According to one embodiment, an X-ray diagnostic apparatus includes an X-ray irradiator, a scatterer, a grid, and a detector. The X-ray irradiator irradiates X-rays. The scatterer is provided between the X-ray irradiator and an object, that scatters the irradiated X-rays. The grid is provided between the scatterer and the object, that transmits the scattered X-rays within a predetermined angular range. The detector detects X-rays transmitted through the object together with an incident angle of the X-rays.

Methods and systems for determining one or more characteristics of light in an optical system are provided. One system includes first detector(s) configured to detect light having one or more wavelengths shorter than 190 nm emitted from a light source at one or more first angles mutually exclusive of one or more second angles at which the light is collected from the light source by an optical system for illumination of a specimen and to generate first output responsive to the light detected by the first detector(s). In addition, the system includes a control subsystem configured for determining one or more characteristics of the light at one or more planes in the optical system based on the first output.

Methods and systems for determining one or more characteristics of light in an optical system are provided. One system includes first detector(s) configured to detect light having one or more wavelengths shorter than 190 nm emitted from a light source at one or more first angles mutually exclusive of one or more second angles at which the light is collected from the light source by an optical system for illumination of a specimen and to generate first output responsive to the light detected by the first detector(s). In addition, the system includes a control subsystem configured for determining one or more characteristics of the light at one or more planes in the optical system based on the first output.

An x-ray system, comprising: a backscatter detector, comprising: an x-ray conversion material; a plurality of sensors configured to generate electrical signals in combination with the x-ray conversion material in response to incident x-rays; and a collimator disposed on the x-ray conversion material and including a plurality of partitions extending away from the x-ray conversion material and the sensors and forming a plurality of openings, each opening corresponding to one of the sensors.

A material analysis method is provided. A plurality of wafers processed from a plurality of ingots are measured by a measuring instrument to obtain an average of a bow of each of the wafers processed from the ingots and a plurality of full widths at half maximum (FWHM) of each of the wafers. Key factors respectively corresponding to the ingots are calculated according to the FWHM of the wafers. A regression equation is obtained according to the key factors and the average of the bows.

A material analysis method is provided. A plurality of wafers processed from a plurality of ingots are measured by a measuring instrument to obtain an average of a bow of each of the wafers processed from the ingots and a plurality of full widths at half maximum (FWHM) of each of the wafers. Key factors respectively corresponding to the ingots are calculated according to the FWHM of the wafers. A regression equation is obtained according to the key factors and the average of the bows.

Provided is a manufacturing method of an interior member of a plasma processing apparatus, which improves processing yield. The interior member is disposed inside a processing chamber of the plasma processing apparatus and includes, on a surface thereof, a film of a material having resistance to plasma. The manufacturing method includes: a step of moving a gun by a predetermined distance along the surface of the interior member to spray the material to form the film, and disposing a test piece having a surface having a shape simulating a surface shape of the interior member within a range of the distance within which the gun is moved and forming the film of the material on the surface of the test piece; and a step of adjusting, based on a result of detecting a crystal size of the film on the surface of the test piece and presence or absence of a residual stress or inclusion of a contaminant element, a condition of forming the film on the surface of the interior member by the gun.

Provided is a manufacturing method of an interior member of a plasma processing apparatus, which improves processing yield. The interior member is disposed inside a processing chamber of the plasma processing apparatus and includes, on a surface thereof, a film of a material having resistance to plasma. The manufacturing method includes: a step of moving a gun by a predetermined distance along the surface of the interior member to spray the material to form the film, and disposing a test piece having a surface having a shape simulating a surface shape of the interior member within a range of the distance within which the gun is moved and forming the film of the material on the surface of the test piece; and a step of adjusting, based on a result of detecting a crystal size of the film on the surface of the test piece and presence or absence of a residual stress or inclusion of a contaminant element, a condition of forming the film on the surface of the interior member by the gun.

This invention patent application addresses a system for the detection and quantification of mineralogical species via x-ray diffraction (XRD) of the concentrate of dry copper before it is injected into a converter or melting furnace. Specifically, it addresses a device that performs a mineralogical analysis, in line and in real time, of the concentrate of copper in the bath smelting furnace via x-ray diffraction (XRD), which allows for control over the ideal mixture for the optimal process for copper sulfide (Cu2S)-white metal, iron sulfide (FeS)-Slag and pyritic sulfur (S2)-temperature.

A non-destructive inspection system includes: a neutron emission unit 12 capable of emitting neutrons pulsed; a neutron detector capable of detecting the neutrons emitted from the neutron emission unit and penetrating through an inspection object; a storage unit storing attenuation information indicating a relationship between a material of the inspection object and attenuation of the neutrons; and a calculation unit capable of calculating distance information indicating a position of a specific portion in the inspection object in accordance with time change information which is information on a change over time in an amount of the neutrons detected by the neutron detector. The calculation unit is capable of generating information related to an amount of the specific portion from information based on the amount of the neutrons according to the time change information, using the distance information and the attenuation information.