A vacuum pump, vacuum pump arrangement and method are disclosed. The vacuum pump includes at least one rotor; and a stator, an inlet for receiving gas during operation; and an exhaust for exhausting the gas. The vacuum pump includes a shaft extending through a centre of said pump and comprising a plate mounted on an end of the shaft towards the inlet. The vacuum pump includes control circuitry configured to control an axial position of the plate, a change in axial position of the plate providing a change in inlet conductance of gas to the vacuum pump. The plate is mounted such that it extends beyond the inlet in at least some axial positions of the rotor such that the plate is not on the same side of the inlet as the stator.

A vacuum pumping device comprises: a turbo-molecular pump; an backing pump connected to an outlet side of the turbo-molecular pump; a measurement section configured to measure first elapsed time until a suction-port-side pressure of the backing pump reaches a predetermined pressure higher than a turbo-molecular pump startable pressure and lower than an atmospheric pressure after start of the backing pump; an arithmetic section configured to calculate, based on the first elapsed time measured by the measurement section, the atmospheric pressure, and the predetermined pressure, second elapsed time until the suction-port-side pressure reaches the turbo-molecular pump startable pressure after the start of the backing pump; and a start control section configured to start the turbo-molecular pump when the second elapsed time has elapsed after the start of the backing pump.

A vacuum pump system is provided that includes a main vacuum pump that is connected to a chamber that is to be evacuated. An auxiliary pump is connected to an outlet of the main vacuum pump. Furthermore, a sealing gas supply device is connected to the main vacuum pump. The sealing gas supply device is switched on and off with the aid of a control device as a function of a predetermined control variable. Additionally, a method for controlling the vacuum pump system.

A vacuum pump, vacuum pump arrangement and method are disclosed. The vacuum pump includes at least one rotor; and a stator, an inlet for receiving gas during operation; and an exhaust for exhausting the gas. The vacuum pump includes a shaft extending through a centre of said pump and comprising a plate mounted on an end of the shaft towards the inlet. The vacuum pump includes control circuitry configured to control an axial position of the plate, a change in axial position of the plate providing a change in inlet conductance of gas to the vacuum pump. The plate is mounted such that it extends beyond the inlet in at least some axial positions of the rotor such that the plate is not on the same side of the inlet as the stator.

A turbo molecular pump including multiple stages. At least one of the multiple stages of the rotor blades and the multiple stages of the stator blades is configured to satisfy any one of a first condition of Xout<Xc and Xin<Xc, a second condition of α.Math.Xc≥Xin>Xc>Xout where α=1.04, or a third condition of Xin<Xc<Xout≤β.Math.Xc where β=1.04. Xout, Xc and Xin being an inter-blade distance dived by a blade length, at an outer-diameter-side end portion, at an inner-diameter-side portion, and at an intermediate position of each blade, respectively.

A drag pump for pumping gas and a set of vacuum pumps including the drag pump are disclosed. The drag pump comprises: a rotor configured to rotate within a stator component and to drive a gas to be pumped from a gas inlet to a gas outlet; magnetic bearings for rotatably mounting the rotor within the pump; wherein at least a portion of the rotor and stator component configured to contact the gas to be pumped are configured for operation at temperatures above 130° C.

To provide a vacuum pump capable of heating only a flow channel extending from the vicinity of an exit of a thread groove exhaust flow channel toward an outlet port and prevents the accumulation of a product that is caused by a decrease in the temperature of process gas near the exit of the thread groove exhaust flow channel and the flow channel. A vacuum pump has a thread groove exhaust portion that has thread groove exhaust flow channels at least in respective parts of portions on inner and outer circumferential sides of a rotor (rotating body), a casing enclosing the thread groove exhaust portion, an outlet port for exhausting gas compressed by the thread groove exhaust portion to the outside of the casing, and a partition wall that covers a flow channel extending from the exits of the thread groove exhaust flow channels toward the outlet port.

Disclosed is a mass-spectrometry leak detector including a multi-stage turbomolecular pump, a mass spectrometer connected to the suction side of the turbomolecular pump, a preliminary vacuum pump connected to the pressure side of the turbomolecular pump, and a booster pump stage. The suction side of the booster pump stage has a connection for a test object and the pressure side is connected to the pressure side of the turbomolecular pump and to the suction side of the preliminary vacuum pump by means of a gas line path. The stages of the turbomolecular pump and the booster pump stage are arranged on a common shaft and have a common drive and the gas line path is interrupted, by means of a separation, between the pressure side of the booster pump stage and the suction side of the pump stage of the turbomolecular pump connected to the mass spectrometer.

A vacuum pumping device comprises: a turbo-molecular pump; an backing pump connected to an outlet side of the turbo-molecular pump; a measurement section configured to measure first elapsed time until a suction-port-side pressure of the backing pump reaches a predetermined pressure higher than a turbo-molecular pump startable pressure and lower than an atmospheric pressure after start of the backing pump; an arithmetic section configured to calculate, based on the first elapsed time measured by the measurement section, the atmospheric pressure, and the predetermined pressure, second elapsed time until the suction-port-side pressure reaches the turbo-molecular pump startable pressure after the start of the backing pump; and a start control section configured to start the turbo-molecular pump when the second elapsed time has elapsed after the start of the backing pump.

An object is to provide a vacuum pump that enables, without being affected by a flow rate of gas to be discharged, concentrated and efficient heating of only a stator component of an exhaust side gas channel that needs to be heated in order to prevent deposition of products and that also enables prevention of deposition of products in the exhaust side gas channel as a result of the heating, and improvement of pump emission performance. The vacuum pump has a rotor rotatably arranged on a pump base and a gas channel through which gas sucked by rotation of the gas is guided to an outlet port, and further includes heat insulating means for thermally insulating a stator component, which forms an exhaust side gas channel in the gas channel, from other components and heating means for heating the thermally insulated stator component.