Patent classifications
G01B11/30
OPTICAL MEASUREMENT APPARATUS, MEASURING METHOD USING THE SAME, AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE SAME
An optical measurement apparatus includes a light source unit generating and outputting light, a polarized light generating unit generating polarized light from the light, an optical system generating a pupil image of a measurement target, using the polarized light, a self-interference generating unit generating multiple beams that are split from the pupil image, and a detecting unit detecting a self-interference image generated by interference of the multiple beams with each other.
APPARATUS AND METHOD FOR QUANTIFYING THE SURFACE FLATNESS OF THREE-DIMENSIONAL POINT CLOUD DATA
A method that quantifies the surface flatness of 3D point cloud data in which a test statistic is proposed to indicate the surface flatness based on the threshold of the allowed bump level, the confidence level of test statistics and data density. The method comprises steps of converting the LIDAR measured points to coordinates along the axes using the principal component analysis (PCA) technique; calculating a Z.sub.α value based on the coordinates and predetermined bump tolerance: comparing the Z.sub.α value with a Z score of a test statistic to perform a null hypothesis; and rejecting the null hypothesis when the Z.sub.α value is greater than the Z score.
BEAD APPEARANCE INSPECTION DEVICE, BEAD APPEARANCE INSPECTION METHOD, PROGRAM, AND BEAD APPEARANCE INSPECTION SYSTEM
A bead appearance inspection device includes an input unit configured to enter input data related to a welding bead of a workpiece produced by welding, a preprocessing unit configured to perform a preprocessing of converting a shape of the welding bead into a predetermined shape on the input data, and k inspection determination units, where k is an integer of 1 or more, that are equipped with k types of artificial intelligence and that are configured to inspect and determine presence or absence of a welding defect of the welding bead based on processings of the k types of artificial intelligence targeting input data on which the preprocessing is performed.
BEAD APPEARANCE INSPECTION DEVICE, BEAD APPEARANCE INSPECTION METHOD, PROGRAM, AND BEAD APPEARANCE INSPECTION SYSTEM
A bead appearance inspection device includes an input unit configured to enter input data related to a welding bead of a workpiece produced by welding, a first determination unit configured to perform a first inspection determination related to a shape of the welding bead based on a comparison between the input data and a master data, k second determination units, where k is an integer of 1 or more, that are equipped with k types of artificial intelligence and that are configured to perform a second inspection determination related to a welding defect of the welding bead based on processings of the k types of artificial intelligence targeting the input data, and a comprehensive determination unit configured to output a result of an appearance inspection of the welding bead to an output device based on determination results of the first determination unit and the k second determination units.
METHOD AND APPARATUS FOR CHECKING A CONNECTION DURING A LASER-BASED CONNECTING METHOD
A method for checking a connection region formed during a joining process of at least two metal components via a laser. The method includes producing a photographic recording of the connection region being formed, transforming the photographic recording, creating at least two image strips in the photographic recording, and assessing the at least two image strips. An apparatus for carrying out the method is further provided.
Analysis apparatus, analysis method, and interference measurement system
An analysis apparatus includes an acquisition part that acquires a plurality of interference images of the object to be measured from the interference measurement apparatus, a calculation part that calculates a sine wave component and a cosine wave component of an interference signal for each pixel in the plurality of interference images, respectively, an error detection part that detects an error between a first Lissajous figure constructed on the basis of the sine wave component and the cosine wave component for each pixel and an ideal second Lissajous figure, a correction part that corrects the sine wave component and the cosine wave component for each pixel on the basis of the error, and a geometry calculation part that calculates surface geometry of the object to be measured on the basis of the corrected sine wave component and cosine wave component.
Refractory metal core finishing technique
A refractory metal core (RMC) finishing method according to an exemplary aspect of the present disclosure includes, among other things, performing a plurality of finishing operations on a plurality of RMC samples, analyzing one or more properties of at least a portion of the plurality of RMC samples and selecting a combination of finishing operations for generating an RMC having desirable properties for manufacturing a part free from defects.
DEVICE AND METHOD FOR IMAGING AND INTERFEROMETRY MEASUREMENTS
A device and method for measuring a surface of an object, including at least one light source, at least one optical sensor, and an interferometry device having a measurement arm and a reference arm, the former directing light from each light source towards the surface of the object and directing light from the surface towards each optical sensor; the measurement device, in an interferometry configuration, illuminating the reference arm and the measurement arm with each light source and directing the light from the measurement arm and the reference arm towards each optical sensor to form an interference signal; the measurement device, in an imaging configuration illuminating at least the measurement arm and directing the light from the measurement arm towards the optical sensor to form an image of the surface; the measurement device including a digital processor producing, from the interference signal and the image, information on the surface.
DEVICE AND METHOD FOR IMAGING AND INTERFEROMETRY MEASUREMENTS
A device and method for measuring a surface of an object, including at least one light source, at least one optical sensor, and an interferometry device having a measurement arm and a reference arm, the former directing light from each light source towards the surface of the object and directing light from the surface towards each optical sensor; the measurement device, in an interferometry configuration, illuminating the reference arm and the measurement arm with each light source and directing the light from the measurement arm and the reference arm towards each optical sensor to form an interference signal; the measurement device, in an imaging configuration illuminating at least the measurement arm and directing the light from the measurement arm towards the optical sensor to form an image of the surface; the measurement device including a digital processor producing, from the interference signal and the image, information on the surface.
IDENTIFICATION APPARATUS
An identification apparatus includes a plurality of light collection optical systems configured to collect scattered light from a plurality of test substances, a spectroscopic element configured to disperse a plurality of light beams from the plurality of light collection optical systems, an imaging unit including a plurality of light receiving elements arrayed in a row direction and a column direction, and configured to receive a plurality of dispersion spectra projected from the spectroscopic element and projected in the row direction, an acquisition unit configured to acquire spectroscopic information of at least any of the plurality of test substances based on an output signal from the imaging unit, and an intensification processing unit configured to perform row direction binning processing including integrating output signals of the plurality of light receiving elements existing at different positions in the row direction.