A dense fluid recovery and supply pressure sensing system includes a dense fluid source, recovery tank and working tank, where the recovery tank is in connection with the dense fluid source with an input pipe configured with a pre-pressure valve and pre-pressure compressor, and the bottom of the recovery tank is configured with a weight measuring device measuring the weight of the recovery tank and in electric connection with the pre-pressure compressor, allowing the pre-pressure compressor to control the go and stop of the compression according to a value measured by the weight measuring device; the working tank is in connection with the recovery tank through a delivery pipe configured with a pressure building compressor and configured with a recovery pipe, another end of the recovery pipe is in connection with the input pipe of the recovery tank, and the recovery pipe is configured with a recovery valve.

The invention relates to a transport container for helium, comprising an inner container for receiving the helium, an insulation element that is provided on the exterior of the inner container, a coolant container for receiving a cryogenic liquid, an outer container in which the inner container and the coolant container are received, and a thermal shield which can be actively cooled with the aid of the cryogenic liquid and in which the inner container is received, wherein a peripheral gap is provided between the insulation element and the thermal shield, and said insulation element comprises an electrodeposited copper layer that faces the thermal shield.

A dense fluid recovery and supply pressure sensing system includes a dense fluid source, recovery tank and working tank, where the recovery tank is in connection with the dense fluid source with an input pipe configured with a pre-pressure valve and pre-pressure compressor, and the bottom of the recovery tank is configured with a weight measuring device measuring the weight of the recovery tank and in electric connection with the pre-pressure compressor, allowing the pre-pressure compressor to control the go and stop of the compression according to a value measured by the weight measuring device; the working tank is in connection with the recovery tank through a delivery pipe configured with a pressure building compressor and configured with a recovery pipe, another end of the recovery pipe is in connection with the input pipe of the recovery tank, and the recovery pipe is configured with a recovery valve.

A system and method is disclosed for storing a fluid in a storage vessel in liquefied form and delivering it in gaseous form to an end user through a supply line. The system comprises a pressure relief circuit for returning the fluid from the supply line to the vessel when predetermined conditions are met. The pressure relief circuit comprises a return line connected to the supply line and the storage vessel, a diversion line to divert the fluid elsewhere and a switching device operable to direct the fluid to either one of the lines, as a function of predetermined conditions.

A method of distributing an electrically insulating liquefied gas mixture to high-voltage electrical equipment from a storage means containing an insulating gas mixture, including: heating the insulating gas mixture to a temperature such that the contents of the storage means are a homogeneous fluid; and withdrawing the insulating mixture resulting from step a) to fill high-voltage electrical equipment by raising the temperature of the mixture resulting from step a), wherein, during step b), a set value for regulation is applied at variable pressure, calculated in real time based on weighing the storage means, when the change in the set value of pressure is less than 0.2 bar per 1 kg/m.sup.3 of change in density, and then a set value for regulation is applied at constant temperature until the storage means is emptied of its content.

A method for dispensing liquefied fuel, the method including: providing a non-petroleum fuel as a liquefied fuel to a storage tank; increasing pressure of the liquefied fuel to a target pressure using a pump disposed within the storage tank, where a first portion of the liquefied fuel is bypassed around or at least partially around a heat exchanger, and a second portion of the liquefied fuel is discharged to the heat exchanger, where the heat exchanger is configured to warm the second portion of the liquefied fuel. A dispenser is provided that incorporates a control system that allows coordinated fueling of one or more vehicles simultaneously, where the heat exchanger uses only the fuel itself without external refrigeration to manage final dispensing temperature and the fueling station does not include a storage subsystem disposed between the pump and the dispenser.

A supply control system for a tank utilized in a semiconductor manufacturing process is disclosed. The supply control system for the tank according to an embodiment of the present disclosure includes a plurality of tanks for storing a large amount of process material used to manufacture a semiconductor; a main-supply pipe configured to communicate with sub-supply pipes respectively coupled to the plurality of tanks and to supply process material to a semiconductor manufacturing device; a plurality of flow control devices respectively included in the sub-supply pipes and configured to control a process material flow rate discharged from each of the plurality of tanks; a sensor included in the main-supply pipe and configured to measure in real time the process material flow rate and a process material supply pressure supplied from each of the plurality of tanks to the semiconductor manufacturing device; a back-up portion coupled to the main-supply pipe and configured to supplementally discharge stored process material, such that process material is stably supplied to the semiconductor manufacturing device; and a controller configured to control the plurality of flow control devices and the back-up portion based on information on the process material flow rate or information on the process material supply pressure measured by the sensor, such that a set process material flow rate is supplied to the semiconductor manufacturing device through the main-supply pipe.

A fluid bypass method for controlling the temperature of a non-petroleum fuel, the fluid bypass method includes: providing a fuel at a pressure sufficient to effect a desired flow rate to a vehicle, the fuel being at a liquid or substantially supercritical thermodynamic state requiring further heat addition in a vaporizer; and diverting a bypass stream with partial or no vaporization to a heat exchanger as a cold fluid on a cold side of the heat exchanger. The method further includes providing a remainder stream of the fuel to the vaporizer; mixing the remainder stream outflowed from the vaporizer with the cold fluid outflowed from the cold side of the heat exchanger to form a combined fuel stream; and providing the combined fuel stream to the heat exchanger as a warm fluid on a warm side of the heat exchanger.

The invention relates to a transport container (1) for helium (He), comprising an inner container (6) for receiving the helium (He); a coolant container (14) for receiving a cryogenic fluid (N2); an outer container (2) in which the inner container (6) and the coolant container (14) are received; a thermal shield (21) in which the inner container (6) is received and which can be actively cooled using the cryogenic fluid (N2), said thermal shield (21) having at least one cooling line (26) which is fluidically connected to the coolant container (14) and in which the cryogenic fluid (N2) can be received in order to actively cool the thermal shield (21); and at least one return line (34, 35), by means of which the at least one cooling line (26) is fluidically connected to the coolant container (14) in order to return the cryogenic fluid (N2) back to the coolant container (14).

The present invention relates to a fluid supply apparatus, that is, a fluid supply apparatus configured to supply a fluid having a predetermined temperature to a chamber. The fluid supply apparatus according to the present invention includes a supply line through which a fluid to be supplied to a chamber flows, at least one bypass line which branches off from a first branch portion of the supply line and connected to a second branch portion of the supply line, and a heater configured to heat the fluid flowing through the bypass line.