A system and methods for OCD metrology are provided including receiving training data for training an OCD machine learning (ML) model, including multiple pairs of corresponding sets of scatterometric data and reference parameters. For each of the pairs, one or more corresponding outlier metrics are by calculated and corresponding outlier thresholds are applied whether a given pair is an outlier pair. The OCD MIL model is then trained with the training data less the outlier pairs.

A surface profiler comprises at least one front support wheel and at least one rear support wheel for travelling along the surface of a profile to be measured, the rotational axes of said wheels being longitudinally spaced and collinear. A frame carried on the support wheels carries at least one inclinometer, and may also carry a first optical encoder to measure distance travelled. A subframe carried on at least two subframe wheels is pivotally coupled to the frame between the support wheels using a parallelogram linkage. The subframe support wheels are collinear with each other and with the support wheels. A second optical encoder measures the angle between the frame and the subframe. Incremental measurements of inclination angle provided by the inclinometer and the angle between the frame and the subframe, produce a series of elevations representing the surface profile.

Systems, methods, and apparatus for acquiring surface profile information (e.g., depths at multiple points) from limited-access structures and objects using an autonomous or remotely operated flying platform (such as an unmanned aerial vehicle). The systems proposed herein use a profilometer to measure the profile of an area on a surface where visual inspection has indicated that the surface has a potential anomaly. After the system has gathered data representing the surface profile in the area containing the potential anomaly, a determination may be made whether the collected image data indicates that the structure or object should be repaired or may be used as is.

Disclosed are a device and a method for measuring a fretting displacement in a power cycling of a press-pack insulated gate bipolar transistor (IGBT). The IGBT includes: a bracket; slide bars slidably mounted on the bracket and are arranged at least four along a circumferential direction of the bracket; sensors respectively slidably installed on the bracket and the slide bars; and a power cycling experiment device arranged inside the bracket.

Disclosed are a device and a method for measuring a fretting displacement in a power cycling of a press-pack insulated gate bipolar transistor (IGBT). The IGBT includes: a bracket; slide bars slidably mounted on the bracket and are arranged at least four along a circumferential direction of the bracket; sensors respectively slidably installed on the bracket and the slide bars; and a power cycling experiment device arranged inside the bracket.

A background subtraction method and tilt stage device for eliminating contaminated or spurious interference patterns by reducing retrace errors. An optical reference surface secured in a pivoting mount coupled to a tilt actuator is configured to angularly displace the pivoting mount and optical reference surface. A microcontroller coupled to the tilt actuator controls the tilt displacement of the tilt actuator providing a plurality of wavefront measurements of the reference surface at a plurality of angles to provide a system and method for background measurement.

A background subtraction method and tilt stage device for eliminating contaminated or spurious interference patterns by reducing retrace errors. An optical reference surface secured in a pivoting mount coupled to a tilt actuator is configured to angularly displace the pivoting mount and optical reference surface. A microcontroller coupled to the tilt actuator controls the tilt displacement of the tilt actuator providing a plurality of wavefront measurements of the reference surface at a plurality of angles to provide a system and method for background measurement.

Described are systems and techniques directed to optical inspection of moving products (wafers, substrates, films, patterns) that are being transported to or from processing chambers in device manufacturing systems. Implementations include a system that has a first source of light to direct a first light to a first location on a surface of a product. The first light generates, at the first location, a first reflected light. The system further includes a first optical sensor to generate a first data representative of a first reflected light, and a processing device, in communication with the first optical sensor to determine, using the first data, a property of the product.

An image projection apparatus that can be attached to a vehicle and can be effectively utilized for acquisition of road surface condition information, detection of a hidden vehicle, and the like is provided. The image projection apparatus that projects an image includes: an acquisition unit that acquires information related to a vehicle; an image projection unit that projects an image based on the information acquired by the acquisition unit; and imaging means that acquires an image outside the vehicle, the image projection unit projects light in a wavelength band centered on a wavelength of 1.4 μm and the imaging means provides the information related to the vehicle by imaging an image projected based on the light in the wavelength band centered on the wavelength of 1.4 μm.

An image projection apparatus that can be attached to a vehicle and can be effectively utilized for acquisition of road surface condition information, detection of a hidden vehicle, and the like is provided. The image projection apparatus that projects an image includes: an acquisition unit that acquires information related to a vehicle; an image projection unit that projects an image based on the information acquired by the acquisition unit; and imaging means that acquires an image outside the vehicle, the image projection unit projects light in a wavelength band centered on a wavelength of 1.4 μm and the imaging means provides the information related to the vehicle by imaging an image projected based on the light in the wavelength band centered on the wavelength of 1.4 μm.