A holographic interferometer, comprising: an imaging device capturing an interference pattern created by at least two polarized light beams; a structured phase retardation element located in an optical path of at least one polarized light beam of the at least two polarized light beams; and a polarizer located between the imaging device and the structured phase retardation element, the polarizer projects each polarization of each of the at least two polarized light beams on a single axis to create the interference pattern on the imaging device.

A system and method for performing Optical Coherence Tomography on a sample utilizes collimated, phase modulated beams of light in an interferometer. At least one of the beams of light utilized exists as an Airy beam for at least a portion of the procedure, obviating any deleterious impact caused by the Gaussian beam diffraction. The system may incorporate a light source, polarization beam splitter, delay line, non-polarization beam splitters, lenses, phase masks, waveplates, and mirrors, any or all of which may be controlled by a computing element.

A three-dimensional measurement device includes: a light emitter; an optical system that splits an incident light, irradiates a measurement object with an object light and irradiates a reference plane with a reference light, and recombines the object and reference lights and emits a combined light; an imaging device that takes an image of a light emitted from the optical system; a storage device that stores transmission axis absolute angle data each obtained by a previous actual measurement of an absolute angle of a transmission axis of each polarizer; and a control device that calculates a phase difference between the reference and object lights based on luminance data of each pixel in luminance image data and the transmission axis absolute angle data of each polarizer corresponding to the pixel, and measures a height of the measurement object at the measurement position.

A two-degree-of-freedom heterodyne grating interferometry measurement system, comprising: a single-frequency laser device for emitting a single-frequency laser, and the single-frequency laser can be split into a beam of reference light and a beam of measurement light; an interferometer mirror group and a measurement grating for forming a reference interference signal and a measurement interference signal from the reference light and the measurement light; and a receiving optical fiber for receiving the reference interference signal and the measurement interference signal, wherein a core diameter of the receiving optical fiber is smaller than a width of an interference fringe of the reference interference signal and the measurement interference signal, so that the receiving optical fiber receives a part of the reference interference signal and the measurement interference signal. The measurement system has advantages of insensitivity to grating rotation angle error, small volume, light weight, and a facilitating arrangement.

Shearography systems provide independent setting of fringe frequency and shear magnitude by situating an interferometer with a tiltable reflector proximate a pupil plane of an imaging optical system. Fringe frequency can be selected based on a modified Savart plate. In other examples, a Wollaston prism or a polarization grating is translated with respect to an image sensor to vary shear magnitude while maintaining a substantially fixed fringe frequency.

Example embodiments include an optical assembly for an optical interrogation system having a single core or a multicore sensing fiber, a measurement fiber to couple light into the sensing fiber, and a reference fiber arranged with the measurement fiber as part of an optical interferometer. A beam splitter combines light from the sensing fiber and with light from the reference fiber. A polarization beam splitting prism separates the combined light into first polarized light and second polarized light that is orthogonal to the first polarized light. The optical assembly can substantially reduce the size, complexity, or cost associated with the traditional optical components in an optical interrogation system that it replaces. Other example optical assemblies are described. Embodiments describe optical interrogation systems using the example optical assemblies.

Systems or apparatuses may include a spatial modulator for spatially modulating light to produce spatially modulated light, a dispersing element for dispersing the modulated light to produce spatially modulated and dispersed light, a polarization-sensitive displacement element for providing a polarization dependent displacement of the dispersed light, and a detector for detecting the spatially modulated, dispersed and displaced light. The system and/or apparatus may include a broadband light source for providing broadband light, a linear polarizer for polarizing the broadband light, a double path interferometer including a sample path via the object and a reference path, a beam splitter for superposing a portion of the light from the sample path and a portion of the light from the reference path to create superposed light for spatial modulation, and/or a processor for processing an output of the detector to produce a three-dimensional image of the object.

A measurement system for use in measuring parameters of a patterned sample, the system including a broadband light source, an optical system configured as an interferometric system, a detection unit, and a control unit, where the interferometric system defines illumination and detection channels having a sample arm and a reference arm having a reference reflector, and is configured for inducing an optical path difference between the sample and reference arms, the detection unit for detecting a combined light beam formed by a light beam reflected from the reflector and a light beam propagating from a sample's support, and generating measured data indicative of spectral interference pattern formed by spectral interference signatures, and the control unit for receiving the measured data and applying a model-based processing to the spectral interference pattern for determining one or more parameters of the pattern in the sample.

An interferometer system comprises a light redirecting system for splitting an input light beam into two secondary light beams to respectively propagate along a first optical arm and a second optical arm, and for recombining the secondary light beams after exiting the optical arms. The interferometer system also comprises a multipass optical cell positioned at the second optical arm for effecting a predetermined optical path length within the second arm.

A reference laser beam locked to a femtosecond optical frequency comb is modulated through a high frequency electro-optic phase modulator, and laser sidebands with equal intervals are generated. Beat frequency is performed on the sixth-order sideband and the frequency sweeping laser beam, a beat signal and a frequency sweeping signal source are down-mixed to generate a difference frequency signal, and the difference frequency signal is locked to a reference clock through a digital phase detector and a PID controller. The frequency sweeping laser beam is locked to reference laser beam with a dynamic offset frequency under the closed loop control, and sinusoidal frequency sweeping is simultaneously performed together with the frequency sweeping signal source. The locked laser beam is used for absolute distance measurement, and a distance to be measured is obtained according to the synthetic wavelength transition theory.