Method for capturing a heat pattern with a sensor including a plurality of pixels each comprising a heat-sensitive measuring element, the sensor comprising an element for heating the measuring element, the method including carrying out the following steps for each pixel: a first heating step in which a first amount of heating power is dissipated in the measuring element; a first step of measuring the heat pattern, comprising a first read-out of the heat-sensitive measuring element, after a first delay time; a second heating step in which a second amount of heating power is dissipated in the measuring element; a second step of measuring the heat pattern, comprising a second read-out after a second delay time; and wherein the first amount of power is different from the second amount of power and/or the length of the first delay time is different from that of the second delay time.

Thermal imaging of heat sources in thermal processing systems for determination of workpiece temperature are provided. In one example, a thermal processing apparatus can include a processing chamber, a workpiece support, a plurality of heat sources configured to heat a workpiece, and at least one camera. The at least one camera can capture one or more images of thermal radiation of the plurality of heat sources during thermal treatment of the workpiece. In one example, a method for calibrating the camera can include obtaining the one or more images of thermal radiation of at least one heat source, obtaining one or more reference signals indicative of irradiation of the at least one heat source, and calibrating the camera based at least in part on a comparison between the one or more images of thermal radiation and the one or more reference signals indicative of irradiation of the heat source.

Devices and corresponding methods can be provided to measure temperature and/or emissivity of a target. Emissivity of the target need not be known or assumed, and any temperature difference between a sensor and the target need not be zeroed or minimized. No particular bandpass filter is required. Devices can include one or two sensors viewing the same target as the target views different respective viewed temperatures. The respective viewed temperatures can be sensor temperatures, and a single sensor can be set to each of the respective viewed temperatures at different times. An analyzer can determine the temperature and/or emissivity of the target based on the respective viewed temperatures and on plural net heat fluxes detected by the sensors and corresponding to the respective viewed temperatures.

A spiral-shaped broadband transducer made of a piezoelectric/pyroelectric material comprising a spiral-shaped thin film (1) having metalized surfaces electrically connected to two electrodes by means of a conductive connection, a first end (2) having a constraint and a second end (3) having another constraint. The spiral-shaped transducer comprises a plastic component (4, 6) including a first support guide (4a, 6a) and a second support guide (4b, 6b), parallel to each other, being arranged according to a spiral geometry for housing the thin film (1) between the first support guide (4a, 6a) and the second support guide (4b, 6b); a first end of the first support guide (4a, 6a) and of the second support guide (4b, 6b) being clamped to a first vertical element (21a, 7, 8) having a first vertical slit (5, 10) for housing the first end (2) of the spiral-shaped thin film (1); a second end of the first support guide (4a, 6a) and of the second support guide (4b, 6b) being fixed to a second clamping vertical element (21b, 21c) having a second vertical slit (5, 5) for housing the second end (3) of the spiral-shaped thin film (1).

The invention relates to a manufacturing process of a pixel array of a thermal pattern sensor comprising the steps of: providing a substrate; depositing a first layer of electrically conductive material, including depositing electrically conductive tracks, depositing of connector pins and depositing a ground strip; depositing of second layer of pyroelectric material covering the tracks and leaving at least part of the connector pins free; depositing of third layer of electrically conductive material; depositing of fourth layer of dielectric material in contact with the third layer; depositing of a fifth layer including electrically conductive heating tracks; depositing of a sixth protective layer,
wherein the step of depositing the second and/or third and/or fourth and/or sixth layer is carried out by slot-die coating.

Test procedures and equipment for the test and calibration of ultra-small thermal imaging cores, or micro-cores are disclosed. Test fixtures for calibration and adjustment that allow for operation and image acquisition of multiple cores at a time may also be provided. Test procedures and fixtures that allow for full temperature calibration of each individual core, as well as providing data useful for uniformity correction during operation, may also be provided as part of the test and manufacture of the core.

A temperature difference power generation apparatus according to one aspect of the present invention includes a thermoelectric conversion element configured to convert thermal energy into electric energy based on a temperature difference, radiation fins which are thermally connected to a low-temperature side of the thermoelectric conversion element and contactable to outside air, and a pipe which is thermally connected to a high-temperature side of the thermoelectric conversion element and through which a high-temperature fluid at a higher temperature than the outside air is flowable.

A pyroelectric device, comprising a plurality of layers of a polar dielectric material having a pyroelectric coefficient, p, wherein each layer exhibits pyroelectric properties; a plurality of conductive electrodes, wherein each conductive electrode is substantially in contact with at least a portion of one surface of a respective at least one of said plurality of layers of polar dielectric material, wherein said electrodes are electrically connected in a parallel configuration as to form a series of capacitors comprised of said plurality of layers of polar dielectric material and plurality of conductive electrodes.

Thermal imaging of heat sources in thermal processing systems for determination of workpiece temperature are provided. In one example, a thermal processing apparatus can include a processing chamber, a workpiece support, a plurality of heat sources configured to heat a workpiece, and at least one camera. The at least one camera can capture one or more images of thermal radiation of the plurality of heat sources during thermal treatment of the workpiece. In one example, a method for calibrating the camera can include obtaining the one or more images of thermal radiation of at least one heat source, obtaining one or more reference signals indicative of irradiation of the at least one heat source, and calibrating the camera based at least in part on a comparison between the one or more images of thermal radiation and the one or more reference signals indicative of irradiation of the heat source.

A temperature sensor includes a first electrode, second electrode, and a pyroelectric layer between the first electrode and the second electrode. The pyroelectric layer includes a ferroelectric polymer and an ionogel.