Various embodiments disclosed herein include a system and method for processing an exhaust gas. The system comprises a regenerative thermal oxidizer (RTO), a bypass flow module in parallel with the RTO, and a mixing module disposed downstream of the RTO; wherein the RTO is configured to oxidize a first part of the exhaust gas and produce a hot tail gas and deliver a predetermined amount of the hot tail gas outside of the RTO, and the mixing module is configured to receive the predetermined amount of the hot tail gas; and wherein the bypass flow module is configured to receive and bypass a second part of the exhaust gas around the RTO into the mixing module; and wherein the second part of the exhaust gas absorbs sufficient heat from the predetermined amount of the hot tail gas in the mixing module for oxidizing and decomposing an organic compound therein.

A fluid flow diverter is provided that includes a diverter body having four ports, a rotating plenum located within the diverter body, and a purge fluid assembly that supplies a purge fluid to the plenum. The plenum has two stop positions that each define a fluid flow path through the diverter. In the first fluid flow path, a first fluid stream goes between the first and second ports, and a second fluid stream goes between the fourth and third ports. In the second flow path, a first fluid stream goes between the first and third ports, and a second fluid stream goes between the fourth and second ports. The purge fluid supplied to the plenum creates a positive pressure fluid barrier that prevents or minimizes cross-contamination of the two fluid streams through the diverter. Also provided is a regenerative thermal oxidizer that includes such a fluid flow diverter.

A fluid flow diverter is provided that includes a diverter body having four ports, a rotating plenum located within the diverter body, and a purge fluid assembly that supplies a purge fluid to the plenum. The plenum has two stop positions that each define a fluid flow path through the diverter. In the first fluid flow path, a first fluid stream goes between the first and second ports, and a second fluid stream goes between the fourth and third ports. In the second flow path, a first fluid stream goes between the first and third ports, and a second fluid stream goes between the fourth and second ports. The purge fluid supplied to the plenum creates a positive pressure fluid barrier that prevents or minimizes cross-contamination of the two fluid streams through the diverter. Also provided is a regenerative thermal oxidizer that includes such a fluid flow diverter.

Methods and systems for oxidizing gas are provided. An example regenerative oxidizer is provided that includes a combustion chamber to heat gas present in the combustion chamber. The regenerative oxidizer also includes a first heat exchange media bed and a second heat exchange media bed, each in fluid communication with the combustion chamber. The regenerative oxidizer also includes a rotary valve disposed at least partially between the first heat exchange media bed and the second heat exchange media bed. The rotary valve may alternate the flow of gas between a first and a second airflow direction. The first heat exchange media bed, the rotary valve, and the second heat exchange media bed are arranged with respect to each other such that the gas pathway between the first heat exchange media bed and the rotary valve and between the second heat exchange media bed and the rotary valve is non-linear.

Methods and systems for oxidizing gas are provided. An example regenerative oxidizer is provided that includes a combustion chamber to heat gas present in the combustion chamber. The regenerative oxidizer also includes a first heat exchange media bed and a second heat exchange media bed. Each of the first heat exchange media bed and the second heat exchange media bed are in fluid communication with the combustion chamber. The regenerative oxidizer further includes two burners disposed within the combustion chamber to provide a total heat input to the gas present in the combustion chamber. At least one of the two burners is independently adjustable based on the airflow direction.

A heat exchange device effectively collects heat in a device, in which high temperature occurs, such as a scrubber. The heat exchange device includes a first heat exchange unit having a reactor positioned on the center thereof and having a first passage, which is arranged to enclose the reactor and discharges a first gas generated in the reactor, and a second passage, which is arranged adjacent to the first passage and introduces a second gas introduced from the outside. A second heat exchange unit is installed to enclose the first heat exchange unit and having a third passage, which is connected to the first passage and receives the first gas from the first passage to discharge the first gas to the outside, and a fourth passage, which is arranged adjacent to the third passage and introduces the second gas introduced from the outside into the second passage.

An electrically controlled valve which can be operated using a programable controller. A cooperating pair of the electrically controlled valves can be used in a Regenerative Thermal Oxidizer (RTO). The electrically controlled valve has two seats, and a blade which can move between a first position contacting the first seat and a second position contacting the second seat. The blade is moved by an actuator which is controlled by a variable frequency drive (VFD). A control computer continuously monitors the operation of both valves and halts operation of the system upon detecting a fault (error). The motion of the blade is programmed such that force of impact on the seat is reduced. Once the blade is seated, a brake is engaged which maintains the stationary position while utilizing relatively low power.

An apparatus and method for abating ozone and reducing sulfuric acid from an exhaust stream. In a semiconductor manufacturing plant the processing of wafers involves the cleaning and etching of wafers, the resultant processing may produce gasses which must be abated. The apparatus and method utilizes UV light in high doses to convert ozone (O.sub.3) to oxygen (O.sub.2). By ensuring laminar flow through the UV light chambers, the efficiency of the system is sufficient to allow for the remaining impurities in the exhaust air to be removed through the use of an RTO.

The disclosure concerns a system for the removal of particulate from a waste vapor stream from a hydrocarbon production process. The particulate can be removed from the waste vapor stream using a series of water streams and gravity separation.

The present device is a fluid bed regenerative thermal oxidizer configured to minimize dead spaces within it and eliminate the need for complex valve systems, which are typically required to move treated and untreated air across fixed beds. The present device can be a fluid bed regenerative thermal oxidizer comprising a vertical stack having a combustion chamber near its interior center and desorber shelves located within the vertical stack above the combustion chamber and adsorber shelves located within the vertical stack below the combustion shelves. Ceramic spheres can be used as heat sinks that flow from the desorber shelves, around the combustion chamber and onto the adsorber shelves and then back to the desorber shelves. In this way heat from the combustion can be captured by the heat exchange material on the desorber shelves and released to preheat untreated air on the adsorber shelves.