A heat amount measuring method includes a first step of providing a heat-transferring component that transfers and receives heat to and from a heating component and measuring, while the heating component is generating heat, a first heat amount of heat transmitted from the heating component to the heat-transferring component, a first heating component temperature, and a first substrate temperature, a second step of changing an output of the heat-transferring component and measuring a second heat amount of heat transmitted from the heating component to the heat-transferring component, a second heating component temperature, and a second substrate temperature, and a third step of calculating a heat amount of heat transmitted from the heating component to a substrate by using the first heat amount, the first heating component temperature, the first substrate temperature, the second heat amount, the second heating component temperature, and the second substrate temperature.

Provided is a heat flow switching element that has a larger change in thermal conductivity, has excellent thermal responsiveness, and is capable of directly detecting a temperature change. The heat flow switching element according to the present invention includes: a heat flow control element part 10 including an N-type semiconductor layer 3, an insulator layer 4 laminated on the N-type semiconductor layer, and a P-type semiconductor layer 5 laminated on the insulator layer; and thermosensitive element parts 11A and 11B joined to the heat flow control element part. In addition, the thermosensitive element parts include: a thin-film thermistor portion made of a thermistor material; and a pair of counter electrodes formed facing each other on an upper side and/or a lower side of the thin-film thermistor portion, and the thin-film thermistor portion is laminated on an upper side and/or a lower side of the heat flow control element part.

Provided is a heat flow switching element that has a larger change in thermal conductivity, has excellent thermal responsiveness, and is capable of directly detecting a temperature change. The heat flow switching element according to the present invention includes: a heat flow control element part 10 including an N-type semiconductor layer 3, an insulator layer 4 laminated on the N-type semiconductor layer, and a P-type semiconductor layer 5 laminated on the insulator layer; and thermosensitive element parts 11A and 11B joined to the heat flow control element part. In addition, the thermosensitive element parts include: a thin-film thermistor portion made of a thermistor material; and a pair of counter electrodes formed facing each other on an upper side and/or a lower side of the thin-film thermistor portion, and the thin-film thermistor portion is laminated on an upper side and/or a lower side of the heat flow control element part.

The present application is directed to a multi-sensor gas sampling detection system and method for detecting and measuring the radicals in a radical gas stream and includes at least one radical gas generator in communication with at least one gas source. The radical gas generator may be configured to generate at least one radical gas stream which may be used within a processing chamber. As such, the processing chamber is in fluid communication with the radical gas generator. At least one analysis circuit in fluid communication with the radical gas generator may be used in the detection and measurement system. The analysis may be configured to receive a defined volume and/or flow rate of the radical gas stream. In one embodiment, the analysis circuit may be configured to react at least one reagent with radicals within the defined volume of the radical gas stream thereby forming at least one chemical species within at least one compound stream. At least one sensor module within the analysis circuit may be configured to measure a concentration of the chemical species within the compound stream. One or more flow measurement modules may be in fluid communication with the sensor module. During use, the flow measurement module may be configured to measure the volume of at least one of the compound stream and radical gas stream.

The present application is directed to a multi-sensor gas sampling detection system and method for detecting and measuring the radicals in a radical gas stream and includes at least one radical gas generator in communication with at least one gas source. The radical gas generator may be configured to generate at least one radical gas stream which may be used within a processing chamber. As such, the processing chamber is in fluid communication with the radical gas generator. At least one analysis circuit in fluid communication with the radical gas generator may be used in the detection and measurement system. The analysis may be configured to receive a defined volume and/or flow rate of the radical gas stream. In one embodiment, the analysis circuit may be configured to react at least one reagent with radicals within the defined volume of the radical gas stream thereby forming at least one chemical species within at least one compound stream. At least one sensor module within the analysis circuit may be configured to measure a concentration of the chemical species within the compound stream. One or more flow measurement modules may be in fluid communication with the sensor module. During use, the flow measurement module may be configured to measure the volume of at least one of the compound stream and radical gas stream.

Downhole fluid sensing device is disclosed for determining heat capacity of a formation fluid produced by a sampled subterranean well, the sensor package having an annulus shaped, elongate body defining a cylindrical fluid sampling space, the sensor package and the sampling space having a common longitudinal center axis. The elongate sensor package body has a fluid entrance port that provides well fluid ingress into the fluid sampling space and a fluid exit port that provides well fluid egress out of the fluid sampling space. A heat source is coupled to the elongate sensor package body and located along a portion of the fluid path, and the heat source inputs heat into sampled well fluid. Finally, temperature sensing devices (located between the fluid entrance port and fluid exit port measure heat conducted to the sampled well fluid, wherein each of the temperature sensing devices is radially spaced from the heat source.

Downhole fluid sensing device is disclosed for determining heat capacity of a formation fluid produced by a sampled subterranean well, the sensor package having an annulus shaped, elongate body defining a cylindrical fluid sampling space, the sensor package and the sampling space having a common longitudinal center axis. The elongate sensor package body has a fluid entrance port that provides well fluid ingress into the fluid sampling space and a fluid exit port that provides well fluid egress out of the fluid sampling space. A heat source is coupled to the elongate sensor package body and located along a portion of the fluid path, and the heat source inputs heat into sampled well fluid. Finally, temperature sensing devices (located between the fluid entrance port and fluid exit port measure heat conducted to the sampled well fluid, wherein each of the temperature sensing devices is radially spaced from the heat source.

A method of controlling cooling water treatment may involve measuring operating data of one or more downstream heat exchangers that receive cooling water from the cooling tower. For example, the inlet and outlet temperatures of both the hot and cold streams of a downstream heat exchanger may be measured. Data from the streams passing through the heat exchanger may be used to determine a heat transfer efficiency for the heat exchanger. The heat transfer efficiency can be trended over a period of time and changes in the trend detected to identify cooling waterfouling issues. Multiple potential causes of the perceived fouling issues can be evaluated to determine a predicted cause. A chemical additive selected to reduce, eliminate, or otherwise control the cooling water fouling can be controlled based on the predicted cause of the fouling.

A method of controlling cooling water treatment may involve measuring operating data of one or more downstream heat exchangers that receive cooling water from the cooling tower. For example, the inlet and outlet temperatures of both the hot and cold streams of a downstream heat exchanger may be measured. Data from the streams passing through the heat exchanger may be used to determine a heat transfer efficiency for the heat exchanger. The heat transfer efficiency can be trended over a period of time and changes in the trend detected to identify cooling waterfouling issues. Multiple potential causes of the perceived fouling issues can be evaluated to determine a predicted cause. A chemical additive selected to reduce, eliminate, or otherwise control the cooling water fouling can be controlled based on the predicted cause of the fouling.

An apparatus for measuring an overall heat transfer coefficient may include an external chamber provided using a heat insulation material and including an internal space, an internal chamber disposed in the external chamber and having an opening upper portion, a heat source supply to supply heat to an internal portion of the internal chamber, a cutoff portion disposed in the upper portion of the internal chamber to seal the internal chamber and prevent an outflow of heat emitted from the heat source supply, and a temperature measurement portion disposed in an internal portion and an external portion of the internal chamber to measure an internal temperature and an external temperature of the internal chamber, in which the cutoff portion may realize covering conditions indoors through a combination of a covering material and a thermal screen, and adjust the external temperature of the internal chamber.