed on the stator and the base respectively, and a positioning pin for achieving the concentric state is inserted into each pin hole.

A vacuum pump is provided, which suppresses occurrence of a gas product in an exhaust side outlet of a thread groove and maintains pump performance over a long period. The vacuum pump includes inflow suppressing walls formed by widening greater an exhaust side end portion of ridge portions, extended along a gas exhaust direction on an outer circumferential surface of an inner circumference side stator, forward in a rotor rotating direction than an intake side end portion, the inflow suppressing walls suppressing retention of gas in exhaust side outlets of thread grooves engraved among the ridge portions.

A vacuum pump comprises a screw groove exhaust section including a rotor cylindrical section and a stator; a base; an inner stator forming an inner gas discharge path between an inner peripheral surface of the rotor cylindrical section and the inner stator; an outer stator forming an outer gas discharge path between an outer peripheral surface of the rotor cylindrical section and the outer stator, and being thermally coupled to the inner stator; a communication opening formed on the rotor, and allowing the outer gas discharge path and the inner gas discharge path to communicate with each other on an upstream side; an exhaust opening discharging the joined gas of the gas passing through the outer gas discharge path and the gas passing through the inner gas discharge path from the screw groove exhaust section toward the exhaust port.

The present invention provides a thread groove pump mechanism which suppresses a backflow of the gas in the thread groove pump mechanism and reduces the pressure difference in the pump radial direction near the outlet of the thread groove pump mechanism to thereby improve the exhaust performance and the compression performance. The present invention also provides a vacuum pump including the thread groove pump mechanism, and a rotor, an outer circumference side stator, and an inner circumference side stator used in the thread groove pump mechanism. A thread groove pump mechanism includes an exhaust-performance improving means in an outer-circumference-side thread groove portion engraved on an opposite surface of an outer circumference side stator opposed to a rotor cylinder portion and an inner-circumference-side thread groove portion engraved on an opposite surface of an inner circumference side stator opposed to the rotor cylinder portion.