Self-healing microvalves are described herein. The self-healing microvalve can move from a first position to a second position using an electrical input and use a soft hydraulic assembly to return from the second position to the first position. The electrical input can create an electrostatic attraction, causing the compression of the soft hydraulic assembly and movement of the valve gate to seal the microvalve. The elasticity of the soft hydraulic assembly can then return the self-healing microvalve to the original state, once the electrical input is removed.

The present invention provides microfluidic devices and methods for using the same. In particular, microfluidic devices of the present invention are useful in conducting a variety of assays and high throughput screening. Microfluidic devices of the present invention include elastomeric components and comprise a main flow channel; a plurality of branch flow channels; a plurality of control channels; and a plurality of valves. Preferably, each of the valves comprises one of the control channels and an elastomeric segment that is deflectable into or retractable from the main or branch flow channel upon which the valve operates in response to an actuation force applied to the control channel.

Disclosed are techniques such as roll to roll processing to produce membrane valves in microelectromechanical systems that are integrated with micro-pumps that include a pump body having compartmentalized pump chambers. One application of this technology is as a valve assembly for a gas concentrator that includes a first micro pump for feeding an input gas stream, a second micro pump to supplying a vacuum and at least one sieve bed having a zeolite. The gas concentrator uses the valve assembly for controlling entry of gas from the first micro pump into the sieve bed and the second micro pump to vent.

An ER fluid valve includes a housing and a plurality of parallel flow passages through the housing each defined by spaced electrodes at least one of which is controllable independently of other flow passages electrodes. A controller is configured to selectively establish electrical fields for all of the independently controllable electrodes to close all of the flow passages to ER fluid flowing through the housing. By removing the fields from all of the independently controllable electrodes, all the flow passages are open to the ER fluid flowing through the housing. By establishing fields for select independently controllable electrodes to close their associated flow passages and by leaving other flow passages open, restricted flow of the ER fluid through the housing is accomplished to vary the flow rate through the housing.

Valve element for controlling flow of fluid, including: a first movable electrode portion including a fluid introduction port through which the fluid flows; a second movable electrode portion including a discharge port through which the fluid is discharged, the second movable electrode portion being disposed to cover the fluid introduction port, with an interval between the second movable electrode portion and the first movable electrode portion; a spacer portion configured to secure the interval between the first movable electrode portion and the second movable electrode portion; and a frame portion configured to form a back chamber that communicates with the fluid introduction port and configured to support the first movable electrode portion, wherein the first movable electrode portion and the second movable electrode portion can be drawn together by an electrostatic attractive force generated by applying a voltage to the first and second movable electrode, sealing the fluid introduction port.

Pump systems having electrically conductive membranes are described. In embodiments of the invention, the electrically conductive membranes can be utilized as speakers to produce ultrasonic and audible sounds. The electrically conductive membranes are made from materials such as graphene, graphene oxide, and polymer films having a thin conductive coating.

A microfluidic device includes a three-dimensional slat structure having a plurality of interstices configured to generate a high power, high flow rate of fluids by electroosmotic flow. The microfluidic device includes a housing for holding and moving fluids through the slat structure, and a plurality of electrodes that generate an electric field within the plurality of interstices.

A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.

A microfluidic device includes a three-dimensional slat structure having a plurality of interstices configured to generate a high power, high flow rate of fluids by electroosmotic flow. The microfluidic device includes a housing for holding and moving fluids through the slat structure, and a plurality of electrodes that generate an electric field within the plurality of interstices.

A capsule is disclosed which includes a flexible outer shell capable of transforming into an asymmetric shape; an internal medium encapsulated by the outer shell, the medium including a plurality of magnetic particles, wherein the magnetic particles can move in response to an applied magnetic field. A valve system includes an in-line valve sized to fit within a flow channel including a capsule having a flexible outer shell containing an internal medium encapsulated by the outer shell, the medium including a plurality of magnetic particles; and a magnetic field source disposed about the exterior wall of the channel.