A vibronic sensor used to determine a process variable of a medium in a container comprises a mechanically vibratable unit, a drive/receiving unit, and an electronic unit. The drive/receiving unit excites mechanical vibrations in the mechanically vibratable unit via an electric excitation signal and receives the mechanical vibrations of the mechanically vibratable unit and convert same into an electric reception signal. The electronic unit is designed to generate the excitation signal on the basis of the reception signal and determine the process variable from the reception signal. The electronic unit includes an adaptive filter and is designed to set the filter characteristic of the adapter filter to produce a target phase offset between the excitation and reception signals. The sensor also has a detection unit to determine a phase offset between the excitation signal and the reception signal and/or the amplitude of the reception signal using a quadrature demodulation.

The embodiment of the present disclosure discloses a sensing device, comprising: an elastic component; a sensing cavity, wherein the elastic component forms a first sidewall of the sensing cavity; and an energy conversion component configured to obtain a sensing signal and convert the sensing signal into an electrical signal, the energy conversion component being in communication with the sensing cavity, and the sensing signal relating to a change of a volume of the sensing cavity, wherein at least one convex structure is arranged on one side of the elastic component facing toward the sensing cavity, the elastic component drives the at least one convex structure to move in response to an external signal, and the movement of the at least one convex structure changing the volume of the sensing cavity.

The embodiment of the present disclosure discloses a sensing device, comprising: an elastic component; a sensing cavity, wherein the elastic component forms a first sidewall of the sensing cavity; and an energy conversion component configured to obtain a sensing signal and convert the sensing signal into an electrical signal, the energy conversion component being in communication with the sensing cavity, and the sensing signal relating to a change of a volume of the sensing cavity, wherein at least one convex structure is arranged on one side of the elastic component facing toward the sensing cavity, the elastic component drives the at least one convex structure to move in response to an external signal, and the movement of the at least one convex structure changing the volume of the sensing cavity.

Embodiments of the invention are shown in the figures, where a system for vibration detection is shown, the system comprising: one or more drivelines including a rotatable component rotatable about a rotational axis relative to another component; an electrical machine having a rotor and a stator rotatable with respect to one another, the rotor being arranged to at least one of drive and be driven by a part of the driveline, the electrical machine being adapted to provide signals indicative for at least one of a motion and a force between the rotor and the stator and a torque applied on the rotor; and an analysis unit adapted to receive the signals and to detect a vibration signature of the rotatable component with respect to the other component based on the signals.

The embodiment of the present disclosure discloses a sensing device, comprising: an elastic component; a sensing cavity, wherein the elastic component forms a first sidewall of the sensing cavity; and an energy conversion component configured to obtain a sensing signal and convert the sensing signal into an electrical signal, the energy conversion component being in communication with the sensing cavity, and the sensing signal relating to a change of a volume of the sensing cavity, wherein at least one convex structure is arranged on one side of the elastic component facing toward the sensing cavity, the elastic component drives the at least one convex structure to move in response to an external signal, and the movement of the at least one convex structure changing the volume of the sensing cavity.

The embodiment of the present disclosure discloses a sensing device, comprising: an elastic component; a sensing cavity, wherein the elastic component forms a first sidewall of the sensing cavity; and an energy conversion component configured to obtain a sensing signal and convert the sensing signal into an electrical signal, the energy conversion component being in communication with the sensing cavity, and the sensing signal relating to a change of a volume of the sensing cavity, wherein at least one convex structure is arranged on one side of the elastic component facing toward the sensing cavity, the elastic component drives the at least one convex structure to move in response to an external signal, and the movement of the at least one convex structure changing the volume of the sensing cavity.

An ultrasound transducer, wherein the ultrasound transducer includes a membrane including a top portion and a bottom portion, wherein the membrane is configured to vibrate and generate an ultrasound in response to voltage applied the transducer, wherein the membrane includes a perimeter including a plurality of sides and a top surface and a bottom surface with one or more feet extending away from the bottom surface; and a support member that attaches to and connects to the membrane and supports the membrane, wherein the support member includes one or more platforms extending to and attaching to the membrane and a substrate, wherein a first end of the platform connects to the membrane and includes a support portion, wherein the support portion away from the platform, wherein the platform includes the one or more piezoelectric layers, wherein the one or more platforms support and surround the membrane.

A vibration sensor includes a vibration receiver and an acoustic transducer. The vibration receiver includes a housing and a vibration unit. The housing forms an acoustic cavity. The vibration unit is located in the acoustic cavity and divides the acoustic cavity into a first acoustic cavity and a second acoustic cavity. The acoustic transducer is acoustically connected to the first acoustic cavity. The housing is configured to generate vibration based on an external vibration signal. The vibration unit vibrates in response to the vibration of the housing and transmits, through the first acoustic cavity, the vibration to the acoustic transducer to generate an electrical signal. The vibrating unit includes a mass element and an elastic element. A deviation between cross-sectional areas of the mass element and the first acoustic cavity perpendicular to a vibration direction of the mass unit is less than 25%.

Provided is a micro electro-mechanical system (MEMS) sensor including a substrate including a first cavity, a first frame including a second cavity at least partially overlapping the first cavity, at least a portion of the first frame being spaced apart from the substrate, a plurality of resonators, each of the plurality of resonators including a first end connected to the first frame and a second end extending into the second cavity, and a second frame including a first region connected to the first frame and a second region spaced apart from the first frame and connected to the substrate.

A sensor comprising a whisker shaft and a follicle is provided. The shaft has a root end and a tip end and the shaft tapers from the root end to the tip end so that the root end is wider and the tip end is narrower. The root end is pivotably mounted in the follicle.