A method for producing a mirror plate for a Fabry-Perot interferometer includes providing a substrate, which includes silicon, implementing a semi-transparent reflective coating on the substrate, forming a passivated region in and/or on the substrate by etching a plurality of voids in the substrate, and by passivating the surfaces of the voids, forming a first sensor electrode on top of the passivated region, and forming a second sensor electrode supported by the substrate.

A mirror unit 2 includes a mirror device 20 including a base 21 and a movable mirror 22, an optical function member 13, and a fixed mirror 16 that is disposed on a side opposite to the mirror device 20 with respect to the optical function member 13. The mirror device 20 is provided with a light passage portion 24 that constitutes a first portion of an optical path between the beam splitter unit 3 and the fixed mirror 16. The optical function member 13 is provided with a light transmitting portion 14 that constitutes a second portion of the optical path between the beam splitter unit 3 and the fixed mirror 16. A second surface 21b of the base 21 and a third surface 13a of the optical function member 13 are joined to each other.

A system and method for generating, enhancing, and detecting the amplitude and phase modulation of a laser under a condition of self-mixing is provided. The system may comprise a laser and a detector to extract the characteristic self-mix signal, which is then interpreted using algorithms implemented in hardware or software. In the case of the laser being a Vertical Cavity Surface Emitting laser (VCSEL), the output signal can be detected by monitoring the surface light emission by means of a beam splitter, or in some embodiments as emission from the bottom surface of the laser. In some embodiments, the system may further comprise a wavelength filter such as an etalon in the signal path.

A micromechanical Fabry-Perot interferometer is provided that includes an at least partly transparent substrate; an illuminated area where the light is passed through the substrate; a reflector on the top surface of the substrate in the illuminated area; an absorbing reflector layer above the reflector in the illuminated area, which absorbs at least some wavelengths of the infrared light; an arrangement for determining the temperature of the absorbing reflector layer; and at least one actuator to adjust the gap between the reflector and the absorbing reflector layer.

A miniature, micrometer-accuracy, three-dimensional (3D) position-to-optical displacement sensor that has at least one extrinsic Fabry-Perot interferometer (EFPI) in Z direction and a series of plasmonic metasurface resonators with distinctive wavelength-selective characteristics in X and Y directions. The interferometer comprises at least one single mode optic fiber for light propagation, and a substrate mirror to create a light interference fringe as a function of distance between the mirror and the distal end of the optic fiber. Each plasmonic resonator is capable of modifying the substrate mirror and comprises an array of multiple unit nanostructure unit cells that are arranged in a two-dimensional (2D) square lattice or array in the X-Y plane. The nanostructure unit cells are preferably inscribed in the top layer of a three-layer thin film via the focused ion beam (FIB).

Inspecting a multilayer sample. In one example embodiment, a method may receiving, at a beam splitter, light and splitting the light into first and second portions; combining, at the beam splitter, the first portion of the light after being reflected from a multilayer sample and the second portion of the light after being reflected from a reflector; receiving, at a computer-controlled system for analyzing Fabry-Perot fringes, the combined light and spectrally analyzing the combined light to determine a value of a total power impinging a slit of the system for analyzing Fabry-Perot fringes; determining an optical path difference (OPD); recording an interferogram that plots the value versus the OPD for the OPD; performing the previous acts of the method one or more additional times with a different OPD; and using the interferogram for each of the different OPDs to determine the thicknesses and order of the layers of the multilayer sample.

Inspecting a multilayer sample may include receiving, at a beam splitter, light and splitting the light into first and second portions; combining, at the beam splitter, the first portion of the light after being reflected from a multilayer sample and the second portion of the light after being reflected from a reflector; receiving, at a computer-controlled system for analyzing Fabry-Perot fringes, the combined light and spectrally analyzing the combined light to determine a value of a total power impinging a slit of the system for analyzing Fabry-Perot fringes; determining an optical path difference (OPD); recording an interferogram that plots the value versus the OPD for the OPD; performing the previous acts of the method one or more additional times with a different OPD; and using the interferogram for each of the different OPDs to determine the thicknesses and order of the layers of the multilayer sample.

Methods, systems and devices for estimating a parameter of interest in a borehole. The method may include generating information from an optical displacement device relating to relative motion between two or more reflective surfaces thereof that is indicative of the parameter of interest; and preventing changes in the information resulting from changes at the optical displacement device in at least one of i) temperature, or ii) pressure, by compensating for the changes. Compensating may include adjusting at least one light source generating an electromagnetic beam at least partly received by the optical displacement device responsive to information relating to a control optical displacement device at the optical displacement device. Compensating may include using an optical displacement device and configuring the optical displacement device such that a difference between a first variable gap and a second variable gap is substantially zero while the apparatus is subject to nominal conditions.

The disclosed automatic calibration systems and methods provide a repeatable way to detect internal catheter reflections and to shift the internal catheter reflections to calibrate an image.

A frequency swept laser source for TEFD-OCT imaging includes an integrated clock subsystem on the optical bench with the laser source. The clock subsystem generates frequency clock signals as the optical signal is tuned over the scan band. Preferably the laser source further includes a cavity extender in its optical cavity between a tunable filter and gain medium to increase an optical distance between the tunable filter and the gain medium in order to control the location of laser intensity pattern noise. The laser also includes a fiber stub that allows for control over the cavity length while also controlling birefringence in the cavity.