A Venturi air flow sensor and control system includes a Venturi housing comprising with an inlet section, an outlet section, and a reduced diameter horn shaped center section connecting the inlet section to the outlet section with a damper. A high pressure sensor tube with downstream openings extends across the inlet section on the outlet section and a low pressure sensor tube with downstream openings extends across the reduced diameter horn shaped section. The pressure from the low pressure sensor tube and the pressure from the high pressure sensor tube are connected to a controller. From the high pressure and the low pressure the controller determines the air flow and based on air flow operates the damper.

The invention relates to a method for determining the delivery rate of a pump. In this context, a value of the delivery level and a value of the power of the pump are determined. A probability density function is calculated for the delivery level and the power. A first probability density function of the delivery rate is calculated on the basis of a delivery level-delivery rate relationship and the probability density function of the delivery level. A second probability density function of the delivery rate is determined on the basis of a power-delivery rate relationship and the probability density function of the power. A combined probability density function of the delivery rate is determined on the basis of the first and second probability density functions. The delivery rate is determined on the basis of the combined probability density function.

Embodiments of the present disclosure provide for apparatus used to detect clogs in a fluid delivery system during CMP processes and methods of detecting clogs in a fluid delivery system during CMP processes. In particular, embodiments herein provide a flow splitter manifold configured to enable monitoring of the pressure of the polishing fluid disposed therein. Monitoring the fluid pressure in the flow splitter manifold enables the detection of clogs in the delivery lines and/or dispense nozzles that inhibit and/or prevent the flow of polishing fluid therethrough or therefrom.

The present disclosure relates to a calibration device and a sensitivity determining device for a virtual flow meter, and corresponding methods. The present disclosure relates to a calibration device for calibrating a virtual flow meter of a production system, and the production system includes components for transferring fluid, where the virtual flow meter is configured to estimate a flow rate of the fluid based on property values of the components and values of variable parameters of the components, and the calibration device includes a sensitivity determining module configured to calculate a first sensitivity, where the first sensitivity is used to indicate a degree of change of the values of the variable parameters relative to disturbance of the property values; and a calibration module configured to calibrate the virtual flow meter according to the first sensitivity. The present disclosure further relates to corresponding methods.

Meters including a pressure regulating systems are provided. The pressure regulating system includes a pressure sensor configured to sense pressure of water flowing through the meter; an actuator coupled to the pressure sensor; an electronics module configured to receive pressure information related sensed pressure from the actuator and process the received pressure information; and a radio module coupled to the meter and configured to receive the processed sensor information from the electronics module, communicate the processed sensor information to a remote location and receive pressure adjustment information from the remote location. The received pressure adjustment information is used to adjust water pressure in the meter from the remote location.

A system for measuring temporally resolved through-flow processes of a fluid. The system includes an inlet, a main line comprising a line section, an outlet fluidically connected with the inlet via the main line, a displacement device arranged in the main line, a circuitous line which branches off the main line between the inlet and the displacement device and to enter the main line between the displacement device and the outlet, a pressure difference transducer arranged in the circuitous line, an evaluation and control unit which controls the displacement device, and a bypass line comprising a pump and a sensor. The bypass line branches off from the main line or from the circuitous line and ends at a same side of the displacement device and the pressure difference transducer to bypass the line section or the circuitous line from which the bypass line branches off.

A method includes obtaining actual flow measurements generated by a flow meter, where the actual flow measurements identify a flow of material in a passageway. The method also includes generating estimated flow measurements based on process variable measurements other than the actual flow measurements. The method further includes comparing the estimated flow measurements and the actual flow measurements and determining whether a problem exists based on the comparison. The estimated flow measurements could be generated using one or more models mathematically representing how the flow of material in the passageway relates to non-flow process variables associated with the process variable measurements. The process variable measurements could be obtained from one or more sensors associated with a flow restrictor in the passageway, one or more sensors positioned within the passageway, and/or one or more sensors positioned outside the passageway.

This signal processing unit includes: a comparison signal output unit which outputs a comparison signal on a negative side that corresponds to a negative side portion, of a second amplitude-increased signal, which is on the negative side with respect to the comparison threshold TH; an averaging processing unit which outputs an average signal obtained by averaging the comparison signal; a coefficient multiplication processing unit which outputs a coefficient-multiplied signal obtained by multiplying the average signal by an adjustment coefficient set in advance; and a signal correction processing unit which outputs, as a flow rate signal, a value obtained by correcting a first amplitude-increased signal so as to be decreased by use of the coefficient-multiplied signal, wherein the comparison threshold TH is set on the basis of an output characteristic of a sensor measured in advance with respect to at least a forward flow direction of an intake air.

A method for determining compressibility of a flowing fluid includes: using a pump, driving a volume flow of the fluid through a measuring tube of a vibronic densimeter at a first pressure maintained using a throttle; determining a first density measured value of the fluid at the first pressure; determining a first pressure measured value at the first pressure; driving a volume flow of the fluid through the densimeter at a second pressure; determining a second density measured value at the second pressure different from the first pressure; determining a second pressure measured value at the second pressure; determining compressibility of the fluid based on the first density measured value, the second density measured value, the first pressure measured value and the second pressure measured value assuming the composition of the fluid is unchanged between the registering of the first density measured value and the second density measured value.

An inner housing part has through-holes for connecting first lead pins (power supply terminal, output terminal, ground terminal) with the connector pins. The inner housing part has grooves that house second lead pins for adjusting output signals of a sensor chip. Three of the grooves each has a shape in which a distance between opposing sides of the groove is less than a diameter of the second lead pin that corresponds to the groove. The inner housing part is fixed to a case by a thermoset adhesive so as to house lead pins arranged in the case included in a sensor element. The second lead pins are fitted in the grooves, suppressing lifting of the inner housing part during curing of the adhesive.