A servo valve includes a fluid transfer valve assembly comprising a supply port and a control port; a valve spool arranged to regulate flow of fluid from the supply port to the control port in response to a control signal; and a drive means configured to move the valve spool relative to the fluid transfer assembly in response to the control signal to regulate the fluid flow. The drive means is arranged to rotate the spool relative to the fluid transfer assembly, the spool provided with openings arranged to selectively align with or block flow channels in the fluid transfer assembly according to the direction and degree of rotation of the spool.

A control valve includes: a second inner circumferential portion capable of holding a first spring, in a first communication passage provided at a first discharge opening of a housing; and a recessed portion recessed in a radial direction, at a position that is a part of a region in a circumferential direction of the second circumferential portion and overlaps a second communication passage opening in a biasing direction of the first spring. Therefore, when inserting the first spring into the first communication passage, it is possible to hold the first spring with the inner circumferential surface of the second inner circumferential portion. Consequently, the first spring is appropriately mounted in the second circumferential portion, thereby preventing a mounting defect of the first spring.

The invention relates to a substrate holder device at least including at least one control valve and at least one substrate holder with a substrate holder surface and a substrate holder rear side. Furthermore, the invention relates to bonding device and a method for bonding.

An apparatus for handling fluid within an at least partially electrically driven vehicle, with a valve device including a valve housing. The valve housing includes at least three two radially arranged port openings and at least one axially arranged port opening for the inflow and/or outflow of fluid, and a valve body which is arranged inside the valve housing and is configured to be rotatable about an axial axis of rotation R. The valve body includes a first connecting channel of arcuate shape for connecting two radially arranged port openings and a second connecting channel of arcuate shape for connecting a radially arranged port opening with an axially arranged port opening. The at least two radially arranged port openings define a base plane B, which is configured orthogonally to the axial axis of rotation R, and the first arcuate connecting channel defines a first connecting channel plane V.

A control valve 8 according to the present disclosure includes a casing 21 in which an outlet for a liquid is formed and the liquid is accommodated, a rotor 22 rotatably accommodated in the casing 21 and having a communication port communicating with the outlet, and a sliding ring 131 having a sliding surface 141a sliding on an outer surface of the rotor in a state of being disposed inside the outlet and causing the outlet and the communication port to communicate with each other according to a rotation position of the rotor 22, in which a liquid holding portion for holding the liquid between the sliding surface 141a and the liquid holding portion is provided on the outer surface of the rotor 22, and the liquid holding portion has a recessed portion for accommodating the liquid.

A multi-port valve assembly, which includes a housing, a plurality of ports formed as part of the housing, a rotor disposed in the housing, and is selectively in fluid communication with the plurality of ports. Also included is a plurality of channels integrally formed as part of the rotor, a central plane extending through the rotor, a first level on one side of the central plane where a portion of the channels is located on the first level, and a second level on the opposite side of the central plane in relation to the first level, where a portion of the channels are located on the second level. At least two flow paths are formed by the orientation of the rotor relative to the housing and the ports, and the rotor is placed in one of a plurality of configurations to achieve the at least two flow paths.

The present disclosure provides a multi-passage valve including a housing, a valve element, and a sealing element. The valve element is rotatably disposed inside the housing around an axis, and has at least two regions on an outer side thereof. The regions are arranged in a direction of rotation of the valve element, and each extends in an axial direction of the valve element and has a plurality of connecting passages. The sealing element extends by a distance around the valve element, keeps in contact with an outer surface of the valve element, and is provided with a plurality of openings which communicate with the outside. One of the regions is capable of being covered by the sealing element by rotating the valve element to form an operating region, each of the connecting passages in the operating region being capable of connecting at least two of the openings.

A fluid transfer guiding/controlling device and an application system thereof. The guiding/controlling device is composed of a power transfer/distribution unit and a switch member. The power transfer/distribution unit has a first chamber and a second chamber. At least one bypass flow ways are disposed in the first chamber. Stop sections are disposed in the second chamber. Communication notches are disposed in adjacency to the stop sections in communication with an outer side. The switch member having an internal flow guide passage and a first flow guide window and a second flow guide window is disposed in the first and second chambers. The first flow guide window is switchable between the bypass flow ways. The second flow guide window is moved from the stop section to pass through a corresponding communication notch, whereby part of the fluid in the flow guide passage flows through the communication notch.

A fluid transfer guiding/controlling device and an application system thereof. The guiding/controlling device is composed of a power transfer/distribution unit and a switch member. The power transfer/distribution unit has a first chamber and a second chamber. At least one bypass flow ways are disposed in the first chamber. Stop sections are disposed in the second chamber. Communication notches are disposed in adjacency to the stop sections in communication with an outer side. The switch member having an internal flow guide passage and a first flow guide window and a second flow guide window is disposed in the first and second chambers. The first flow guide window is switchable between the bypass flow ways. The second flow guide window is moved from the stop section to pass through a corresponding communication notch, whereby part of the fluid in the flow guide passage flows through the communication notch.

A refrigerant pipe unit includes: a first plate; a second plate stacked on the first plate; and a control valve. One or both of the first plate and the second plate include a refrigerant flow path. The control valve includes: a valve body that includes a refrigerant passage communicating with the refrigerant flow path, rotates in the first plate, and changes a flow of a refrigerant in the refrigerant flow path with an amount of rotation of the valve body; and a driver that adjusts the amount of the rotation of the valve body.