Method for actuating a valve unit, which has a process pressure inlet, a process pressure outlet and a valve chamber connecting the process pressure inlet to the process pressure outlet and a movable piston for closing and opening the connection between the process pressure inlet and the process pressure outlet. The piston is able to be subjected on a first side to a first control pressure and the piston is able to be subjected on a second side to a second control pressure. The piston is moved by means of the first control pressure and the second control pressure for the purpose of closing and opening the connection. In the operating state of the valve unit, the piston is permanently subjected to the first control pressure, wherein the piston is additionally subjected to the second control pressure for moving the piston in one direction and wherein a pressure which is higher than atmospheric pressure and lower than the second control pressure is used as the first control pressure.

The present disclosure provides a valve apparatus that prevents defects in the valve apparatus and prevents damage to the heat insulating material due to a cryogenic liquid fluid, and a semiconductor processing device including the same and a manufacturing method thereof.

In a valve (10) having a pneumatic or hydraulic drive unit (20), the drive unit (20) includes a cylinder (22), a piston (24), a spindle unit (26) mounted for axial movement in the cylinder (22), and a housing cover (28), the piston (24) dividing the interior of the cylinder (22) into a cover-side space (42) and a valve seat-side space (40), and a duct (66) within the spindle unit (26) leading to the valve seat-side space (40). Formed in the housing cover (28) are a fluid intake (44) and a fluid exit (46) as well as a pressure fluid duct (48) in fluid communication with the fluid intake (44) and an outlet duct (50) in fluid communication with the fluid exit (46). The pressure fluid duct (48) branches into two partial ducts (54, 56), a first partial duct (54) extending through the spindle unit (26) into the valve seat-side space (40) and opening out there, and a second partial duct (56) opening out into the cover-side space (42), and a closure body (68) being provided which seals either the first partial duct (54) or the second partial duct (56) in a fluid-tight manner. Furthermore, a modular system (70) and a method for manufacturing valves (10) are indicated.

A pressure-maintaining valve for a reversible connection to an air line, having a basic body with an inlet opening, an outlet opening for accommodating the air line, and a fluid chamber which connects the inlet opening to the outlet opening in a fluid-communicating manner. A piston which is mounted movably between a sealing position, an equalizing position and a release position is arranged in the inlet opening, and the piston has an annular groove with a piston sealing surface and a piston release surface. In the sealing position, a sealant is arranged in a sealing manner between the piston sealing surface and a basic body sealing surface. In the equalizing position an equalizing line arranged in the sealing piston bypasses the sealant in a fluid-communicating manner. In the release position, the piston release surface lifts off the sealant from the basic body sealing surface.

A pressure regulator for a hydrogen storage system, wherein the pressure regulator is adapted to operate at temperatures below −50° C., while minimizing the need for separate sealing elements and O-rings. The pressure regulator includes a main body including an inner cavity bounded by an interior wall, a piston disposed in the inner cavity, the piston including a first channel disposed adjacent a first portion, wherein the first portion is adapted to cooperate with the interior wall to form a seal between the piston and the interior wall, a first biasing device disposed in the first channel, wherein the first biasing device is adapted to exert a force on the first portion of the piston to form a seal between the first portion and the interior wall, and an end cap coupled to the main body thereby enclosing the piston to form an outlet pressure chamber.

A fluid pressure regulating unit, comprises a fluid inlet port, a fluid outlet port, a valve comprising a movable valve part, wherein the movable part comprises at least one fluid pressure balancing means and wherein the at least one pressure balancing means comprises a tapered surface, and a main valve biasing means. The main valve biasing means biases said valve in the direction of an open position. An auxiliary valve biasing means is provided, biasing the valve in the direction of a closed position. Wherein essentially every surface part, being in fluid connection to the fluid inlet port and having a surface normal at least partially in parallel to the moving direction of the moving part of the valve, is balance by a balancing surface part.

In a valve housing modular system, different configurations for a globe valve arranged to adjust a process fluid flow are provided. The globe valve can have a globe valve member movable in translation along a stroke axis. The system can include a housing corpus with a process fluid inlet and outlet, a process fluid passage arranged therebetween, and an actuating opening to introduce the rod for actuating the globe valve member along the stroke axis; and a housing cover for covering the actuating opening. The system can include different adapters for the different functional/structural configurations.

A flow control device includes a housing with an inlet and an outlet and a flow conduit disposed in the housing. The inlet, the flow conduit, and the outlet define a flow passage. A valve seat is disposed in the housing downstream of the inlet, and a shuttle is movably disposed in the housing and displaceable between a closed position engaging the valve seat to close the flow passage and an open position spaced from the valve seat to open the flow passage. A sealed chamber is defined between the housing and the flow conduit. A port coupled with a source of pressurized fluid communicates with the sealed chamber, where the shuttle is displaceable between the closed position and the open position based on a pressure in the sealed chamber. The threshold water pressure for displacing the flow conduit may be adjustable by modifying the pressure in the sealed chamber.

A valve for controlling at least one first flow of at least one fluid, in particular, within a motor vehicle, along a first fluid path from at least one valve inlet to at least one valve outlet, comprising at least one valve seat that is arranged—with regard to the fluid flow—between the valve inlet and the valve outlet, wherein the valve seat can be closed at least in some regions in at least one closed position by means of at least one valve member.

A valve member driving device capable of bidirectional movement includes: a main body with two gas chambers, a first gas-inlet opening, a first gas-inlet channel, a second gas-inlet opening, and a second gas-inlet channel; a first piston rod with a first flow passage; a second piston rod with a second flow passage; a first guide rod extending into the first flow passage at one end and having a gas socket and a gas hole in communication with the gas socket; a second guide rod extending into the second flow passage at one end and having a gas-guiding flow passage; a valve cylinder fixedly provided on the first piston rod and having a valve-cylinder gas chamber, an advance channel, a withdrawal channel, and a valve-cylinder piston rod; and a valve member fixedly provided on the valve-cylinder piston rod.