An optical device includes an optical sensor, a dye-based optical filter, and a multi-bandpass optical interference filter. The multi-bandpass optical interference filter is configured to pass a first spectral range of visible light, a second spectral range of visible light, and a third spectral range of visible light. The second spectral range does not overlap with the first spectral range, and the third spectral range does not overlap with the first spectral range and the second spectral range. The multi-bandpass optical interference filter is further configured to prevent passage of a fourth spectral range of near-infrared light. An angle shift associated with each spectral range, of the first spectral range, the second spectral range, and the third spectral range, is less than or equal to 2.0% of a center wavelength of the spectral range for angles of incidence between 0 and 30 degrees.

An inspection system includes a main support die configured to receive a target specimen; an auxiliary support die adjacent to the main support die and configured to receive a reference specimen; a cleaning device configured to remove contaminants from the reference specimen; an objective lens unit configured to direct light to main support die from a light source adjacent to the objective lens unit; a spectroscope between the objective lens unit and the light source; a detector adjacent to the objective lens unit; an imaging device between the objective lens unit and the detector; and a computer system in communication with the detector.

Provided are an optical system capable of improving the spatial resolution of hyperspectral imaging and an optical alignment method using the same. The optical system includes a digital micromirror device (DMD) having a rectangular shape, a first cylindrical lens curved to focus and form an image on an axis corresponding to a shorter side of the DMD, and a second cylindrical lens curved in the same axial direction as the axis to collimate light reflected from the DMD.

A user device for imaging a scene includes a first plurality of optical sensors coupled to a substrate for collecting an image of a scene and a second plurality of optical sensors coupled to the substrate for collecting spectral information from the image. A plurality of sets of interference filters are associated with the second plurality of optical sensors, where each interference filter of a set of interference filters is configured to pass light in one of a plurality of wavelength ranges to one or more optical sensors of the second plurality of optical sensors and each optical sensor of the plurality of optical sensors is associated with a spatial area of the image. A processor is adapted to receive an output from the first plurality of optical sensors and the second plurality of optical sensors and determine, based on the spectral information, a target area within the scene. The processor is further adapted to retrieve focus data for the scene, determine a focus distance for the target area and output user-perceptible information to an output display.

An apparatus for detecting matter including: a light source arrangement adapted to emit a first and a second set of light beams towards a first detection zone through which the matter is provided. A spectroscopy system adapted to receive and analyse light which is reflected and/or scattered by matter in the first detection zone. A laser triangulation system including, a laser arrangement adapted to emit a line of laser light towards a second detection zone. A camera-based sensor arrangement configured to receive and analyse light which is reflected and/or scattered by matter in the second detection zone. The received light of the spectroscopy system completely or partially intersects the received light of the camera-based sensor arrangement and/or the line of laser light.

A processing apparatus is connected to one or more terminals including a hyperspectral sensor that generates compressed image data which is hyperspectral information of a target compressed as two-dimensional image information over a network. The processing apparatus includes a storage device that stores data sets of samples and a first reconstruction table for generating hyperspectral data from the compressed image data, the data set of each sample includes hyperspectral data of the sample and data indicative of a property value of the sample; and a processing circuit that generates a statistical model for estimating the property value from the hyperspectral data on the basis of the data sets of the samples and generates a second reconstruction table by editing the first reconstruction table in accordance with the statistical model thus generated.

A processing apparatus is connected to one or more terminals including a hyperspectral sensor that generates compressed image data which is hyperspectral information of a target compressed as two-dimensional image information over a network. The processing apparatus includes a storage device that stores data sets of samples and a first reconstruction table for generating hyperspectral data from the compressed image data, the data set of each sample includes hyperspectral data of the sample and data indicative of a property value of the sample; and a processing circuit that generates a statistical model for estimating the property value from the hyperspectral data on the basis of the data sets of the samples and generates a second reconstruction table by editing the first reconstruction table in accordance with the statistical model thus generated.

An optical manufacturing process sensing and status indication system is taught that is able to utilize optical emissions from a manufacturing process to infer the state of the process. In one case, it is able to use these optical emissions to distinguish thermal phenomena on two timescales and to perform feature extraction and classification so that nominal process conditions may be uniquely distinguished from off-nominal process conditions at a given instant in time or over a sequential series of instants in time occurring over the duration of the manufacturing process. In other case, it is able to utilize these optical emissions to derive corresponding spectra and identify features within those spectra so that nominal process conditions may be uniquely distinguished from off-nominal process conditions at a given instant in time or over a sequential series of instants in time occurring over the duration of the manufacturing process.

An optical manufacturing process sensing and status indication system is taught that is able to utilize optical emissions from a manufacturing process to infer the state of the process. In one case, it is able to use these optical emissions to distinguish thermal phenomena on two timescales and to perform feature extraction and classification so that nominal process conditions may be uniquely distinguished from off-nominal process conditions at a given instant in time or over a sequential series of instants in time occurring over the duration of the manufacturing process. In other case, it is able to utilize these optical emissions to derive corresponding spectra and identify features within those spectra so that nominal process conditions may be uniquely distinguished from off-nominal process conditions at a given instant in time or over a sequential series of instants in time occurring over the duration of the manufacturing process.

A spectrometer with a Schmidt reflector is described. The spectrometer may include a Schmidt corrector and a dispersive element as separate components. Alternatively, the Schmidt corrector and dispersive element may be combined into a single optical component. The spectrometer may further include a field-flattener lens.