A digital measuring device implemented on a photonic integrated circuit, the digital measuring device including a laser source configured to provide light, a first ring resonator configured to produce a first frequency comb of light from the laser source, wherein at least a portion of the first frequency comb of light is directed at a moving object, a local oscillator configured to provide a reference beam, at least one waveguide structure configured to combine the reference beam with light reflected from the moving object to produce a measurement beam, a first multiplexer configured to split the measurement beam into a plurality of channels spaced in frequency, and a plurality of detectors configured to detect an intensity value of each channel of the plurality of channels to measure a distance between the digital measuring device and the moving object.

The invention refers to an optical device for heterodyne interferometry, comprising a chip, a beam splitter, a first waveguide arranged on the chip, light propagating in the first waveguide being guided to the beam splitter, a second waveguide arranged on the chip, light propagating in the second waveguide being guided to and/or from the beam splitter, wherein the beam splitter, the first waveguide, and the second waveguide form part of a Michelson interferometer, wherein the first waveguide and the second waveguide at least partially form two arms of the Michelson interferometer, and wherein two further arms of the Michelson interferometer are at least partially arranged outside the chip.

A homodyne encoder system has adaptive matching of path lengths. Primary apertures receive light from a target. An optical spreader spreads apart the light passing through the primary apertures by at least a factor of two times a baseline separation of the primary apertures. The optical spreader includes a plurality of actuators for modifying the path lengths within the homodyne encoder system through the primary apertures to a detector. A focusing optic focuses the light from the optical spreader at the detector. The detector detects an image of the target with the light from the focusing optic.

An optical system for lithography apparatus comprises a movable element and a functional element having a first and second portions. The optical element is designed as an optical element or as a reference structure. The first portion is fastened to the movable element by a joining mechanism along a fastening plane. The second portion comprises a functional surface. The functional element comprises a decoupling device for decoupling by deformation the first portion from the second portion. The decoupling device is formed by a narrowing of the functional element. The narrowing is located laterally outside a region of the functional surface. The functional surface is a measurement surface which is suitable for acquisition for the purposes of positioning and/or orientating the movable element.

Devices, systems, and methods perform operations that include the following: obtaining a reflectance-detection signal from a back-reflected-light detector, wherein the back-reflected-light detector is configured to detect back-reflected excitation light and generate the reflectance-detection signal based on the back-reflected excitation light; determining whether blood clearance has been achieved based on the reflectance-detection signal; and issuing a clearance indicator in response to determining that blood clearance has been achieved.

A Mach-Zehnder interferometer (MZI) filter comprising one or more passive compensation structures are described. The passive compensation structures yield MZI filters that are intrinsically tolerant to perturbations in waveguide dimensions and/or other ambient conditions. The use of n+1 waveguide widths can mitigate n different sources of perturbation to the filter. The use of at least three different waveguide widths for each Mach-Zehnder waveguide can alleviate sensitivity of filter performance to random width or temperature variations. A tolerance compensation portion is positioned between a first coupler section and a second coupler section, wherein the tolerance compensation portion includes a first compensation section having a second width, a second compensation section having a third width and a third compensation section having a fourth width, wherein the fourth width is greater than the third width and the third width is greater than the second width.

Exemplary systems, devices, methods, apparatus and computer-accessible media for providing and/or utilizing optical frequency domain imaging (OFDI) and fluorescence of structures and, e.g., multimodality imaging using OFDI techniques and fluorescence imaging techniques are described. For example, an arrangement can provide at least one electro-magnetic radiation to an anatomical structure. Such exemplary arrangement can include at least one optical core and at least one cladding at least partially surrounding the fiber(s). A region between the optical core(s) and the cladding(s) can have an index that is different from indexes of the optical core(s) and the cladding(s). The arrangement can also include at least one apparatus which is configured to transmit the radiation(s) via the optical core(s) and the cladding(s) to the anatomical structure.

In an optical device, a base and a movable unit are constituted by a semiconductor substrate including a first semiconductor layer, an insulating layer, and a second semiconductor layer in this order from one side in a predetermined direction. The base is constituted by the first semiconductor layer, the insulating layer, and the second semiconductor layer. The movable unit includes an arrangement portion that is constituted by the second semiconductor layer. The optical function unit is disposed on a surface of the arrangement portion on the one side. The first semiconductor layer that constitutes the base is thicker than the second semiconductor layer that constitutes the base. A surface of the base on the one side is located more to the one side than the optical function unit.

Methods and apparatus for processing a substrate are provided. For example, metrology apparatus configured for use with a substrate processing platform comprise an interferometer configured to obtain a first set of measurements at a first set of points along a surface of a substrate, a sensor configured to obtain a second set of measurements at a second set of points different from the first set of points along the surface of the substrate, an actuator configured to position the interferometer and the sensor at various positions along a measurement plane parallel to the surface of the substrate for obtaining the first set of measurements and the second set of measurements, and a substrate support comprising a substrate support surface for supporting the substrate beneath the measurement plane while obtaining the first set of measurements and the second set of measurements.

Examples of the disclosure relate to an apparatus (101), a wearable electronic device and an optical arrangement for optical coherence tomography. The apparatus comprises an optical coherence tomography system (103) and an optical arrangement (105). The optical arrangement comprises at least one means for beam shaping (109) configured to shape a beam of light from the optical coherence tomography system. The optical arrangement also comprises at least one minor (111) positioned so that light from the means for beam shaping is incident on the at least one minor. The at least one mirror is configured to move in at least one direction relative to the optical coherence tomography system.