A temperature correction device includes a data acquisition portion that acquires physical quantity data based on an output signal from a physical quantity sensor and temperature data based on an output signal from a temperature sensor, a physical quantity measurement portion that measures a physical quantity detected by the physical quantity sensor based on the physical quantity data, a correction value calculation portion that calculates a correction value based on a product of a temperature gradient value for a first period from a first time to a second time obtained based on the temperature data and a correction coefficient value, and a correction portion that corrects a measurement value of the physical quantity measured by the physical quantity measurement portion based on the correction value.

Certain example implementations of the disclosed technology include an optical-interferometer sensor assembly for measuring pressure or acceleration. The sensor assembly includes a diaphragm configured to deflect responsive to an applied stimulus, a diaphragm support structure in communication with the diaphragm, a sensing optical interferometer having a first optical cavity in communication with at least a portion of the diaphragm and the diaphragm support structure, and a reference optical interferometer having a second optical cavity in communication with the diaphragm support structure. The sensor assembly can include a sensing optical fiber in communication with the sensing optical interferometer and a reference optical fiber in communication with the reference optical interferometer. The sensor assembly can include a housing in communication with the diaphragm and the diaphragm support structure, and configured to reduce a thermal expansion mismatch in the sensor assembly.

Certain example implementations of the disclosed technology include an optical-interferometer sensor assembly for measuring pressure or acceleration. The sensor assembly includes a diaphragm configured to deflect responsive to an applied stimulus, a diaphragm support structure in communication with the diaphragm, a sensing optical interferometer having a first optical cavity in communication with at least a portion of the diaphragm and the diaphragm support structure, and a reference optical interferometer having a second optical cavity in communication with the diaphragm support structure. The sensor assembly can include a sensing optical fiber in communication with the sensing optical interferometer and a reference optical fiber in communication with the reference optical interferometer. The sensor assembly can include a housing in communication with the diaphragm and the diaphragm support structure, and configured to reduce a thermal expansion mismatch in the sensor assembly.

A high-precision pressure sensor, having a first base body that has two electrically conductive layers and an insulation layer arranged between the two layers and electrically insulating the two layers from one another, an electrically conductive measurement membrane arranged on the first base body with inclusion of a pressure chamber, which measurement membrane can be charged with a pressure to be measured, and an electrode provided in the membrane-facing layer and spaced apart from the measurement membrane, which electrode together with the measurement membrane forms a capacitor having a capacitance that varies according to the pressure acting upon the measurement membrane. The first base body is characterized in that it has a measurement membrane terminal via which a reference potential can be applied to the measurement membrane, an electrode terminal via which an electrode potential of the electrode can be tapped, and a shield terminal via which a shield potential that can be predetermined independently of the reference potential especially, a shield potential corresponding to the electrode potential can be applied to the layer facing away from the membrane.

A differential pressure sensor may include a body with a first end, second end and wall wherein the first and second ends comprise isolator diaphragms connected to first and second process fluid inlets. A MEMS pressure sensor including a pressure sensing diaphragm with first and second sides may be mounted on a hollow pedestal adhesively attached to an annular bottom of a cylindrical cavity wherein the first side of the sensor is coupled to the first isolator diaphragm by a first fill fluid and the second side of the sensor is coupled to the second isolator diaphragm through the interior of the hollow pedestal by a second fill fluid volume wherein the first and second fill fluid volumes are separated by an adhesive seal between the bottom of the cylindrical cavity and the bottom of the hollow pedestal wherein the cylindrical cavity comprises a first cylindrical wall with a first diameter in contact with the annular bottom, a frustroconical portion in contact with the first cylindrical wall and in contact with a second cylindrical wall with a second diameter larger than the first diameter such that the increased distance between the pedestal and the cylindrical wall prevents adhesive moving up the space between the pedestal and cavity wall from the bottom of the cavity when the pressure sensor and hollow pedestal are mounted in the cavity. The sensor further includes sensor elements on the MEMS diaphragm that provide an indication of pressure differences between the first and second process fluids.

The present invention makes it possible to, even when a stainless steel is adopted in a diaphragm: prevent the diaphragm and a strain sensor from exfoliating from each other; be hardly susceptible to the influence of temperature in an operating environment; not allow the sensitivity of a pressure sensor to be dominated only by the mechanical characteristic of a material constituting the diaphragm; and increase the degree of freedom in design of members constituting the pressure sensor. A pressure sensor according to the present invention is, in order to solve the above problems, characterized in that: the pressure sensor has a diaphragm deforming by the pressure of a fluid, an elastic body covering the whole surface of the diaphragm and joining to the diaphragm on one side, and a strain sensor being arranged by joining on the other side of the elastic body and on an end side apart from a position corresponding to the center of the diaphragm and detecting the deformation of the elastic body working together with the deformation of the diaphragm as a strain; and the elastic body is formed of a material having a linear expansion coefficient close to the linear expansion coefficient of a material constituting the strain sensor.

A pressure sensor comprising at least a pressure measuring cell, a pressure balancer, as well as at least one measurement line to transfer a pressure applied to the pressure means to the pressure measuring cell, wherein the pressure sensor comprises at least one compensation line showing the same features as the measurement line, which is arranged parallel in reference to the measurement line.

A pressure sensor comprising at least a pressure measuring cell, a pressure balancer, as well as at least one measurement line to transfer a pressure applied to the pressure means to the pressure measuring cell, wherein the pressure sensor comprises at least one compensation line showing the same features as the measurement line, which is arranged parallel in reference to the measurement line.

A diaphragm seal for transmitting the pressure of a process medium includes a main body having a surface and a separating membrane secured to the surface, thereby forming between the separating membrane and the surface a pressure chamber which communicates, via an opening in the surface, with a hydraulic path. The separating membrane can be exposed to the process medium on a first side, and the separating membrane has a central middle region. The diaphragm seal further includes a temperature transducer for determining a temperature measurement variable of the process medium, which is secured in the middle region on a second side of the separating membrane, and the main body is joined to the separating membrane such that a transmitting fluid, which fills the pressure chamber and the hydraulic path, does not come into contact with the temperature transducer.

A diaphragm seal for transmitting the pressure of a process medium includes a main body having a surface and a separating membrane secured to the surface, thereby forming between the separating membrane and the surface a pressure chamber which communicates, via an opening in the surface, with a hydraulic path. The separating membrane can be exposed to the process medium on a first side, and the separating membrane has a central middle region. The diaphragm seal further includes a temperature transducer for determining a temperature measurement variable of the process medium, which is secured in the middle region on a second side of the separating membrane, and the main body is joined to the separating membrane such that a transmitting fluid, which fills the pressure chamber and the hydraulic path, does not come into contact with the temperature transducer.