A phasing system for varying a rotational relationship between a first rotary component and a second rotary component includes a gear hub and a cradle rotor. A spider rotor is arranged between the gear hub and the cradle rotor to selectively lock and unlock relative rotation between the gear hub and the cradle rotor. A torsion spring is coupled between the gear hub and the cradle rotor to apply a torque load between the gear hub and the cradle rotor. A planetary actuator is coupled to the gear hub and the spider rotor. The planetary actuator is operable between a steady-state mode, in which relative rotation between the gear hub and the cradle rotor is inhibited, and a phasing mode, in which the planetary actuator receives a rotary input at a predetermined magnitude to selectively provide a relative rotation between the gear hub and the cradle rotor.

A phasing system for varying a rotational relationship between a first rotary component and a second rotary component includes a gear hub and a cradle rotor. A spider rotor is arranged between the gear hub and the cradle rotor to selectively lock and unlock relative rotation between the gear hub and the cradle rotor. A torsion spring is coupled between the gear hub and the cradle rotor to apply a torque load between the gear hub and the cradle rotor. A planetary actuator is coupled to the gear hub and the spider rotor. The planetary actuator is operable between a steady-state mode, in which relative rotation between the gear hub and the cradle rotor is inhibited, and a phasing mode, in which the planetary actuator receives a rotary input at a predetermined magnitude to selectively provide a relative rotation between the gear hub and the cradle rotor.

A connection rod coupling assembly includes a settable shape mounting second component having a lateral, primary axis and a bearing assembly including a bearing assembly body. The bearing assembly body includes a substantially cylindrical outer surface and a center axis. The bearing assembly body is coupled to the settable shape mounting second component in a non-aligned configuration. That is, the bearing assembly body center axis is offset from the settable shape mounting second component primary axis. Thus, the position of the bearing assembly body center axis is adjustable by repositioning the settable shape mounting second component relative to a settable shape mounting first component on a swing lever. The adjustment of the bearing assembly body, in turn, adjusts the range of the ram assembly and the ram assembly body.

A connection rod coupling assembly includes a settable shape mounting second component having a lateral, primary axis and a bearing assembly including a bearing assembly body. The bearing assembly body includes a substantially cylindrical outer surface and a center axis. The bearing assembly body is coupled to the settable shape mounting second component in a non-aligned configuration. That is, the bearing assembly body center axis is offset from the settable shape mounting second component primary axis. Thus, the position of the bearing assembly body center axis is adjustable by repositioning the settable shape mounting second component relative to a settable shape mounting first component on a swing lever. The adjustment of the bearing assembly body, in turn, adjusts the range of the ram assembly and the ram assembly body.

An apparatus configured to change a compression ratio of a reciprocating piston internal combustion engine includes an externally toothed eccentric, an adjusting unit, and a coupling unit. A first takeoff shaft is coupled mechanically to the external toothing system of the eccentric. A second takeoff shaft is coupled mechanically to the adjusting unit. The first and second takeoff shafts of the coupling unit, the eccentric and/or the adjusting unit are configured for the partial or complete arrangement in the interior of a crankcase of the crankshaft, within an installation space of a web of the crankshaft and/or within an installation space of a counterweight.

An apparatus configured to change a compression ratio of a reciprocating piston internal combustion engine includes an externally toothed eccentric, an adjusting unit, and a coupling unit. A first takeoff shaft is coupled mechanically to the external toothing system of the eccentric. A second takeoff shaft is coupled mechanically to the adjusting unit. The first and second takeoff shafts of the coupling unit, the eccentric and/or the adjusting unit are configured for the partial or complete arrangement in the interior of a crankcase of the crankshaft, within an installation space of a web of the crankshaft and/or within an installation space of a counterweight.

Implementations described herein protect a substrate support from corrosive cleaning gases used at high temperatures. In one embodiment, a substrate support has a shaft having an outer wall. The substrate support has a heater. The heater has a body having a top surface, a side surface and a bottom surface extending from the outer wall of the shaft. The top surface is configured to support a substrate during plasma processing of the substrate. A covering is provided for at least two of the top surface, side surface and bottom surface. The covering is selected to resist corrosion of the body at temperatures in excess of about 400 degrees Celsius. A sleeve circumscribing the shaft, the sleeve and the outer wall of the shaft forming a space therebetween, the space adapted to flow a purge gas therethrough in a direction toward the body.

Implementations described herein protect a substrate support from corrosive cleaning gases used at high temperatures. In one embodiment, a substrate support has a shaft having an outer wall. The substrate support has a heater. The heater has a body having a top surface, a side surface and a bottom surface extending from the outer wall of the shaft. The top surface is configured to support a substrate during plasma processing of the substrate. A covering is provided for at least two of the top surface, side surface and bottom surface. The covering is selected to resist corrosion of the body at temperatures in excess of about 400 degrees Celsius. A sleeve circumscribing the shaft, the sleeve and the outer wall of the shaft forming a space therebetween, the space adapted to flow a purge gas therethrough in a direction toward the body.

An adjustable stroke mechanism for a random orbital machine including a housing having a wall enclosing a cavity, an adjuster ring surrounding the housing and having a first set of gear teeth along a first portion of an inner surface, and a second set of gear teeth along a second portion of the inner surface, a counterweight having gear teeth on an exterior surface disposed within the housing, and a bearing carriage having gear teeth disposed within the housing. At least one counterweight gear that meshes with the gear teeth of the counterweight and the first set of gear teeth of the adjuster ring, and at least one bearing carriage gear that meshes with the gear teeth of the bearing carriage and the second set of gear teeth of the adjuster ring, so that movement of the adjuster ring causes movement of both the counterweight and the bearing carriage.

The connecting rod head includes at least one oil chamber and an eccentric comprises a protrusion reaching into the oil chamber, so that an oil pressure in the oil chamber exerts a force on the protrusion to change the eccentric setting of the eccentric.