A linear gauge includes a contact member having a lower tip to be positioned facing a workpiece; an air slider including a cylinder surrounding the contact member with a clearance left between them, and configured to eject air such that the contact member is supported movably in a vertical direction; a scale that detects a height position of the contact member; a casing accommodating therein the contact member, the air slider, and the scale; an evacuation portion formed in an upper portion of the cylinder such that the ejected air is evacuated into the casing; and a communication channel communicating an inlet, which is formed in an upper portion of the contact member, and an outlet, which is formed in the lower tip of the contact member, with each other inside the contact member.

An apparatus and method for inspecting an object by optical triangulation, where the signal of interest in a captured image corresponds to an interaction between a light beam and an environment surrounding the object rather than between a light beam and the object itself. The surrounding environment may be configured to interact in a manner that is detectable by filling it with a flowable scattering medium, e.g. a gas, mist or vapour comprising a suspension of fine particles in air. Light that is scattered by the flowable scattering medium is visible in a captured image. Where the flowable scattering medium is not present, e.g. because the object blocks it, the scattered signal is less. A boundary of a scattered signal region may thus provide information about the location of an object.

The present invention provides a measurement method including while driving a measurement target region of a surface of a substrate in a first direction with respect to a measurement unit, obtaining first measurement information indicating a height of the measurement target region in each of a plurality of first measurement lines parallel to the first direction and different from each other by measuring each measurement line by the measurement unit, and while driving the measurement target region with respect to the measurement unit in a second direction crossing all of the plurality of first measurement lines, obtaining second measurement information indicating a height of the measurement target region in one second measurement line parallel to the second direction by measuring the second measurement line by the measurement unit.

The present invention provides a measurement method including while driving a measurement target region of a surface of a substrate in a first direction with respect to a measurement unit, obtaining first measurement information indicating a height of the measurement target region in each of a plurality of first measurement lines parallel to the first direction and different from each other by measuring each measurement line by the measurement unit, and while driving the measurement target region with respect to the measurement unit in a second direction crossing all of the plurality of first measurement lines, obtaining second measurement information indicating a height of the measurement target region in one second measurement line parallel to the second direction by measuring the second measurement line by the measurement unit.

A measurement method for micro topography and roughness of internal surface of gap belongs to the technical field of precision measurement and is realized based on a measurement system which comprises a PC, a controller, a flexible mechanism and a measurement thin film. The measurement thin film has a copy function and is bonded to the flexible mechanism. The PC is connected with the flexible mechanism through the controller to control the flexible mechanism to expand or contract. The measurement method can effectively solve the measurement problem of the micro topography and surface roughness of the internal surface of the gap with a narrow inlet size. The method is simple and easy to operate, and the device is easy to carry, low in cost and high in measurement accuracy.

Devices, including robotic devices, operating in viscous fluid flow can use passive sensor data collected to represent fluid parameters at an instant in time to derive information about the flow, the motion and position of the device, and parameters of the physical system constraining the flow. Using quasi-static analysis techniques, and appropriate feature selection for machine learning, very accurate determinations can be made, generally in real time, with very modest computational requirements. These determinations can then be used to map systems, navigate devices through a system, or otherwise control the actions of, e.g., robotic devices for clean-up, leak detection, or other functions.

Devices, including robotic devices, operating in viscous fluid flow can use passive sensor data collected to represent fluid parameters at an instant in time to derive information about the flow, the motion and position of the device, and parameters of the physical system constraining the flow. Using quasi-static analysis techniques, and appropriate feature selection for machine learning, very accurate determinations can be made, generally in real time, with very modest computational requirements. These determinations can then be used to map systems, navigate devices through a system, or otherwise control the actions of, e.g., robotic devices for clean-up, leak detection, or other functions.

A measurement method for micro topography and roughness of internal surface of gap belongs to the technical field of precision measurement and is realized based on a measurement system which comprises a PC, a controller, a flexible mechanism and a measurement thin film. The measurement thin film has a copy function and is bonded to the flexible mechanism. The PC is connected with the flexible mechanism through the controller to control the flexible mechanism to expand or contract. The measurement method can effectively solve the measurement problem of the micro topography and surface roughness of the internal surface of the gap with a narrow inlet size. The method is simple and easy to operate, and the device is easy to carry, low in cost and high in measurement accuracy.

An apparatus and method for inspecting an object by optical triangulation, where the signal of interest in a captured image corresponds to an interaction between a light beam and an environment surrounding the object rather than between a light beam and the object itself. The surrounding environment may be configured to interact in a manner that is detectable by filling it with a flowable scattering medium, e.g. a gas, mist or vapour comprising a suspension of fine particles in air. Light that is scattered by the flowable scattering medium is visible in a captured image. Where the flowable scattering medium is not present, e.g. because the object blocks it, the scattered signal is less. A boundary of a scattered signal region may thus provide information about the location of an object.

The present invention provides a measurement method including while driving a measurement target region of a surface of a substrate in a first direction with respect to a measurement unit, obtaining first measurement information indicating a height of the measurement target region in each of a plurality of first measurement lines parallel to the first direction and different from each other by measuring each measurement line by the measurement unit, and while driving the measurement target region with respect to the measurement unit in a second direction crossing all of the plurality of first measurement lines, obtaining second measurement information indicating a height of the measurement target region in one second measurement line parallel to the second direction by measuring the second measurement line by the measurement unit.