System comprising a clean room (50), a transport element (10) movable inside the clean room (50), and a drive element (30) of the transport element (10), which is arranged outside the clean room (50), wherein the transport element (10) is not connected to the drive element (30) and is only coupled to the drive element (30) or driven by the drive element (30) via contactless remote forces, wherein the transport element (10) is a separate element, in particular separate from the floor, ceiling, walls and/or other parts of the clean room (50), and in particular has no positive connection acting in any spatial direction to the floor, ceiling, walls and/or other parts of the clean room (50) and/or other elements. The invention also relates to a corresponding transport element (10).

A substrate treating method for treating substrates with a substrate treating apparatus having an indexer section, a treating section and an interface section includes performing resist film forming treatment in parallel on a plurality of stories provided in the treating section and performing developing treatment in parallel on a plurality of stories provided in the treating section.

The present invention provides a facility capable of efficiently performing work while maintaining the cleanliness of a location where an article is manufactured, when manufacturing of the article and other work are performed in parallel concurrently; and an implementation method for manufacturing an article by using the facility. The facility comprises a clean room 1, multiple work booths 2 provided inside the clean room 1 and each comprising an entrance and exit, and barrier sections provided along entrances and exits of the multiple work booth 2 and configured to prevent airflow from the outside to the inside through the entrances and exits. The area inside each of the multiple work booths 2 has the same grade of cleanliness as the area that is outside the multiple work booths 2 but is inside the clean room 1.

The present invention provides a facility capable of efficiently performing work while maintaining the cleanliness of a location where an article is manufactured, when manufacturing of the article and other work are performed in parallel concurrently; and an implementation method for manufacturing an article by using the facility. The facility comprises a clean room 1, multiple work booths 2 provided inside the clean room 1 and each comprising an entrance and exit, and barrier sections provided along entrances and exits of the multiple work booth 2 and configured to prevent airflow from the outside to the inside through the entrances and exits. The area inside each of the multiple work booths 2 has the same grade of cleanliness as the area that is outside the multiple work booths 2 but is inside the clean room 1.

A customizable facility for manufacturing at least one product has at least one modular unit in communication with at least one central unit configured to provide utilities to the at least one modular unit. In some embodiments, the central unit(s) and modular unit(s) are positioned at least partially within a shell. Each modular unit can be a fermentation unit, a pre-viral unit, a post-viral unit, a utility space, a warehouse, a media buffer facility, an office, a personnel unit, or another unit. The modular units can be arranged to maximize a number of modular units within the shell while minimizing a footprint of the shell. A method of assembling a facility for manufacturing at least one product includes providing at least one central unit and providing at least one modular unit in communication with the central unit(s) such that utilities are provided by the central unit(s) to the modular unit(s).

A customizable facility for manufacturing at least one product has at least one modular unit in communication with at least one central unit configured to provide utilities to the at least one modular unit. In some embodiments, the central unit(s) and modular unit(s) are positioned at least partially within a shell. Each modular unit can be a fermentation unit, a pre-viral unit, a post-viral unit, a utility space, a warehouse, a media buffer facility, an office, a personnel unit, or another unit. The modular units can be arranged to maximize a number of modular units within the shell while minimizing a footprint of the shell. A method of assembling a facility for manufacturing at least one product includes providing at least one central unit and providing at least one modular unit in communication with the central unit(s) such that utilities are provided by the central unit(s) to the modular unit(s).

A semiconductor fabrication building is provided. The semiconductor fabrication building includes an ambient control surrounding and a makeup air handling unit configured to supply clean air to the ambient control surrounding. The makeup air handling unit includes a housing having an air inlet and an air outlet. The makeup air handling unit also includes a first filtration module positioned in the housing. The first filtration module includes a number of hollow fibers configured to guide air to flow from the air inlet to the air outlet. A porous layer is formed at an inner wall of each of the hollow fibers to filter airborne molecular contamination (AMC) having a selected size.

The invention is an apparatus having a protective envelope which is designed and constructed to envelope at least one room region, such that the protective envelope is able to separate the at least one room region from an environment immediately surrounding the protective envelope, and use thereof. Methods for operating a production engineering unit under cleanroom conditions and for creating and operating a virus-free and cross-contamination free room region surrounded by a protective envelope for accommodating persons and/or objects subject to quarantine. The invention has a protective envelope with at least two layers separated by a spacer layer, that is flow-permeable.

The invention is an apparatus having a protective envelope which is designed and constructed to envelope at least one room region, such that the protective envelope is able to separate the at least one room region from an environment immediately surrounding the protective envelope, and use thereof. Methods for operating a production engineering unit under cleanroom conditions and for creating and operating a virus-free and cross-contamination free room region surrounded by a protective envelope for accommodating persons and/or objects subject to quarantine. The invention has a protective envelope with at least two layers separated by a spacer layer, that is flow-permeable.

A total logging system configured to promptly and properly identify the cause of trouble and confirm countermeasures by comprehensively recording and accumulating an operator, a state of operations, and a work environment and tracing a series of operations together with recorded videos. The system includes: an image capturing device (ICD) configured to capture images of the state of operations; an information exchanging device (IED) configured to communicate information between a tag and a reader; several types of sensors configured to monitor the internal environment of a sterile working device and the operating state of an inward/outward conveying mechanism and other mechanisms; and an information recording and accumulating device (IRAD). The IRAD the operator according to information received from the IED and records details of operations performed by the operator using machines, appliances, treatment object articles and other items. The IRAD additionally records information regarding any or no change in the internal environment of the sterile working device and the operating state of the inward/outward conveying mechanism and other mechanisms according to information received from the sensors. The recorded information is provided with an index by corresponding to a video in chronological order to be recorded and accumulated.