An electropneumatic valve assembly comprises an electropneumatic pilot stage and a pneumatic power stage which is actuated by the pilot stage. Each pilot valve switches at least two power valves, and the valve assembly has a housing with an electrical signal input, with a compressed-air port, at least one vent port and at least one working outlet. The housing is layered with a pilot stage housing and a power stage housing connected along a substantially planar parting surface. At least one sealing element is between the pilot stage housing and power stage housing surrounding a control pressure region between the pilot stage housing and power stage housing. The control pressure region has two actuation regions for two power valves and has a duct-like connection with a defined flow cross section between the two actuation regions. An outlet of the associated pilot valve opens into the control pressure region.

An electropneumatic valve assembly comprises an electropneumatic pilot stage and a pneumatic power stage which is actuated by the pilot stage. Each pilot valve switches at least two power valves, and the valve assembly has a housing with an electrical signal input, with a compressed-air port, at least one vent port and at least one working outlet. The housing is layered with a pilot stage housing and a power stage housing connected along a substantially planar parting surface. At least one sealing element is between the pilot stage housing and power stage housing surrounding a control pressure region between the pilot stage housing and power stage housing. The control pressure region has two actuation regions for two power valves and has a duct-like connection with a defined flow cross section between the two actuation regions. An outlet of the associated pilot valve opens into the control pressure region.

In addition to improving security of data communication between a control device and a mobile terminal, to make it possible to easily make the data communication. A working machine of the present invention is provided with a control device that can make wireless communication with a mobile terminal 3 storing a mobile-use ID code and stores a working machine-use ID code, wherein the control device is provided with: ID code checking means 41 adapted to check the mobile-use ID code obtained by ID code obtaining means 40 and the working machine-use ID code with each other; data communication means 42 adapted, in the case where as a result of the checking by the checking means, matching between the ID codes is established, to allow data communication between the mobile terminal 3 and the control device, and in the case where the matching is not established, not to allow the data communication; and ID code registration means adapted to register the working machine-use ID code in the mobile terminal 3 as the mobile-use ID code.

In addition to improving security of data communication between a control device and a mobile terminal, to make it possible to easily make the data communication. A working machine of the present invention is provided with a control device that can make wireless communication with a mobile terminal 3 storing a mobile-use ID code and stores a working machine-use ID code, wherein the control device is provided with: ID code checking means 41 adapted to check the mobile-use ID code obtained by ID code obtaining means 40 and the working machine-use ID code with each other; data communication means 42 adapted, in the case where as a result of the checking by the checking means, matching between the ID codes is established, to allow data communication between the mobile terminal 3 and the control device, and in the case where the matching is not established, not to allow the data communication; and ID code registration means adapted to register the working machine-use ID code in the mobile terminal 3 as the mobile-use ID code.

An actuator, such as a pressure actuator or a vacuum actuator, has a housing and a plunger that is guided through the housing. A diaphragm is connected to the housing and to the plunger and forms a gas-tight pressure chamber with the housing. A pressure medium connector is provided on the housing and communicates with the pressure chamber to pressurize the pressure chamber. A braking element is provided on the plunger and enables a braking force can be exerted on the plunger.

An actuator, such as a pressure actuator or a vacuum actuator, has a housing and a plunger that is guided through the housing. A diaphragm is connected to the housing and to the plunger and forms a gas-tight pressure chamber with the housing. A pressure medium connector is provided on the housing and communicates with the pressure chamber to pressurize the pressure chamber. A braking element is provided on the plunger and enables a braking force can be exerted on the plunger.

A lift apparatus includes a lift assembly and a servo-control system. The lift assembly includes at least one pneumatic actuator including a movable member to provide a load to transfer a substrate between a support and a transfer plane. The lift assembly further includes at least one proportional pneumatic valve to control fluid flow between the actuator and a pressurized fluid supply or a vent, a plurality of pressure sensors each to measure pressure in a respective supply line to the actuator, and at least one position sensor to measure a position of the movable member. The servo-control system includes a controller to determine an output force based on a commanded force and an estimated force, generate a control signal based on the output force, and apply the control signal to the proportional valve to move the movable member.

An electropneumatic valve assembly comprises an electropneumatic pilot stage and a pneumatic power stage which is actuated by the pilot stage. Each pilot valve switches at least two power valves, and the valve assembly has a housing with an electrical signal input, with a compressed-air port, at least one vent port and at least one working outlet. The housing is layered with a pilot stage housing and a power stage housing connected along a substantially planar parting surface. At least one sealing element is between the pilot stage housing and power stage housing surrounding a control pressure region between the pilot stage housing and power stage housing. The control pressure region has two actuation regions for two power valves and has a duct-like connection with a defined flow cross section between the two actuation regions. An outlet of the associated pilot valve opens into the control pressure region.

An electropneumatic valve assembly comprises an electropneumatic pilot stage and a pneumatic power stage which is actuated by the pilot stage. Each pilot valve switches at least two power valves, and the valve assembly has a housing with an electrical signal input, with a compressed-air port, at least one vent port and at least one working outlet. The housing is layered with a pilot stage housing and a power stage housing connected along a substantially planar parting surface. At least one sealing element is between the pilot stage housing and power stage housing surrounding a control pressure region between the pilot stage housing and power stage housing. The control pressure region has two actuation regions for two power valves and has a duct-like connection with a defined flow cross section between the two actuation regions. An outlet of the associated pilot valve opens into the control pressure region.

Disclosed are Variable Displacement Power Controllers and applications generally in the field of fluid powered systems that provide for increased efficiency and effectiveness over known fluid systems, where fluid power generally refers to hydraulic or pneumatic power systems.