A microelectromechanical actuator structure including a microelectromechanical chip having a chip frame and a drive structure. The drive structure includes a first drive unit and a second drive unit. The first drive unit includes a first substrate and a first electrode structure. The first substrate has a first doping. The first electrode structure has a doping inverse to the first doping. The second drive unit includes a second substrate having a second doping and a second electrode structure having a doping inverse to the second doping. A pn junction is therefore formed between the substrates and the second electrode structures. The first electrode structure includes at least two first electrodes. The second electrode structure includes at least one second electrode. The first electrodes are arranged flat next to one another in a first electrode plane. The second electrode is arranged flat in a second electrode plane.

The present invention generally relates to systems and methods for the control of fluids and, in some cases, to systems and methods for flowing a fluid into and/or out of other fluids. As examples, fluid may be injected into a droplet contained within a fluidic channel, or a fluid may be injected into a fluidic channel to create a droplet. In some embodiments, electrodes may be used to apply an electric field to one or more fluidic channels, e.g., proximate an intersection of at least two fluidic channels. For instance, a first fluid may be urged into and/or out of a second fluid, facilitated by the electric field. The electric field, in some cases, may disrupt an interface between a first fluid and at least one other fluid. Properties such as the volume, flow rate, etc. of a first fluid being urged into and/or out of a second fluid can be controlled by controlling various properties of the fluid and/or a fluidic droplet, for example curvature of the fluidic droplet, and/or controlling the applied electric field.

An ER fluid valve includes a housing and a plurality of parallel flow passages through the housing each defined by spaced electrodes at least one of which is controllable independently of other flow passages electrodes. A controller is configured to selectively establish electrical fields for all of the independently controllable electrodes to close all of the flow passages to ER fluid flowing through the housing. By removing the fields from all of the independently controllable electrodes, all the flow passages are open to the ER fluid flowing through the housing. By establishing fields for select independently controllable electrodes to close their associated flow passages and by leaving other flow passages open, restricted flow of the ER fluid through the housing is accomplished to vary the flow rate through the housing.

A microfluidic valve may include a first portion of a liquid conduit to contain a fluid, a second portion of the liquid conduit to contain a liquid and a constriction between the first portion and the second portion and across which a capillary meniscus is to form between the fluid and liquid, the constriction comprising an edge along a ceiling of the constriction.

A substantially leak-free, sealable microvalve that can be repeatedly opened and sealed is presented. The resealable microvalve includes a block with a through via and a sealing plate. The gap between the block and the sealing plate is sealed by a sealing material. The sealing material can be melted when heat is applied and can be solidified when heat is absent. To close the resealable microvalve, heat is applied by flowing a current through a resistive heater and an actuator brings the block and the sealing plate into a contacting position. By removing the heat, the sealing material is solidified and creates a sealed state. To open the resealable microvalve, heat is applied to the sealing material. When the sealing material melts, the actuator moves the block and the sealing plate into a spaced apart position.

A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.

Modular microvalves for microfluidic devices and methods of using the same are disclosed. Further, a microfluidic system is provided that may include the presently disclosed modular microvalves installed in a microfluidic device. Further, the microfluidic system may include valve actuators in relation to the presently disclosed modular microvalves. Further, the presently disclosed modular microvalves may be manufactured separately and independently of the manufacturing process of any microfluidic device and/or system. Non-limiting examples of the presently-disclosed modular microvalves may include but are not limited to, modular pinch valves, modular rocker valves, modular slider valves, modular rotary valves, and the like.

Valve element for controlling flow of fluid, including: a first movable electrode portion including a fluid introduction port through which the fluid flows; a second movable electrode portion including a discharge port through which the fluid is discharged, the second movable electrode portion being disposed to cover the fluid introduction port, with an interval between the second movable electrode portion and the first movable electrode portion; a spacer portion configured to secure the interval between the first movable electrode portion and the second movable electrode portion; and a frame portion configured to form a back chamber that communicates with the fluid introduction port and configured to support the first movable electrode portion, wherein the first movable electrode portion and the second movable electrode portion can be drawn together by an electrostatic attractive force generated by applying a voltage to the first and second movable electrode, sealing the fluid introduction port.