G01B2290/70

LASER INTERFEROMETER AND METHOD FOR CONTROLLING LASER INTERFEROMETER
20220390756 · 2022-12-08 ·

A laser interferometer that includes a laser light source configured to emit emission light, a light splitter configured to split the emission light into first split light, and second split light incident on an object to be measured, a light modulator disposed on an optical path on which the first split light advances, and configured to modulate the first split light into a reference light having a different frequency from a frequency of the first split light, an optical path length change unit provided between the light splitter and the light modulator, and configured to change a first optical path length, the first optical path length being an optical path length between the light splitter and the light modulator, a photoreceptor configured to receive an interference light of the reference light and an object light generated by reflecting the emission light at the object to be measured, and to output a light reception signal, and a controller configured to control operation of the optical path length change unit in accordance with a second optical path length, the second optical path length being an optical path length between the light splitter and the object to be measured.

Displacement detection device

A displacement detection device is capable of stably and accurately detecting an amount of displacement. A polarization maintaining fiber has a length not to be equal to a length obtained by dividing, a product of an integral multiple of twice a length of a resonator times a refractive index of the resonator and a beat length obtained from a difference between propagation constants of two polarization modes, by a wavelength of the light source, is selected from a range including a length equal to the above length. The polarization maintaining fiber includes multiple polarization maintaining fibers fitted to each other by removable connectors.

System and method for stabilization of multi-path optical interferometers

A system and a method for phase extraction of a multi-path interferometer, the method comprising generating a reference signal of a coherence length longer than an arm length difference of the multi-path interferometer; splitting the reference signal into a frequency shifted reference signal and an unshifted reference signal; recombining the frequency shifted reference signal and the unshifted reference signal into a polarization- and frequency-multiplexed reference signal, and feeding the polarization- and frequency-multiplexed reference signal to the multi-path interferometer; detecting frequency shifted and unshifted output signals of the multi-path interferometer; and determining the interferometer phase from the detected signal.

Micro optic assemblies and optical interrogation systems

Example embodiments include an optical assembly for an optical interrogation system having a single core or a multicore sensing fiber, a measurement fiber to couple light into the sensing fiber, and a reference fiber arranged with the measurement fiber as part of an optical interferometer. A beam splitter combines light from the sensing fiber and with light from the reference fiber. A polarization beam splitting prism separates the combined light into first polarized light and second polarized light that is orthogonal to the first polarized light. The optical assembly can substantially reduce the size, complexity, or cost associated with the traditional optical components in an optical interrogation system that it replaces. Other example optical assemblies are described. Embodiments describe optical interrogation systems using the example optical assemblies.

Optical coherence tomography receiver

An Optical Coherence Tomography receiver may include prisms, polarizing beam splitters, reflectors, lenses, and a photodetector array arranged in a compact package. Sample and reference beams are combined into an interference beam and split in two. The two resulting interference beams are then split into two polarization sates each. The optical path lengths for both pairs of interference beams with the same polarization state are equal or nearly equal.

MICRO OPTIC ASSEMBLIES AND OPTICAL INTERROGATION SYSTEMS
20230032157 · 2023-02-02 ·

Example embodiments include an optical assembly for an optical interrogation system having a single core or a multicore sensing fiber, a measurement fiber to couple light into the sensing fiber, and a reference fiber arranged with the measurement fiber as part of an optical interferometer. A beam splitter combines light from the sensing fiber and with light from the reference fiber. A polarization beam splitting prism separates the combined light into first polarized light and second polarized light that is orthogonal to the first polarized light. The optical assembly can substantially reduce the size, complexity, or cost associated with the traditional optical components in an optical interrogation system that it replaces. Other example optical assemblies are described. Embodiments describe optical interrogation systems using the example optical assemblies.

SYSTEMS AND METHODS FOR CONCURRENT MEASUREMENTS OF INTERFEROMETRIC AND ELLIPSOMETRIC SIGNALS OF MULTI-LAYER THIN FILMS
20230098439 · 2023-03-30 ·

A system may include a broadband light source emitting polarized light that is polarized to two orthogonal polarization states, multiple beam splitters for combining and splitting the polarization states, and interferometric cell for creation of interference patterns with respect to a sample surface, lenses of appropriate design that focus the polarized light at predefined locations, and sensors that analyze the polarized light as a function of angle and wavelength. The system may also include a controller configured to modulate the reference arm through operation of an optical chopper and allow for different data analysis modes to be used on the system produced data.

THIN FILMS AND SURFACE TOPOGRAPHY MEASUREMENT USING POLARIZATION RESOLVED INTERFEROMETRY
20230035415 · 2023-02-02 · ·

Apparatus include a polarization state generator situated to provide an interferometer source beam with a region of polarized source light with a polarization state that is in-plane as subsequently incident on a sample and a region of polarized source light with a polarization state that is perpendicular to in-plane as subsequently incident on the sample, and an interferometer unit configured to split the interferometer source beam into test and reference arm beams, to direct the test arm beam to the sample and the reference arm beam to a reference surface, and to recombine the test and reference arm beams to produce an interferometer output beam. Methods use a polarization state generator to produce an interferometer source beam with a region of polarized source light with a polarization state that is in-plane as subsequently incident on a sample and a region of polarized source light with a polarization state that is perpendicular to in-plane as subsequently incident on the sample, and use an interferometer unit which splits the interferometer source beam into test and reference arm beams, directs the test arm beam to the sample and the reference arm beam to a reference surface, and recombines the test and reference arm beams to produce an interferometer output beam.

Laser Interferometer
20230079613 · 2023-03-16 ·

A laser interferometer includes: a laser light source configured to emit laser light; a light shielding element having an opening through which the laser light passes; an optical modulator configured to modulate the laser light into reference light having a different frequency; and a light receiving element configured to receive object light generated by reflecting the laser light by an object to be measured and the reference light and output a light receiving signal. 0.10≤φ.sub.pin≤10.0, in which φ.sub.pin [mm] is a diameter of the opening.

FOUR-QUADRANT INTERFEROMETRY SYSTEM BASED ON AN INTEGRATED ARRAY WAVE PLATE
20230127285 · 2023-04-27 ·

The invention discloses a four-quadrant interferometry system based on an integrated array wave plate. PBS splits an output laser light into two paths, the reflected light and the transmitted light are respectively transformed into reference light and measuring light, the reference light and the measuring light are converged in PBS, the converging light enters a signal receiving unit and is split into four beams, and the four beams irradiate on a four-quadrant interference signal detector with an integrated array wave plate. The invention solves the problems that the existing signal detection system occupies a large space, is not conducive to array integration, and cannot be used in scenes with high space and size requirements.