A pressure sensor made of semiconductor material, the sensor comprising a box defining a housing under a secondary vacuum, at least one resonator received in the housing and suspended by flexible beams from at least one elastically deformable diaphragm closing the housing that also contains means for exciting the resonator in order to set the resonator into vibration and detector means for detecting a vibration frequency of the resonator. The detector means comprise at least a first suspended piezoresistive strain gauge having one end secured to one of the beams and one end secured to the diaphragm. The resonator and the first strain gauge are arranged to form zones of doping that are substantially identical in kind and in concentration.

A remote seal assembly for a process transmitter includes a seal body containing a cavity sealed by a diaphragm. The seal body configured to be mounted to a process element containing a process fluid such that a first side of the diaphragm is exposed to the process fluid. A capillary contains a fill fluid that is in fluid communication with the cavity and a second side of the diaphragm. A coupling has a capillary recess and two cavities separated by a second diaphragm. The capillary extends through the capillary recess and connects to the coupling such that the fill fluid in the capillary is in fluid communication with one of the two cavities and the second diaphragm. A thermally conductive element preferably extends continuously along the capillary from the seal body toward the coupling and into the capillary recess without contacting the coupling.

A remote seal assembly for a process transmitter includes a seal body containing a cavity sealed by a diaphragm. The seal body configured to be mounted to a process element containing a process fluid such that a first side of the diaphragm is exposed to the process fluid. A capillary contains a fill fluid that is in fluid communication with the cavity and a second side of the diaphragm. A coupling has a capillary recess and two cavities separated by a second diaphragm. The capillary extends through the capillary recess and connects to the coupling such that the fill fluid in the capillary is in fluid communication with one of the two cavities and the second diaphragm. A thermally conductive element preferably extends continuously along the capillary from the seal body toward the coupling and into the capillary recess without contacting the coupling.

An apparatus and a method for measuring and monitoring the properties of a fluid, for example, pressure, temperature, and chemical properties, within a sample holder for an electron microscope. The apparatus includes at least one fiber optic sensor used for measuring temperature and/or pressure and/or pH positioned in proximity of the sample.

An apparatus and a method for measuring and monitoring the properties of a fluid, for example, pressure, temperature, and chemical properties, within a sample holder for an electron microscope. The apparatus includes at least one fiber optic sensor used for measuring temperature and/or pressure and/or pH positioned in proximity of the sample.

A sensing system that provides an isolation diaphragm through which pressure is transmitted from a process fluid to a fill fluid contained within the sensing system's body is provided. In the system, fill fluid transfers pressure to semiconductor sensors that provide signals for both the differential pressure and the static pressure, thereby allowing for signal conditioning of the differential output to compensate for the effects of static pressure. The system's body provides a cavity for fill fluid behind each of the isolation diaphragms. At least one flat plate actuation diaphragm allows controlled movement of oil as the differential pressure of the isolation diaphragm increases. Fluid volumes are managed for thermal effects, passive thermal volume change; compensation is accomplish by offsetting the large coefficient of thermal expansion (CTE) of fill fluid by providing at least one insert whose coefficient of thermal expansion is smaller than the CTE of the system body.

A pressure sensor includes an elongate body which deforms in response to an applied pressure having a cavity formed therein. An isolation diaphragm seals the cavity from a process fluid and is configured to deflect in response to applied process pressure from the process fluid. An isolation fill fluid in the cavity applies pressure to the elongate body in response to deflection of the isolation diaphragm thereby causing deflection of the elongate body. A deformation sensor is coupled to the elongate body and provides a sensor output in response to deformation of the elongate body which is indicative of the process pressure.

A universal mounting system for insulated instruments includes a mounting plate which engages openings in mating parts of a self-supporting insulated enclosure. The plate supports the instrument and the enclosure independently and allows all connections to the interior of the enclosure to be made through the plate. The plate is bent to an L-shape, with one leg supported by a support structure and the other leg supporting the instrument and enclosure. A termination of a traced tubing system is housed in an enclosure mounted to an opposite side of the mounting plate. The mounting plate includes a collar, cutouts in mating sections of the enclosure fitting over the collar to mount the enclosure to the mounting plate. Illustratively, the mounting plate includes a mount plate portion connected to a supporting structure, and an instrument plate mounted to the instrument.

A universal mounting system for insulated instruments includes a mounting plate which engages openings in mating parts of a self-supporting insulated enclosure. The plate supports the instrument and the enclosure independently and allows all connections to the interior of the enclosure to be made through the plate. The plate is bent to an L-shape, with one leg supported by a support structure and the other leg supporting the instrument and enclosure. A termination of a traced tubing system is housed in an enclosure mounted to an opposite side of the mounting plate. The mounting plate includes a collar, cutouts in mating sections of the enclosure fitting over the collar to mount the enclosure to the mounting plate. Illustratively, the mounting plate includes a mount plate portion connected to a supporting structure, and an instrument plate mounted to the instrument.

A diaphragm seal system, which is filled with a pressure transmission medium, wherein the pressure measurement instrument is welded by its connecting thread into a connecting adapter.