The invention relates to a pressure sensor and related method for the compensation of a pressure, wherein the pressure sensor has a pressure measuring cell, with a housing and an electronic sensor system and an electronic evaluation system disposed within the housing, as well as at least one first temperature sensor for measuring a first temperature and a second temperature sensor for measuring a second temperature, wherein the pressure sensor has a compensation unit connected to the at least two temperature sensors, and wherein the compensation unit determines a compensation for the pressure taking into account at least the first temperature and the second temperature.

The invention relates to a pressure sensor and related method for the compensation of a pressure, wherein the pressure sensor has a pressure measuring cell, with a housing and an electronic sensor system and an electronic evaluation system disposed within the housing, as well as at least one first temperature sensor for measuring a first temperature and a second temperature sensor for measuring a second temperature, wherein the pressure sensor has a compensation unit connected to the at least two temperature sensors, and wherein the compensation unit determines a compensation for the pressure taking into account at least the first temperature and the second temperature.

Examples provide for an apparatus, method, and computer program for comparing the output of sensor cells in an arrangement of sensor cells in an area A, including a set of at least two measurement units. A measurement unit includes at least two sensor cells, wherein at least one sensor cell of at least one measurement unit includes a sensitive sensor cell, which is sensitive with respect to a measured quantity. The sensor cells are intermixed with each other. The apparatus further includes means for selecting output signals of sensor cells of the arrangement and means for determining a measured quantity or determining an intact sensor cell by comparing output signals of different measurement units.

Examples provide for an apparatus, method, and computer program for comparing the output of sensor cells in an arrangement of sensor cells in an area A, including a set of at least two measurement units. A measurement unit includes at least two sensor cells, wherein at least one sensor cell of at least one measurement unit includes a sensitive sensor cell, which is sensitive with respect to a measured quantity. The sensor cells are intermixed with each other. The apparatus further includes means for selecting output signals of sensor cells of the arrangement and means for determining a measured quantity or determining an intact sensor cell by comparing output signals of different measurement units.

A pressure detection structure and an electronic device are provided that improve sensitivity and accuracy of pressure detection. The pressure detection structure includes: N piezo-resistors connected at the first dielectric layer to form a Wheatstone bridge, where an opening of a first cavity is provided on the first surface of the substrate. The two ends, in a first direction, of the vertical projection of a first piezo-resistor among the N piezo-resistors on a contact surface between the N piezo-resistors and the first dielectric layer are located respectively on the two sides, in the first direction, of the vertical projection of the first cavity on the contact surface. The long side of a second piezo-resistor among the N piezo-resistors is perpendicular to the first direction, and the vertical projection of the second piezo-resistor on the contact surface does not overlap with the vertical projection of the first cavity.

A measurement system for an aircraft gas turbine engine includes a probe and a heated-gas source in fluid communication with the pressure probe. The probe includes a probe body defining an internal cavity of the probe. The probe further includes a plurality of sensor inlet ports extending through the probe body and configured to receive a sensed fluid flow. The probe further includes a plurality of probe conduits. Each probe conduit of the plurality of probe conduits is coupled to a respective sensor inlet port of the plurality of sensor inlet ports and extending from the respective sensor inlet port to an exterior of the probe body. The heated-gas source is configured to supply a heated gas flow to one or both of: the plurality of sensor inlet ports via the plurality of probe conduits and an interior of the probe body outside of the plurality of probe conduits.

A measurement system for an aircraft gas turbine engine includes a probe and a heated-gas source in fluid communication with the pressure probe. The probe includes a probe body defining an internal cavity of the probe. The probe further includes a plurality of sensor inlet ports extending through the probe body and configured to receive a sensed fluid flow. The probe further includes a plurality of probe conduits. Each probe conduit of the plurality of probe conduits is coupled to a respective sensor inlet port of the plurality of sensor inlet ports and extending from the respective sensor inlet port to an exterior of the probe body. The heated-gas source is configured to supply a heated gas flow to one or both of: the plurality of sensor inlet ports via the plurality of probe conduits and an interior of the probe body outside of the plurality of probe conduits.

A pressure sensor includes a sensor chip. The sensor chip has two diaphragms, recessed portions that serve as first pressure inlet chambers disposed so as to respectively adjoin top surfaces of the diaphragms, and recessed portions that serve as second pressure inlet chambers disposed so as to respectively adjoin bottom surfaces of the diaphragms. A cavity is provided in the sensor chip such that, when a difference between pressures respectively applied to a top surface and bottom surface of the diaphragm is zero, an output voltage of a Wheatstone bridge circuit made up of strain gauges provided in the diaphragm is zero.

An optical sensor includes a tube-shaped base formed from a metal, an optical fiber member received inside the base, and a sensor head formed from monocrystalline alumina and bonded to the base to be optically connected with the optical fiber member. The sensor head is provided with a first cavity including a first reflection surface configured to reflect a part of light introduced through the optical fiber member and a second reflection surface provided facing the first reflection surface and configured to reflect a part of the light reflected by the first reflection surface. A first interference light produced by an interference between the light reflected by the first reflection surface and the light reflected by the second reflection surface is output from the first cavity.

A temperature compensated differential pressure system is provided. The system includes a pair of flanges affixed together each having a flange diaphragm therein, wherein a plurality of capillary tubes extends between the pair of flanges and a pair of opposed remote diaphragm housings. The remote diaphragm housings include a remote diaphragm therein, wherein the remote diaphragm displaces a fill fluid in pressure capillaries to displace each flange diaphragm to detect a differential pressure between each location of the remote diaphragm housings. A compensating capillary extends from the remote diaphragm housings to an opposing flange diaphragm, wherein the compensating capillary is not in operable communication with the remote diaphragms. As such, any fluctuation in fill fluid volume of the compensating capillaries due to temperature fluctuations is applied to an opposing flange diaphragm to cancel temperature effects from the differential pressure determination.