A large-size synthetic quartz glass substrate has a diagonal length of at least 1,000 mm. Provided that an effective range is defined on the substrate surface, and the effective range is partitioned into a plurality of evaluation regions such that the evaluation regions partly overlap each other, a flatness in each evaluation region is up to 3 μm. From the quartz glass substrate having a high flatness and a minimal local gradient within the substrate surface, a large-size photomask is prepared.

A parameter indicating a surface property of an object surface is plotted on the horizontal axis, a normal direction change rate of the shape of the object surface is plotted on the vertical axis, the minimum normal direction change rate visible to a person is associated with the parameter indicating the surface property of the object surface to create a visible area map, the relationship between the parameter indicating the surface property of a machining surface of a workpiece, and the maximum value of the normal direction change rate of the shape of the machining surface of the workpiece is displayed on the visible area map, and the object surface is evaluated.

A calibration standard for geometry measurement calibration of a measurement system operating by tactile and/or optical means is provided which includes a flat surface having a structure that is capturable by a measurement system operating by optical and/or tactile means. The structure has a changeable periodicity that is capturable by a sensor in a first direction and/or in a second direction and for a change in the periodicity to code position information and/or direction information. In addition, a method for calibrating a coordinate measuring machine operating by tactile and/or optical means and to a coordinate measuring machine for such a method or having such a calibration standard is provided.

A method of evaluating the quality of a surface on a component comprises the steps of (a) contacting a surface of a component with a media and imprinting qualities of the surface with the media; and (b) evaluating the imprint to determine the quality of the surface of the component.

A method of evaluating the quality of a surface on a component comprises the steps of (a) contacting a surface of a component with a media and imprinting qualities of the surface with the media; and (b) evaluating the imprint to determine the quality of the surface of the component.

A shape measurement device includes: a displacement detector configured to detect displacement of a contact; a relative movement mechanism configured to relatively move the displacement detector with respect to the measurement object, and allow the contact to trace a surface to be measured of the measurement object; a position detecting sensor configured to detect a relative position of the displacement detector with respect to the measurement object; a camera configured to image the contact, and output a captured image of the contact; and a synchronization controller configured to repetitively execute three actions in synchronization together while the relative movement is being performed by the relative movement mechanism, the actions including detection of the relative position by the position detecting sensor, detection of the displacement by the displacement detector, and imaging by the camera.

A flatness measurement unit is a flatness measurement unit to be placed on a shelf for measuring flatness relating to the degree of deviation from a state in which four predetermined points on the shelf are present on the same plane. The flatness measurement unit includes: a body frame; and four contact sections dispersedly disposed on the body frame and provided so as to be in contact with the respective four predetermined points on the shelf. The four contact sections include two first contact sections not located diagonally and two second contact sections other than the first contact sections. The center of gravity of the flatness measurement unit is positioned in an area containing the two first contact sections, among four areas defined by two diagonal lines each passing through the corresponding first contact section and the corresponding second contact section that are located diagonally.

A flatness measurement unit is a flatness measurement unit to be placed on a shelf for measuring flatness relating to the degree of deviation from a state in which four predetermined points on the shelf are present on the same plane. The flatness measurement unit includes: a body frame; and four contact sections dispersedly disposed on the body frame and provided so as to be in contact with the respective four predetermined points on the shelf. The four contact sections include two first contact sections not located diagonally and two second contact sections other than the first contact sections. The center of gravity of the flatness measurement unit is positioned in an area containing the two first contact sections, among four areas defined by two diagonal lines each passing through the corresponding first contact section and the corresponding second contact section that are located diagonally.

A deterioration diagnosis device according to the present invention, includes: a memory; and at least one processor coupled to the memory. The processor performs operations. The operations include: storing a history of a deterioration degree of a portion to be diagnosed in a structure; calculating a deterioration speed of the portion based on the history; selecting the portion satisfying a condition related to the deterioration degree and a condition related to the deterioration speed; and outputting information related to the selected portion.

A deterioration diagnosis device according to the present invention, includes: a memory; and at least one processor coupled to the memory. The processor performs operations. The operations include: storing a history of a deterioration degree of a portion to be diagnosed in a structure; calculating a deterioration speed of the portion based on the history; selecting the portion satisfying a condition related to the deterioration degree and a condition related to the deterioration speed; and outputting information related to the selected portion.