An energy efficient and quiet air cooling system for a building structure is provided. The air cooling system includes an evaporator system mounted in the wall of the building, a remotely mounted fan, an air intake, and a sound and heat insulating duct. The fan is mounted in the attic and configured to draw air from the living area of the building through the sound insulating duct with sufficient power to create a negative static pressure in the living area. The negative static pressure in turn causes outside air to flow through the evaporator system which removes heat from the outside air. The cooled air is in turn drawn into the building and pulled into the attic through the duct and expelled through the attic. The fan expels warm air into the attic, creating a positive pressure environment which causes the warm air to be expelled from the attic through natural vents.

To provide a transfer chamber capable of replacing a chemical filter without affecting an internal atmosphere, and shortening or eliminating stop time of a transfer process of a wafer (W) associated with replacement of the chemical filter. The transfer chamber transfers the wafer (W) to or from a processing device (6) by using a transfer robot (2) provided thereinside, and includes a circulation path (CL1) formed inside of a transfer chamber (1) to circulate gas, a chemical filter unit (7) provided in the midstream of the circulation path (CL1), and a connecting and disconnecting means (8) which switches connection and disconnection of the chemical filter unit (7) to and from the circulation path (CL1).

To provide a transfer chamber capable of replacing a chemical filter without affecting an internal atmosphere, and shortening or eliminating stop time of a transfer process of a wafer (W) associated with replacement of the chemical filter.

The transfer chamber transfers the wafer (W) to or from a processing device (6) by using a transfer robot (2) provided thereinside, and includes a circulation path (CL1) formed inside of a transfer chamber (1) to circulate gas, a chemical filter unit (7) provided in the midstream of the circulation path (CL1), and a connecting and disconnecting means (8) which switches connection and disconnection of the chemical filter unit (7) to and from the circulation path (CL1).

A portable variable volume paint spray enclosure or booth includes a frame assembled from longitudinal members and detachable clamps. The clamps secure together adjacent ends of the longitudinal members. The paint spray enclosure further includes a flexible cover disposed upon the frame such that a relatively air tight enclosure having a predetermined configuration is formed. The assembled frame and flexible cover extend from grade level to a predetermined elevation to encase an object to be painted. The paint spray enclosure also includes an air flow input apparatus for allowing air flow into the enclosure, and an air extraction apparatus/air scrubber for removing air from the enclosure, such that air mixed with vaporized paint inside the enclosure is removed from the enclosure before the paint vapor and air combine to form an explosive mixture, thereby preventing an explosion and/or fire from occurring inside the enclosure, and preventing operators from being exposed to harmful fumes. The air scrubber removes the paint vapor from the air as the combination exits the enclosure, thereby allowing only “clean” air back into the atmosphere.

A portable variable volume paint spray enclosure or booth includes a frame assembled from longitudinal members and detachable clamps. The clamps secure together adjacent ends of the longitudinal members. The paint spray enclosure further includes a flexible cover disposed upon the frame such that a relatively air tight enclosure having a predetermined configuration is formed. The assembled frame and flexible cover extend from grade level to a predetermined elevation to encase an object to be painted. The paint spray enclosure also includes an air flow input apparatus for allowing air flow into the enclosure, and an air extraction apparatus/air scrubber for removing air from the enclosure, such that air mixed with vaporized paint inside the enclosure is removed from the enclosure before the paint vapor and air combine to form an explosive mixture, thereby preventing an explosion and/or fire from occurring inside the enclosure, and preventing operators from being exposed to harmful fumes. The air scrubber removes the paint vapor from the air as the combination exits the enclosure, thereby allowing only “clean” air back into the atmosphere.

To provide a transfer chamber capable of replacing a chemical filter without affecting an internal atmosphere, and shortening or eliminating stop time of a transfer process of a wafer (W) associated with replacement of the chemical filter. The transfer chamber transfers the wafer (W) to or from a processing device (6) by using a transfer robot (2) provided thereinside, and includes a circulation path (CL1) formed inside of a transfer chamber (1) to circulate gas, a chemical filter unit (7) provided in the midstream of the circulation path (CL1), and a connecting and disconnecting means (8) which switches connection and disconnection of the chemical filter unit (7) to and from the circulation path (CL1).

A nozzle assembly for a fan unit includes an inner nozzle having a tapered outer diameter and a flow path radially inward from the tapered outer diameter with respect to a longitudinal axis of the nozzle assembly. The flow path is configured to guide a fluid flow and to expel the fluid flow through an inner outlet of the inner nozzle to a surrounding environment. The nozzle assembly also includes an outer nozzle disposed radially outward from the inner nozzle with respect to the longitudinal axis. The outer nozzle and the tapered outer diameter of the inner nozzle define an annular flow path therebetween. The annular flow path is configured to guide the fluid flow and to expel the fluid flow to the surrounding environment through an outer outlet of the outer nozzle. A cross-sectional area of the outer outlet is adjustable via movement of the inner nozzle, the outer nozzle, or both along the longitudinal axis of the nozzle assembly.

An air moving device includes a housing member, an impeller assembly, and a nozzle assembly. The nozzle assembly can include one or more angled vanes set an angle with respect to a central axis of the air moving device. The air moving device can output a column of moving air having an oblong and/or rectangular cross-section. A dispersion pattern of the column of moving air upon the floor of an enclosure in which the air moving device is installed can have an oblong and/or rectangular shape. The dimensions of the dispersion pattern may be varied by moving the air moving device toward or away from the floor, and/or by changing the angles of the stator vanes within the nozzle assembly.

A multi-compartment negative air filtration system and a method of operating a multi-compartment negative air filtration system are provided. The multi-compartment negative air filtration system includes a housing including a first compartment and a second compartment. The first compartment and the second compartment separated by at least one panel member. Each of the first compartment and the second compartment including an inlet, an outlet, a pre-filter disposed downstream of the inlet, a HEPA filter disposed downstream of the pre-filter, an a fan assembly disposed downstream of the HEPA filter, the fan assembly in airflow communication with the pre-filter and the HEPA filter, the fan assembly generating a negative pressure across the pre-filter and the HEPA filter.

An air blowing device includes a housing, a partition plate, an air blower, dampers, and a controller. The housing has a first side surface and a second side surface. The first side surface has inlet A and outlet A. The second side surface has inlet B and outlet B. The partition plate divides the hollow space of the housing into an upstream section and a downstream section. The upstream and downstream sections communicate with each other. The air blower conveys air from the upstream section to the downstream section. The dampers open and close the openings of inlets A and B, and outlets A and B. The controller controls air blowing of the air blower and opening and closing of each damper. Inlets A and B are disposed in the upstream section. Outlets A and B are disposed in the downstream section.